Composite sensor
First Claim
1. A solid state composite sensor comprising:
- a stationary substrate having spaced support portions for mounting a movable electrode member,a respective flexible arm attached to each support portion,a movable electrode member formed generally in an X-shaped configuration having four legs, each leg attached to a respective flexible arm, the legs extending and attached to a central portion, a plurality of elongated teeth lying in a common plane which includes mutually perpendicular X and Y directions and extending outwardly from each leg, the teeth of each leg in each of the X and Y directions being in parallel relationship with one another, andstationary electrodes having a plurality of elongated teeth lying in the common plane and interdigitated with the elongated teeth of the movable electrode in parallel relationship with adjacent teeth of the movable electrode to form therewith parallel plate-type variable capacitors responsive to movement of the movable electrode in the X and Y directional components of movement parallel to the common plane.
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Accused Products
Abstract
Fixed electrodes (A through F) are formed by means of a structural layer that has been provided on fixed bodies (71 through 74) of a silicon micro-machined substrate and a movable electrode (G) is formed by a movable body attached to fixed bodies (51 through 54) by flexible members (61 through 64). Variable capacitors of the parallel plate-type are formed by the movable electrode (G) and the fixed electrodes (A through F). When the movable electrode (G) has been vibrated, the Coriolis force incident to rotation or the force incident to acceleration are added to the movable electrode (G), with a result that the charge of the various variable capacitors change. By detecting the change in charge, both angular velocity and acceleration can be obtained. By providing another variable capacitor formed by a mass portion (H) by a movable body and the substrate, acceleration components in the directions of three axes can be detected.
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Citations
6 Claims
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1. A solid state composite sensor comprising:
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a stationary substrate having spaced support portions for mounting a movable electrode member, a respective flexible arm attached to each support portion, a movable electrode member formed generally in an X-shaped configuration having four legs, each leg attached to a respective flexible arm, the legs extending and attached to a central portion, a plurality of elongated teeth lying in a common plane which includes mutually perpendicular X and Y directions and extending outwardly from each leg, the teeth of each leg in each of the X and Y directions being in parallel relationship with one another, and stationary electrodes having a plurality of elongated teeth lying in the common plane and interdigitated with the elongated teeth of the movable electrode in parallel relationship with adjacent teeth of the movable electrode to form therewith parallel plate-type variable capacitors responsive to movement of the movable electrode in the X and Y directional components of movement parallel to the common plane. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification