Half profile slot valve
First Claim
1. A vacuum valve comprising,a valve housing defining a valve chamber, the valve housing having an opening,a valve gate movable within the valve chamber from a first position away from the opening to a second position closing the opening, andan actuator assembly for moving the valve gate between its first and second positions, the actuator assembly including a cylinder component and a piston component having a piston slidably movable within the cylinder component and a piston rod extending out one end of the cylinder component and connected to the valve gate,the piston component and the cylinder component defining a first working chamber above the piston for moving the piston component in a first direction, and a second working chamber below the piston and adjacent the piston rod,the actuator assembly further including an inner actuator within the second working chamber that includes an inner working chamber for moving the piston component in a second direction, andan expandable bellows shield within the second working chamber for isolating the valve chamber from the second working chamber.
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Accused Products
Abstract
A slot valve (10) comprising a valve housing (12) defining a valve chamber (14) and having a valve gate (34) movable to seal off a central opening (30). An actuator assembly (46) includes a piston component (70, 72) and a cylinder component (60), and a pair of inner telescoping actuators (108), which define inner working chambers (120). Wear rings (124, 126, 128) engage guide surfaces that are isolated from valve chamber (14) by means of a bellows shield (90). The guide surfaces are positioned at least partially along the length of the bellows shield (90), within the second working chamber (104) of the actuator, so as to decrease the height of the actuator.
22 Citations
17 Claims
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1. A vacuum valve comprising,
a valve housing defining a valve chamber, the valve housing having an opening, a valve gate movable within the valve chamber from a first position away from the opening to a second position closing the opening, and an actuator assembly for moving the valve gate between its first and second positions, the actuator assembly including a cylinder component and a piston component having a piston slidably movable within the cylinder component and a piston rod extending out one end of the cylinder component and connected to the valve gate, the piston component and the cylinder component defining a first working chamber above the piston for moving the piston component in a first direction, and a second working chamber below the piston and adjacent the piston rod, the actuator assembly further including an inner actuator within the second working chamber that includes an inner working chamber for moving the piston component in a second direction, and an expandable bellows shield within the second working chamber for isolating the valve chamber from the second working chamber.
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10. A slot valve for creating a vacuum tight seal to a vacuum chamber, comprising
a valve housing defining a valve chamber, the valve chamber having an opening therein for providing access to the vacuum chamber, a valve gate movable within the valve chamber from a first, open position away from the opening to a second, closed position wherein the valve gate closes the opening to the vacuum chamber, an actuator assembly including a movable piston component that is connected at one end to the valve gate and a cylinder component connected to the valve housing, the piston component and the cylinder component defining a first working chamber for moving the piston component in a first direction and a second working chamber on the piston rod side of the piston, a bellows shield extending between the piston component and the cylinder component for isolating the second working chamber from the valve chamber, the actuator assembly including bellows isolating structure that isolates the working pressure region of the second working chamber from the bellows shield, the bellows isolating structure extending along at least a portion of the bellows shield, the bellows isolating structure and bellows shield being positioned within the actuator assembly and out of the valve chamber.
Specification