Substrate holding device and exposing apparatus using the same

• US 5,883,932 A
• Filed: 06/05/1995
• Issued: 03/16/1999
• Est. Priority Date: 09/25/1992
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Marumo, Mitsuji, Kurosawa, Hiroshi, Matsui, Shin, Iwamoto, Kazunori, Chiba, Yuji, Tanaka, Yutaka, Hara, Shinichi, Mizusawa, Nobutoshi
• Primary Examiner(s): Porta, David P.
• Application Number:
  US08/464,225
• Time in Patent Office: 1,380 Days
• Field of Search: 378/34, 378/208, 378/209, 378/68, 378/69, 378/205, 378/206, 269/21, 279/3, 250/442.11
• US Class Current: 378/34
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: H01J 2237/20 Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
• CPC Class Codes: H01J 2237/3175 Lithography
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: Y10T 279/11 Vacuum

Abstract

A substrate holding apparatus in which first and second vacuum clamping devices each have a holding surface for holding a portion of a substrate, a first driving device for rotating the first vacuum clamping device relative to the second vacuum clamping device, and a second driving device for reciprocally moving the first vacuum clamping device between a position in which it protrudes by a predetermined amount from the holding surface of the second vacuum clamping device and a position in which it does not protrude from that holding surface. Also disclosed is a substrate holding device in which a vacuum clamping device creates a vacuum clamp force on the holding surface thereof, a cylindrical delivering member surrounds at least a portion of the holding surface and is reciprocally movable between a position in which it protrudes by a predetermined amount from the holding surface and a position in which it does not protrude from the holding surface, and a driving device for moving the delivering member.

Claims

1. A substrate holding device comprising:

first and second vacuum clamping means each having a holding surface for holding a portion of a substrate;

first driving means for rotating said first vacuum clamping means relative to said second vacuum clamping means; and

second driving means for moving said first vacuum clamping means relative to said second vacuum clamping means in a direction perpendicular to the holding surfaces.

2. A substrate holding device according to claim 1, further comprising exposing means for effecting exposure on the held substrate.

3. A substrate holding device according to claim 1, further comprising stage means for moving the held substrate.

4. A substrate holding device according to claim 3, wherein said second vacuum clamping means includes a mechanism fixed to said stage means and comprises means for causing said first vacuum clamping means to be rotatable relative to said stage means.

5. A substrate holding device according to claim 3, further comprising a mirror for reflecting a light beam for measuring the position of said stage means, which is provided integrally with said second vacuum clamping means.

6. A substrate holding device according to claim 1, further comprising a liquid flow path for circulating temperature adjusting liquid through each of said first and second vacuum clamping means.

7. A substrate holding device comprising:

first vacuum clamping means and second vacuum clamping means, each having a holding surface for holding a portion of a substrate;

first driving means for rotating said first vacuum clamping means relative to said second vacuum clamping means; and

second driving means for relatively moving between said first vacuum clamping means and said second vacuum clamping means in a direction perpendicular to the respective holding surfaces of said first and second vacuum clamping means.

8. A substrate holding device according to claim 7, further comprising exposing means for effecting exposure on a substrate held by said first and second vacuum clamping means.

9. A substrate holding device according to claim 7, further comprising stage means for moving a substrate held by said first and second vacuum clamping means.

10. A substrate holding device according to claim 9, wherein said second vacuum clamping means comprises a mechanism fixed to said stage means, which comprises means for causing said first vacuum clamping means to be rotatable relative to said stage means.

11. A substrate holding device according to claim 9, further comprising a mirror for reflecting a light beam for measuring the position of said stage means, which is provided integrally with said second vacuum clamping means.

12. A substrate holding device according to claim 7, further comprising a liquid flow path for circulating a temperature adjusting liquid through each of said first and second vacuum clamping means.

13. A substrate holding device according to claim 7, wherein said first vacuum clamping means is disposed within said second vacuum clamping means.