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Half profile slot valve

  • US 5,881,998 A
  • Filed: 07/14/1997
  • Issued: 03/16/1999
  • Est. Priority Date: 07/14/1997
  • Status: Expired due to Fees
First Claim
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1. A vacuum valve comprising,a valve housing defining a valve chamber, the valve housing having an opening,a valve gate movable within the valve chamber from a first position away from the opening to a second position closing the opening, andan actuator assembly for moving the valve gate between its first and second positions, the actuator assembly including a cylinder component and a piston component having a piston slidably movable within the cylinder component and a piston rod extending out one end of the cylinder component and connected to the valve gate,the piston component and the cylinder component defining a first working chamber above the piston for moving the piston component in a first direction, and a second working chamber below the piston and adjacent the piston rod,the actuator assembly further including an inner actuator within the second working chamber that includes an inner working chamber for moving the piston component in a second direction, andan expandable bellows shield within the second working chamber for isolating the valve chamber from the second working chamber.

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