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Method of manufacturing microfluidic devices

  • US 5,882,465 A
  • Filed: 06/18/1997
  • Issued: 03/16/1999
  • Est. Priority Date: 06/18/1997
  • Status: Expired due to Term
First Claim
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1. A method of forming microfluidic devices comprising:

  • providing a first substrate having at least a first planar surface, a second surface opposite the planar surface, and having a plurality of apertures disposed through the first substrate from the first surface to the second surface;

    applying a vacuum to the apertures;

    mating the first planar surface of the first substrate with a first planar surface of a second substrate, wherein at least one of the first planar surface of the first substrate and the first planar surface of the second substrate comprises at least two intersecting channels fabricated therein, each of the channels being in fluid communication with at least one of the apertures disposed through the first substrate when the first and second substrates are mated; and

    bonding the first surface of the first substrate to the first surface of the second substrate.

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