Micromachined integrated opto-flow gas/liquid sensor

• US 5,886,249 A
• Filed: 04/06/1998
• Issued: 03/23/1999
• Est. Priority Date: 04/30/1997
• Status: Expired due to Term

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Bonne, Ulrich, Cole, Barrett E., Higashi, Robert E.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US09/055,621
• Time in Patent Office: 351 Days
• Field of Search: 73/24.01, 73/24.02, 73/24.06, 73/28.03, 73/31.01, 73/31.02, 73/31.04, 73/61.47, 73/61.78, 250/339.01, 250/339.06, 250/339.12, 250/337.13, 250/341.1, 250/343
• US Class Current: 73/24.02
• CPC Class Codes: G01N 2021/0346 Capillary cells; Microcells
• CPC Class Codes: G01N 2021/1704 in gases
• CPC Class Codes: G01N 21/03 Cuvette constructions
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 21/37 using pneumatic detection opto-acoustic detection G01N21/1702

Abstract

A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.

Claims

1. A micromachined gas/liquid sensor comprising:

a first layer;

a light source formed on said first layer;

a second layer formed on said first layer;

an optical filter formed on said second layer;

a cavity formed on said second layer;

a pressure sensor formed proximate to said cavity; and

a porous filter formed on said cavity.

2. The sensor of claim 1, wherein

said optical filter is a narrow band pass filter for passing light from said light source, having a first wavelength into said cavity;

and

a gas or liquid to be sensed has an absorption wavelength at the first wavelength.

3. The sensor of claim 2, wherein:

the gas or liquid in an ambient environment about the sensor will infiltrate through said porous filter into said cavity;

light that may come from said light source and pass through said optical filter into said cavity has an intensity that increases and decreases;

the gas or liquid in said cavity and impinged by the light from said optical filter, will be caused to expand and contract by the light if the gas or liquid has an absorption wavelength at the first wavelength;

the gas or liquid in said cavity and impinged by the light from said optical filter, will not be caused to expand and contract by the light if the gas or liquid has an absorption wavelength not at the first wavelength; and

said pressure sensor can sense an expansion or contraction of the gas or liquid.

4. The sensor of claim 1, wherein said porous filter has a porosity that is sufficient for the gas or liquid to infiltrate through said porous filter into said cavity and to result in a pressure change in said cavity upon expansion or compression of the gas or liquid.

5. The sensor of claim 4, wherein said porous filter is a frit that is optimally compressed so as to adjust the porosity of said porous filter to be sufficient for the gas or liquid to infiltrate into said cavity and to result in a pressure change upon expansion or contraction of the gas or liquid.

6. The sensor of claim 4, wherein:

said pressure sensor can output a signal that indicates a magnitude of the expansion or contraction of the gas or liquid; and

the magnitude of the expansion or contraction indicates an amount of concentration of the gas or liquid having an absorption wavelength at the first wavelength, in said cavity and in turn in the ambient environment of the sensor.

7. The sensor of claim 6, further comprising a processor, wherein:

the signal from said pressure sensor, indicating an amount of concentration of the gas or liquid having an absorption wavelength at the first wavelength, goes to said processor; and

said processor processes the signal from said pressure sensor and provides inferred information.

8. The sensor of claim 7, wherein the first wavelength is at an absorption wavelength of CO.

9. The sensor of claim 7, wherein the first wavelength is at an absorption wavelength of CO₂.

10. The sensor of claim 9, wherein

said processor comprises a table of information.

11. The sensor of claim 7, further comprising an antireflective coating for the first wavelength formed on said second layer.

12. A micromachined gas/liquid sensor comprising:

a substrate;

an optical filter situated on a first surface of said substrate;

a first layer situated on said filter;

a heater formed in said first layer;

a second layer situated on the second surface of said substrate;

a cavity formed between a portion of said second layer and the second surface of said substrate;

a pressure sensor situated proximate to said cavity; and

a porous filter formed on said cavity.

13. The sensor of claim 12, wherein said pressure sensor comprises a piezoresistive element formed partially on said second layer.

14. The sensor of claim 13, wherein:

said optical filter is a narrow band pass filter for passing light from said heater, having a first wavelength into said cavity; and

a gas or liquid to be sensed has an absorption wavelength at the first wavelength.

15. The sensor of claim 14 wherein:

the gas or liquid in an ambient environment about the sensor will infiltrate through said porous filter into said cavity;

light that may come from said heater and pass through said optical filter into said cavity has an intensity that increases and decreases;

the gas or liquid in said cavity and impinged by the light from said heater, will be caused to expand and contract by the light if the gas or liquid has an absorption wavelength at the first wavelength;

the gas or liquid in said cavity and impinged by the light from said heater, will not be caused to expand and contract by the light if the gas or liquid has an absorption wavelength not at the first wavelength; and

said piezoresistive element can sense an expansion or contraction of the gas or liquid.

16. The sensor of claim 15, wherein said porous filter has a porosity that is sufficient for the gas or liquid to infiltrate through said porous filter into said cavity and to result in a pressure change in said cavity upon expansion or compression of the gas or liquid.

17. The sensor of claim 16, wherein:

said piezoresistive element can output a signal that indicates a magnitude of the expansion or contraction of the gas or liquid; and

the magnitude of the expansion or contraction indicates an amount of concentration of the gas or liquid having an absorption wavelength at the first wavelength, in said cavity and in turn in the ambient environment of the sensor.

18. The sensor of claim 17, wherein the first wavelength is at an absorption wavelength of CO₂.

19. The sensor of claim 18, further comprising an antireflective coating for the first wavelength situated between the second surface of said substrate and said cavity.