Apparatus for beam splitting
First Claim
1. An apparatus for splitting a light beam into a first and a second sub-beam, comprising:
- a stationary light source for generating a light beam on an optical axis;
an objective arranged in the optical axis in front of the light source;
a deflection unit rotatable about the optical axis, said light beam being incident onto said deflection unit;
a polarization beam splitter in said deflection unit arranged on the optical axis for dividing the light beam into a first polarized light component as said first sub-beam reflected by said polarization beam splitter substantially perpendicular to the optical axis and into a second polarized light component transmitted by said polarization beam splitter substantially in a direction of the optical axis, a polarization converter and a reflector being arranged on the optical axis behind said polarization beam splitter for phase turning the second light component by 90°
in phase with respect to a polarization direction and for reflecting the phase-turned second beam component back to the polarization beam splitter at which the phase-turned second beam component is reflected as said second sub beam substantially perpendicular to said optical axis;
respective focusing units in said deflection unit for focusing said first and second sub-beams onto respective surfaces;
for correcting relative positional offsets of the first and second sub-beams relative to one another, the reflector comprising a prism with at least two mirror faces residing at an angle relative to one another for reflecting the phase-turned second beam component back to said polarization converter after the second beam component has passed through the polarization converter to said prism.
3 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for splitting a light beam into two sub-beams is formed of a stationary light source for generating a light beam, of a first polarization converter and of a deflection unit rotating around the optical axis in which two sub-beams are generated from the light beam. The deflection unit contains a polarization beam splitter, a following, second polarization converter and a reflector that is preferably designed as a prism. An automatic correction of positional offsets of the sub-beams is implemented in the deflection unit since the polarization beam splitter or the deflection unit is tilted and/or the lenses are shifted with adjustment drives. The positional offsets of the sub-beams are measured in their focus plane, and corresponding correction values are transmitted with a transformer to the adjustment drives in the rotating deflection unit.
-
Citations
34 Claims
-
1. An apparatus for splitting a light beam into a first and a second sub-beam, comprising:
-
a stationary light source for generating a light beam on an optical axis; an objective arranged in the optical axis in front of the light source; a deflection unit rotatable about the optical axis, said light beam being incident onto said deflection unit; a polarization beam splitter in said deflection unit arranged on the optical axis for dividing the light beam into a first polarized light component as said first sub-beam reflected by said polarization beam splitter substantially perpendicular to the optical axis and into a second polarized light component transmitted by said polarization beam splitter substantially in a direction of the optical axis, a polarization converter and a reflector being arranged on the optical axis behind said polarization beam splitter for phase turning the second light component by 90°
in phase with respect to a polarization direction and for reflecting the phase-turned second beam component back to the polarization beam splitter at which the phase-turned second beam component is reflected as said second sub beam substantially perpendicular to said optical axis;respective focusing units in said deflection unit for focusing said first and second sub-beams onto respective surfaces; for correcting relative positional offsets of the first and second sub-beams relative to one another, the reflector comprising a prism with at least two mirror faces residing at an angle relative to one another for reflecting the phase-turned second beam component back to said polarization converter after the second beam component has passed through the polarization converter to said prism. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
-
-
31. An apparatus for splitting a light beam into first and second sub-beams, comprising:
-
a light source for generating a light beam along an optical axis; an objective arranged on the optical axis in front of the light source; a deflection unit receiving the light beam passing through the objective and rotatable around the optical axis, said deflection unit having; a polarization beam splitter for dividing the polarized light beam into a reflective, polarized light component as said first sub-beam that proceeds substantially perpendicular to the optical axis, and into a polarized light component that is allowed to pass and proceeds substantially in a direction of the optical axis; a polarization converter and a reflector after the polarization converter arranged on the optical axis behind the polarization beam splitter, the polarization converter turning the light component as it passes through the converter by 90°
in phase with respect to the polarization direction, and the reflector reflecting the light component passing through the polarization converter back through the polarization converter and to the polarization beam splitter where it is reflected at the polarization beam splitter to form said second sub-beam; andthe reflector comprising a three sided triangular prism having a face running perpendicular to the optical axis and facing the polarization converter, said reflector being designed such that the light beam incident at an arbitrary angle in turn emerges from the prism parallel to the incident light beam and deflected by 180°
. - View Dependent Claims (32)
-
-
33. An apparatus for splitting a light beam into first and second sub-beams, comprising:
-
a light source for generating a light beam along an optical axis; an objective arranged on the optical axis in front of the light source; a deflection unit receiving the light beam passing through the objective and rotatable around the optical axis, said deflection unit having; a polarization beam splitter for dividing the polarized light beam into a reflective, polarized light component as said first sub-beam that proceeds substantially perpendicular to the optical axis, and into a polarized light component that is allowed to pass and proceeds substantially in a direction of the optical axis; a polarization converter and a reflector arranged on the optical axis behind the polarization beam splitter, the polarization converter turning the light component as it passes through the converter by 90°
in phase with respect to the polarization direction, and the reflector reflecting the light component passing through the polarization converter back through the polarization converter and to the polarization beam splitter where it is reflected at the polarization beam splitter to form said second sub-beam;respective focusing units for the first and second sub-beams; a position measuring unit for determining a relative positional offset of at least one of the sub-beams on a reference surface and for determining a correction value corresponding to the determined positional offset; and a unit for changing at least one of angle of inclination of the polarization beam splitter relative to the optical axis or position of the focusing units for the sub-beams dependent on the correction value for correcting relative positional offset of the sub-beams. - View Dependent Claims (34)
-
Specification