Ferroelectric dielectric for integrated circuit applications at microwave frequencies

• US 5,886,867 A
• Filed: 03/10/1997
• Issued: 03/23/1999
• Est. Priority Date: 03/21/1995
• Status: Expired due to Term

• Current Assignee: RPX Clearinghouse LLC (RPX Corporation)
• Original Assignee: Northern Telecom Limited (Nortel Networks Corporation)
• Inventors: Leung, Pak K., Chivukula, Vasanta
• Primary Examiner(s): Kincaid, Kristine
• Assistant Examiner(s): Dinkins, Anthony
• Application Number:
  US08/814,627
• Time in Patent Office: 743 Days
• Field of Search: 361/321.1-321.5, 361/311, 361/312, 257/295, 257/301-305, 257/296, 257/306, 257/310, 365/145, 365/149
• US Class Current: 361/311
• CPC Class Codes: H01L 28/55 with a dielectric comprising a perovskite structure material
• CPC Class Codes: H10B 53/00 Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors

Abstract

A ferroelectric dielectric for microwave applications is provided including a polycrystalline perovskite phase of lead zirconate titanate dielectric material. Small grain size material is provided by a low temperature process, by a rapid thermal annealing process. A layer of amorphous ferroelectric precursor material is deposited and annealed in an oxygen containing atmosphere in the presence of water vapour, preferably with the addition of a few percent of ozone, and at a temperature of less than 500° C. Advantageously, the method provides for formation of a ferroelectric material including lead zirconate titanate with a grain size less than 20 nm, with low film stress, high dielectric constant and low leakage current, which has excellent ferroelectric characteristics up to 10 GHz. This material has applications for capacitors, as filters, decoupling, coupling, and bypass elements and also for high frequency surface acoustic wave devices.

Claims

1. A ferroelectric dielectric for an integrated circuit operable at microwave frequencies comprising fine grained polycrystalline lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies above 1 GHz.

2. A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate is characterized by grain sizes below 20 nm.

3. A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate is characterized by grain sizes predominantly in the range 10 to 15 nm.

4. A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate is characterized by substantially uniform grain sizes below 20 nm and a dielectric constant greater than 300 at frequencies up to 10 GHz.

5. A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate comprises a dopant selected from the group consisting lanthanum, niobium, tantalum and chromium.

6. A ferroelectric capacitor for an integrated circuit operable at microwave frequencies comprising first and second electrodes and an intervening layer of a ferroelectric capacitor dielectric material, the capacitor dielectric material being selected from doped and undoped polycrystalline lead zirconate titanate, zirconium titanate, and lead titanate, the ferroelectric capacitor dielectric material being characterized by fine grain size and ferroelectric properties which are maintained at operating frequencies of the capacitor above 1 GHz.

7. A capacitor according to claim 6 wherein the dielectric material is polycrystalline lead zirconate titanate having grain sizes less than 20 nm.

8. A capacitor according to claim 6 wherein the dielectric material is polycrystalline lead zirconate titanate with grain sizes in the range 10 to 15 nm.

9. A high frequency surface acoustic wave device comprising a thin layer of fine grained polycrystalline ferroelectric lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies greater than 1 GHz and up to at least 10 GHz.

10. A ferroelectric capacitor for an integrated circuit operable at microwave frequencies and comprising first and second electrodes and an intervening layer of a ferroelectric capacitor dielectric material, the capacitor dielectric material being selected from doped and undoped polycrystalline lead zirconate titanate, zirconium titanate, and lead titanate, a dielectric constant of the ferroelectric capacitor dielectric material being greater than 300 for operating frequencies between 1 GHz and 10 GHz.

11. A ferroelectric dielectric for an integrated circuit operable at microwave frequencies comprising fine grained polycrystalline lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies above 1 GHz produced by a process comprising the steps:

depositing a layer of amorphous ferroelectric precursor material comprising a mixture of lead, zirconium and titanium compounds on an integrated circuit substrate,

and annealing the layer of amorphous ferroelectric precursor material at a temperature sufficient to cause a phase transformation to a fine grained ferroelectric polycrystalline perovskite phase, the annealing step comprising heating in an oxygen containing atmosphere in the presence of water vapour to provide a ferroelectric layer of lead zirconate titanate.