Micromechanical component and production method

• US 5,885,468 A
• Filed: 12/09/1996
• Issued: 03/23/1999
• Est. Priority Date: 07/04/1994
• Status: Expired due to Term

• Current Assignee: Infineon Technologies AG
• Original Assignee: Siemens AG
• Inventors: Kozlowski, Frank
• Primary Examiner(s): Watkins, III, William P.
• Application Number:
  US08/750,499
• Time in Patent Office: 834 Days
• Field of Search: 428/143, 428/147, 428/156, 428/166, 428/421, 428/422, 427/534, 257/415, 73/514.32, 73/514.36, 73/514.37, 216/2, 216/11, 361/280, 438/52
• US Class Current: 216/2
• CPC Class Codes: B81B 3/001 Structures having a reduced contact area, e.g. with bumps or with a textured surface
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: Y10T 428/24372 Particulate matter
• CPC Class Codes: Y10T 428/24405 Polymer or resin [e.g., natural or synthetic rubber, etc.]
• CPC Class Codes: Y10T 428/24479 including variation in thickness
• CPC Class Codes: Y10T 428/24562 Interlaminar spaces
• CPC Class Codes: Y10T 428/3154 Of fluorinated addition polymer from unsaturated monomers
• CPC Class Codes: Y10T 428/31544 Addition polymer is perhalogenated

Abstract

The component has a movable section (2) over a substrate (1), in which spacers (3) preferably made of fluorocarbon are present on the top side of the substrate and prevent the movable section from adhering to the support.

Claims

1. A method for producing a component having a movable section, arranged at a distance over a substrate, of a micromechanical structure, having spacers on a top side, facing said movable section, of said substrate, between said movable section and said top side, the spacers being dimensioned such that sticking of the movable section to the substrate or to the spacers is prevented, having the steps of:

a) applying a sacrificial layer and a structure layer to a substrate;

b) structuring said structure layer such that said movable section is produced;

c) at least partially removing said sacrificial layer between said section and the substrate, except for residues which remain between that portion of the structure layer which is provided for the movable section and the substrate;

d) depositing portions of a spacer layer made of a material provided for the spacers between said section and the substrate, the deposition is carried out as a divergent deposition of fluorocarbon in a plasma reactor under action of an electric field directed toward the substrate;

e) etching back said spacer layer to the spacers which do not touch the structural layer; and

f) removing the residues of the sacrificial layer.

2. The method as claimed in claim 1, wherein, in step d, the spacer layer is deposited with an uneven layer thickness by utilizing a shading effect of that portion of the structure layer which is provided for the movable section.