Laser vibrometer for vibration measurements
First Claim
1. A laser vibrometer for vibration measurements which operates according to the principle of the heterodyne interferometer, comprising in combination:
- means including a laser diode for producing a parallel beam of light radiation;
a Michelson interferometer including means for receiving the parallel beam and splitting same into first partial beam in a reference arm and a second partial beam in a measuring arm, with the first partial beam being reflected from a mirror disposed at a fixed position and the second partial beam being reflected from an object to be measured disposed at a known distance, and for combining the reflected partial beams to form an interference pattern in an interference arm, with one of the reference and measuring arms being considerably longer than the other by approximately 20 cm to approximately 100 cm;
means for modulating the frequency of the laser produced radiation to attain a necessary frequency shift (Δ
v);
a single detector for detecting the interference pattern in said interference arm; and
an evaluation circuit means, responsive to the detected interference pattern and an output signal from said means for modulating representing the modulation, for providing an output signal corresponding to the axial out of plane vibration of the test object.
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Accused Products
Abstract
A laser diode (1) of a laser vibrometer emits light which is guided onto a polarization beam splitter (3) by a lens 2. A portion of the beam is guided through directly to an imaging lens (4) and a second portion is deflected onto a mirror (5). Quarter-wave plates (6) and (7) are arranged between the polarization beam splitter and respectively the lens or the mirror. The beam which is reflected on the mirror is guided completely through the polarization beam splitter onto a photodetector unit (8). The beam reflected by the object (9) to be measured, which swings in the direction (14), is also deflected to the photodetector unit. The output signal of the photodetector unit, the interference signal generated from the superposition of the two reflected beams, is supplied to an electronic evaluation equipment (10). The latter is also supplied with a signal of a current modulator (11) which, on the other hand, supplies the laser diode with modulated injection current via line (12). The distance between the imaging lens and the object to be measured forms an optical detour (13) which is considerably lengthened compared to the reference arm.
58 Citations
10 Claims
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1. A laser vibrometer for vibration measurements which operates according to the principle of the heterodyne interferometer, comprising in combination:
- means including a laser diode for producing a parallel beam of light radiation;
a Michelson interferometer including means for receiving the parallel beam and splitting same into first partial beam in a reference arm and a second partial beam in a measuring arm, with the first partial beam being reflected from a mirror disposed at a fixed position and the second partial beam being reflected from an object to be measured disposed at a known distance, and for combining the reflected partial beams to form an interference pattern in an interference arm, with one of the reference and measuring arms being considerably longer than the other by approximately 20 cm to approximately 100 cm;
means for modulating the frequency of the laser produced radiation to attain a necessary frequency shift (Δ
v);
a single detector for detecting the interference pattern in said interference arm; and
an evaluation circuit means, responsive to the detected interference pattern and an output signal from said means for modulating representing the modulation, for providing an output signal corresponding to the axial out of plane vibration of the test object. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- means including a laser diode for producing a parallel beam of light radiation;
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8. A method of measuring the vibration of devices or components thereof to detect points which cause great and/or unpleasant noise comprising the step of:
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providing a laser vibrometer which operates according to the principle of the heterodyne interferometer, and which comprises means including a laser diode for producing a parallel beam of light radiation;
a Michelson interferometer including means for receiving the parallel beam and splitting same into first partial beam in a reference arm and a second partial beam in a measuring arm, with the first partial beam being reflected from a mirror disposed at a fixed position and the second partial beam being reflected from an object to be measured disposed at a known distance, and for combining the reflected partial beams to form an interference pattern in an interference arm, with one of the reference and measuring arms being considerably longer than the other by approximately 20 cm to approximately 100 cm;
means for modulating the frequency of the laser produced radiation to attain a necessary frequency shift (Δ
v);
a single detector for detecting the interference pattern in the interference arm; and
an evaluation circuit means, responsive to the detected interference pattern and an output signal from said means for modulating representing the modulation, for providing an output signal corresponding to the axial out of plane vibration of the test object;positioning the vibrometer such that the device constitutes the object to be measured; and
,measuring the axial out of plane vibration of the device with the vibrometer.
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9. A method of measuring the vibration of devices or components thereof to detect points at which there exists risk of fracture and/or the risk of premature wear due to high and/or, with respect to frequency, particularly critical vibration amplitudes;
- comprising the steps of;
providing a laser vibrometer which operates according to the principle of the heterodyne interferometer, and which comprises means including a laser diode for producing a parallel beam of light radiation;
a Michelson interferometer including means for receiving the parallel beam and splitting same into first partial beam in a reference arm and a second partial beam in a measuring arm, with the first partial beam being reflected from a mirror disposed at a fixed position and the second partial beam being reflected from an object to be measured disposed at a known distance, and for combining the reflected partial beams to form an interference pattern in an interference arm, with one of the reference and measuring arms being considerably longer than the other by approximately 20 cm to approximately 100 cm;
means for modulating the frequency of the laser produced radiation to attain a necessary frequency shift (Δ
v);
a single detector for detecting the interference pattern in the interference arm; and
an evaluation circuit means, responsive to the detected interference pattern and an output signal from said means for modulating representing the modulation, for providing an output signal corresponding to the axial out of plane vibration of the test object;positioning the vibrometer such that the device constitutes the object to be measured; and
,measuring the axial out of plane vibrations of the device with the vibrometer.
- comprising the steps of;
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10. A a method of measuring the vibration of devices or components thereof to detect rhythmically recurring vibrations which, in terms of their evaluation, are convertible into rotational speeds of internal combustion engines comprising the steps of:
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providing a laser vibrometer which operates according to the principle of the heterodyne interferometer, and which comprises means including a laser diode for producing a parallel beam of light radiation;
a Michelson interferometer including means for receiving the parallel beam and splitting same into first partial beam in a reference arm and a second partial beam in a measuring arm, with the first partial beam being reflected from a mirror disposed at a fixed position and the second partial beam being reflected from an object to be measured disposed at a known distance, and for combining the reflected partial beams to form an interference pattern in an interference arm, with one of the reference and measuring arms being considerably longer than the other by approximately 20 cm to approximately 100 cm;
means for modulating the frequency of the laser produced radiation to attain a necessary frequency shift (Δ
v);
a single detector for detecting the interference pattern in the interference arm; and
an evaluation circuit means, responsive to the detected interference pattern and an output signal from said means for modulating representing the modulation, for providing an output signal corresponding to the axial out of plane vibration of the test object;positioning the vibrometer such that the device constitutes the object to be measured; and
,measuring the axial out of plane vibrations of the device with the vibrometer.
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Specification