Angular velocity sensor having cantilever beams
First Claim
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1. An angular velocity sensor comprising:
- a substrate;
a vibrating member of an elongate plate formed on part of said substrate and extending in a longitudinal direction along a first axis, said vibrating member having first and second longitudinal ends extending from a central portion in opposite directions along the first axis;
a support beam whose longitudinal axis extends along a second axis perpendicular to the longitudinal direction of said vibrating member, said support beam being formed on part of said substrate to support said vibrating member at said central portion along the second axis between said first and second longitudinal ends of said vibrating member;
driving means for driving both of said longitudinal ends of said vibrating member to vibrate in a first direction perpendicular to a surface of said substrate; and
detecting means for detecting vibrations of said vibrating member in a second direction perpendicular to said first direction to detect an angular velocity of rotation of said substrate,wherein said first and second longitudinal ends of said vibrating member are positioned opposite to each other with respect to said support beam.
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Abstract
An angular velocity sensor comprises a substrate, a vibrating member of an elongate plate formed by processing a part of the substrate, a support beam formed by processing a part of the substrate to support a center of the vibrating member in a longitudinal direction thereof, a driving device for driving both longitudinal ends of the vibrating member to vibrate in a first direction, and a detecting device for detecting vibrations of the vibrating member in a second direction perpendicular to the first direction thereby to detect an angular velocity of rotation of the substrate.
65 Citations
16 Claims
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1. An angular velocity sensor comprising:
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a substrate; a vibrating member of an elongate plate formed on part of said substrate and extending in a longitudinal direction along a first axis, said vibrating member having first and second longitudinal ends extending from a central portion in opposite directions along the first axis; a support beam whose longitudinal axis extends along a second axis perpendicular to the longitudinal direction of said vibrating member, said support beam being formed on part of said substrate to support said vibrating member at said central portion along the second axis between said first and second longitudinal ends of said vibrating member; driving means for driving both of said longitudinal ends of said vibrating member to vibrate in a first direction perpendicular to a surface of said substrate; and detecting means for detecting vibrations of said vibrating member in a second direction perpendicular to said first direction to detect an angular velocity of rotation of said substrate, wherein said first and second longitudinal ends of said vibrating member are positioned opposite to each other with respect to said support beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An angular velocity sensor comprising:
a substrate; a first cantilever beam formed on part of said substrate and having a first fixed end and a first cantilevered vibrating end; a second cantilever beam formed on part of said substrate and having a second fixed end and a second cantilevered vibrating end, said first and second cantilever beams formed to be symmetrical with each other and having a central portion at said fixed ends, wherein a longitudinal direction of said first cantilever beam is oriented along a first axis and in the same direction as a longitudinal direction of said second cantilever beam, wherein the first and second cantilevered vibrating ends are on opposite ends from each other in the longitudinal directions of said first and second cantilever beams; a support beam whose longitudinal axis extends along a second axis perpendicular to the longitudinal directions of said first and second cantilever beams, said support beam supporting the first and second fixed ends at said central portion along the second axis between the first and second fixed ends; driving means for driving said vibrating ends of said first and second cantilever beams to vibrate in a first direction perpendicular to a surface of said substrate; and detecting means for detecting vibrations of said first and second cantilever beams in a second direction perpendicular to the first direction to detect an angular velocity of rotation of said substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
Specification