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Composite sensor

  • US 5,894,091 A
  • Filed: 05/13/1997
  • Issued: 04/13/1999
  • Est. Priority Date: 05/30/1996
  • Status: Expired due to Fees
First Claim
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1. A solid state composite sensor comprising:

  • a stationary substrate having spaced support portions for mounting a movable electrode member,a respective flexible arm attached to each support portion,a movable electrode member formed generally in an X-shaped configuration having four legs, each leg attached to a respective flexible arm, the legs extending and attached to a central portion, a plurality of elongated teeth lying in a common plane which includes mutually perpendicular X and Y directions and extending outwardly from each leg, the teeth of each leg in each of the X and Y directions being in parallel relationship with one another, andstationary electrodes having a plurality of elongated teeth lying in the common plane and interdigitated with the elongated teeth of the movable electrode in parallel relationship with adjacent teeth of the movable electrode to form therewith parallel plate-type variable capacitors responsive to movement of the movable electrode in the X and Y directional components of movement parallel to the common plane.

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