Corrosion resistant apparatus
First Claim
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1. A corrosion resistant apparatus for processing a substrate in a corrosive process gas, the apparatus comprising:
- (a) a process chamber having a process gas inlet for introducing corrosive process gas in the process chamber; and
(b) at least one metal processing component in the process chamber, at least a portion of the processing component exposed to the corrosive process gas, and having a corrosion resistant coating comprising rhodium.
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Abstract
An apparatus used for processing substrates in a corrosive process gas is rendered substantially resistant to corrosion, by coating processing components exposed to the corrosive process gas with a coating comprising rhodium. The rhodium coating can be deposited by electroplating, and preferably has a thickness of at least about 10 microinches. A coating of nickel can be also applied between the rhodium coating and the processing component.
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Citations
28 Claims
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1. A corrosion resistant apparatus for processing a substrate in a corrosive process gas, the apparatus comprising:
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(a) a process chamber having a process gas inlet for introducing corrosive process gas in the process chamber; and (b) at least one metal processing component in the process chamber, at least a portion of the processing component exposed to the corrosive process gas, and having a corrosion resistant coating comprising rhodium. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A corrosion resistant apparatus for processing a substrate in a corrosive process gas, the apparatus comprising:
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(a) a process chamber having a surrounding wall with at least one process gas inlet in the wall, the process gas inlet provided for introducing corrosive process gas in the process chamber; (b) at least a portion of the surrounding wall comprising metal and having a corrosion resistant coating comprising rhodium. - View Dependent Claims (20, 21, 22, 23)
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24. A corrosion resistant apparatus for processing a substrate in a corrosive process gas, the apparatus comprising:
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(a) a process chamber capable of containing corrosive process gas; and (b) means for processing the substrate in the process chamber, at least a portion of the means comprising a metal structure exposed to the corrosive process gas and the metal structure having a corrosion resistant coating comprising rhodium. - View Dependent Claims (25, 26, 27, 28)
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Specification