Quartz tank for wet semiconductor wafer processing

• US 5,884,644 A
• Filed: 12/10/1997
• Issued: 03/23/1999
• Est. Priority Date: 12/10/1997
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Dunn, L. Brian
• Primary Examiner(s): Stinson, Frankie L.
• Application Number:
  US08/988,109
• Time in Patent Office: 468 Days
• Field of Search: 134/155, 134/186, 134/184, 134/198, 134/201, 134/902, 134/25.4
• US Class Current: 134/186
• CPC Class Codes: H01L 21/67075 for wet etching
• CPC Class Codes: H01L 21/67086 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: Y10S 134/902 Semiconductor wafer
• CPC Class Codes: Y10S 285/911 Glass
• CPC Class Codes: Y10S 411/908 Resinous material

Abstract

A quartz tank for wet semiconductor wafer processing includes one or more ports extending through the tank for the exchange of fluids with the tank. The openings may be aligned with a T-shaped quartz stem having an enlarged end retained on the interior side of said quartz tank in sealing abutment therewith. The lower end of the quartz stem may have external threads to abut with a suitable union. The union may include a nut having a reduced diameter lower end to engage an enlarged end of the tubing member connected to the bottom of the quartz stem. An o-ring seal may be sandwiched between the tubing and the lower end of the quartz stem. The nut may be formed of a carbon-fiber reinforced fluorocarbon material such as perfluoroalkoxy.

Claims

1. A quartz tank for holding chemicals for a wet semiconductor wafer processing comprising:

a chamber adapted to hold chemicals;

a port through said chamber;

a quartz stem having an enlarged end retained in said chamber and a tubular portion extending through said port, said tubular portion having external threads;

a pipe connected to said stem, said pipe having an enlarged end; and

a nut having a first end that engages said enlarged end of said pipe and a second end that is internally threaded to threadedly engage said external threads on said tubular portion.

2. The tank of claim 1 wherein said nut is formed of fluorocarbon.

3. The tank of claim 2 wherein said nut is formed of carbon fiber reinforced perfluoroalkoxy.

4. The tank of claim 1 including an o-ring secured between said quartz stem and said pipe, said o-ring secured in compression.

5. A quartz tank for holding chemicals for semiconductor wafer processing comprising:

a chemical chamber having a bottom and sides;

a port through the bottom of said chamber;

a quartz stem extending through said port, said stem including an upper enlarged end adapted to engage the bottom of said chamber and a lower tubular end having external screw threads;

a length of tubing having an outwardly extending end, abutted against said lower tubular end;

an o-ring retained between said tubing and said lower tubular end; and

a nut having a first end and an internally threaded end, said internally threaded end having a larger diameter than said first end, said first end abutted against said outwardly extending end of said tubing so as to hold said tubing against said stem, said internally threaded end threaded onto said external screw threads on said stem.

6. The tank of claim 5 wherein said nut is formed of carbon fiber reinforced perfluoroalkoxy.