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Apparatus for beam splitting

  • US 5,883,746 A
  • Filed: 03/20/1997
  • Issued: 03/16/1999
  • Est. Priority Date: 09/22/1994
  • Status: Expired due to Fees
First Claim
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1. An apparatus for splitting a light beam into a first and a second sub-beam, comprising:

  • a stationary light source for generating a light beam on an optical axis;

    an objective arranged in the optical axis in front of the light source;

    a deflection unit rotatable about the optical axis, said light beam being incident onto said deflection unit;

    a polarization beam splitter in said deflection unit arranged on the optical axis for dividing the light beam into a first polarized light component as said first sub-beam reflected by said polarization beam splitter substantially perpendicular to the optical axis and into a second polarized light component transmitted by said polarization beam splitter substantially in a direction of the optical axis, a polarization converter and a reflector being arranged on the optical axis behind said polarization beam splitter for phase turning the second light component by 90°

    in phase with respect to a polarization direction and for reflecting the phase-turned second beam component back to the polarization beam splitter at which the phase-turned second beam component is reflected as said second sub beam substantially perpendicular to said optical axis;

    respective focusing units in said deflection unit for focusing said first and second sub-beams onto respective surfaces;

    for correcting relative positional offsets of the first and second sub-beams relative to one another, the reflector comprising a prism with at least two mirror faces residing at an angle relative to one another for reflecting the phase-turned second beam component back to said polarization converter after the second beam component has passed through the polarization converter to said prism.

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