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Method of and apparatus for independently controlling electric parameters of an impedance matching network

  • US 5,889,252 A
  • Filed: 12/19/1996
  • Issued: 03/30/1999
  • Est. Priority Date: 12/19/1996
  • Status: Expired due to Term
First Claim
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1. Apparatus for matching a load to a power source, comprising:

  • a match network coupled between a power source and a load, the match network having at least two controllable variable electrical characteristics;

    a sensor for sensing at least two electric parameters determined by impedances of the load and match network,a drive controller responsive to the sensed parameters of the load for independently controlling a first one of the electrical characteristics of the match network as a function of only one of the parameters of the load and a second one of the electrical characteristics of the match network as a function of only another one of the parameters of the load until the power source and the load are matched.

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