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Gas injection slit nozzle for a plasma process reactor

  • US 5,885,358 A
  • Filed: 07/09/1996
  • Issued: 03/23/1999
  • Est. Priority Date: 07/09/1996
  • Status: Expired due to Fees
First Claim
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1. A plasma reactor comprising:

  • a reactor chamber having a sidewall;

    a pedestal for holding a wafer to be processed; and

    a gas injection system, comprising,plural gas supplies, each containing at least one process gas,a gas distribution apparatus disposed in said chamber sidewall, said gas distribution apparatus comprising plural gas distribution nozzles each with an annular slotted aperture facing an interior of the chamber, andplural gas feed lines wherein ones of the gas distribution nozzles are connected to ones of the gas supplies by ones of the gas feed lines.

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