Tantalum adhesion layer and reactive-ion-etch process for providing a thin film metallization area

• US 5,885,750 A
• Filed: 10/02/1997
• Issued: 03/23/1999
• Est. Priority Date: 10/02/1997
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Santini, Hugo Alberto Emilio, Hsiao, Richard, Robertson, Neil Leslie, Snyder, Clinton David
• Primary Examiner(s): Duda, Kathleen
• Application Number:
  US08/942,777
• Time in Patent Office: 537 Days
• Field of Search: 430/311, 430/313, 430/314, 430/318, 427/96, 216/12
• US Class Current: 430/314
• CPC Class Codes: G03F 7/085 Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives G03F7/075 takes precedence
• CPC Class Codes: H01L 21/707 of thin-film circuits or parts thereof
• CPC Class Codes: H01L 21/76885 By forming conductive members before deposition of protective insulating material, e.g. pillars, studs

Abstract

A method for providing a thin film metallization area on a substrate is disclosed comprising the steps of: depositing a Ta adhesion layer on the surface of the substrate seed layer, conducting a photo resist process on the Ta adhesion layer to define the thin film metallization area, including a remnant removal process to remove remnant photo resist process material in the thin film metallization area to the Ta adhesion layer, the Ta adhesion layer preventing the remnant removal from reaching the seed layer, conducting a Ta removal reactive-ion-etch process to remove the Ta adhesion layer in the thin film metallization area, so that the seed layer is exposed in the metallization area. A metal material may then be deposited in the metallization area.

Claims

1. A method for preparing at least one thin film metallization area for metallization on a substrate having a seed layer, comprising the steps of:

depositing a Ta adhesion layer on the surface of said seed layer of said substrate;

conducting a photo resist process on said Ta adhesion layer to define said thin film metallization area;

conducting a reactive-ion-etch process to remove remnant photo resist process material from said photo resist process step in said thin film metallization area, producing walls to said Ta adhesion layer to produce a well defined said thin film metallization area, said Ta adhesion layer preventing said reactive-ion-etch process from interacting with said seed layer; and

conducting a Ta removal reactive-ion-etch process to remove said Ta adhesion layer in said thin film metallization area, so that said seed layer is exposed in said metallization area.

2. The method for preparing at least one thin film metallization area of claim 1, wherein said step of conducting a reactive-ion-etch process to remove remnant photo resist process material comprises an O₂ reactive-ion-etch process, and said Ta adhesion layer prevents said O₂ reactive-ion-etch process from oxidizing said seed layer.

3. The method for preparing at least one thin film metallization area of claim 2, wherein said Ta removal reactive-ion-etch process comprises an F reactive-ion-etch process.

4. The method for preparing at least one thin film metallization area of claim 3, wherein said metallization area is a high aspect ratio trench.

5. The method for preparing at least one thin film metallization area of claim 4, wherein said Ta adhesion layer depositing step comprises RF sputtering or ion beam deposition of Ta.

6. The method for preparing at least one thin film metallization area of claim 5, additionally comprising the step of:

subsequent to said Ta removal reactive-ion-etch step, applying a hydrogen-containing plasma treatment to condition said seed layer for plating.

7. A method for providing at least one thin film metal structure on a substrate having a seed layer comprising the steps of:

depositing a Ta adhesion layer on the surface of said seed layer of said substrate;

conducting a photo resist process on said Ta adhesion layer to define a thin film metallization area;

conducting a reactive-ion-etch process to remove remnant photo resist process material from said photo resist process step in said thin film metallization area, producing walls to said Ta adhesion layer to produce a well defined said thin film metallization area, said Ta adhesion layer preventing said reactive-ion-etch process from interacting with said seed layer;

conducting a Ta removal reactive-ion-etch process to remove said Ta adhesion layer in said thin film metallization area, so that said seed layer is exposed in said metallization area; and

depositing a metal material in said metallization area.

8. The method for providing at least one thin film metal structure of claim 7, wherein said step of depositing a metal material in said metallization area comprises plating a metal in said metallization area.

9. The method for providing at least one thin film metal structure of claim 8, wherein said metal plated in said step of depositing a metal material in said metallization area comprises Cu, Ni--Fe or Au.

10. The method for providing at least one thin film metal structure of claim 9, wherein said metal plated in said step of depositing a metal material in said metallization area comprises Cu for a magnetic thin film transducer coil.

11. The method for providing at least one thin film metal structure of claim 9, wherein said metal plated in said step of depositing a metal material in said metallization area comprises Ni--Fe for a magnetic thin film transducer pole piece.

12. The method for providing at least one thin film metal structure of claim 7, wherein said step of conducting a reactive-ion-etch process to remove remnant photo resist process material comprises an O₂ reactive-ion-etch process, and said Ta adhesion layer prevents said O₂ reactive-ion-etch process from oxidizing said seed layer.

13. The method for providing at least one thin film metal structure of claim 12, wherein said Ta removal reactive-ion-etch process comprises an F reactive-ion-etch process.

14. The method for providing at least one thin film metal structure of claim 13, wherein said metal structure is a high aspect ratio trench.

15. The method for providing at least one thin film metal structure of claim 14, wherein said Ta adhesion layer depositing step comprises RF sputtering or ion beam deposition of Ta.

16. The method for providing at least one thin film metal structure of claim 15, additionally comprising the step of:

subsequent to said Ta removal reactive-ion-etch step, applying a hydrogen-containing plasma treatment to condition said seed layer for plating.