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Angular velocity sensor having cantilever beams

  • US 5,889,208 A
  • Filed: 06/05/1995
  • Issued: 03/30/1999
  • Est. Priority Date: 12/06/1991
  • Status: Expired due to Term
First Claim
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1. An angular velocity sensor comprising:

  • a substrate;

    a vibrating member of an elongate plate formed on part of said substrate and extending in a longitudinal direction along a first axis, said vibrating member having first and second longitudinal ends extending from a central portion in opposite directions along the first axis;

    a support beam whose longitudinal axis extends along a second axis perpendicular to the longitudinal direction of said vibrating member, said support beam being formed on part of said substrate to support said vibrating member at said central portion along the second axis between said first and second longitudinal ends of said vibrating member;

    driving means for driving both of said longitudinal ends of said vibrating member to vibrate in a first direction perpendicular to a surface of said substrate; and

    detecting means for detecting vibrations of said vibrating member in a second direction perpendicular to said first direction to detect an angular velocity of rotation of said substrate,wherein said first and second longitudinal ends of said vibrating member are positioned opposite to each other with respect to said support beam.

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