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Substrate holding device and exposing apparatus using the same

  • US 5,883,932 A
  • Filed: 06/05/1995
  • Issued: 03/16/1999
  • Est. Priority Date: 09/25/1992
  • Status: Expired due to Fees
First Claim
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1. A substrate holding device comprising:

  • first and second vacuum clamping means each having a holding surface for holding a portion of a substrate;

    first driving means for rotating said first vacuum clamping means relative to said second vacuum clamping means; and

    second driving means for moving said first vacuum clamping means relative to said second vacuum clamping means in a direction perpendicular to the holding surfaces.

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