Scribe mark reader

• US 5,894,348 A
• Filed: 11/26/1997
• Issued: 04/13/1999
• Est. Priority Date: 06/17/1994
• Status: Expired due to Fees

• Current Assignee: Kensington Laboratories, LLC
• Original Assignee: Kensington Laboratories, Inc. (MKS Instruments Incorporated)
• Inventors: Filipski, Paul S., Bacchi, Paul
• Primary Examiner(s): Pham, Hoa Q.
• Application Number:
  US08/978,546
• Time in Patent Office: 503 Days
• Field of Search: 356/370, 356/364-369, 356/445, 356/446, 356/401, 356/237, 235/462, 235/472, 235/455, 235/470
• US Class Current: 356/370
• CPC Class Codes: G06K 7/10722 Photodetector array or CCD scanning
• CPC Class Codes: G06K 7/10732 Light sources
• CPC Class Codes: G06K 7/10742 including a diffuser for diffusing the light from the light source to create substantially uniform illumination of the target record carrier
• CPC Class Codes: Y10S 235/901 Bar code reader specialized to read code on a highly reflective surface

Abstract

A scribe mark reader (10) uses a source of circularly polarized light and a holographic beam-shaping optical element (40) to uniformly illuminate an area of a substrate (20) that includes a scribe mark (18). Light incident on the substrate at a scribe mark is predominantly scattered, whereas light incident on the substrate at a processed area (30) of the wafer surface between the pits (28) of the scribe mark is predominantly specularly reflected. The phase-reversed, specularly reflected light from the processed area is blocked by a circular analyzer that passes light scattered from the scribe mark. Light passing the polarizer can then be used to form an image of the scribe mark. The intensity of the images formed are sufficiently consistent that the automatic gain control of the CCD camera can be used and the images formed can be readily interpreted by optical character recognition software.

Claims

1. In a specimen fabrication process during which a three dimensional scribe mark that includes multiple depressions formed in a region of a light reflective major surface of a specimen is read to identify it, the multiple depressions including perimeter depressions that define boundaries of the scribe mark and the multiple depressions initially having nominal physical characteristics that change as the specimen undergoes mechanical surface treatment and multiple applications of layers of processing materials during the specimen fabrication process, a method of reliably automatically interpreting a three dimensional scribe mark, the physical characteristics of which have been changed from the nominal physical characteristics by subsequent processing, comprising:

directing light propagating from a light source to a beam-shaping diffuser to form a light beam having a substantially uniform spatial intensity distribution;

positioning the scribe mark in stationary relationship to the light beam so that the light beam encompasses the boundaries of the scribe mark to accomplish simultaneous illumination of the multiple depressions of the scribe mark in its entirety, the illumination producing a first set of light rays diffracted by the multiple depressions and a second set of light rays specularly reflected by areas of the major surface around the multiple depressions, the first and second sets of light rays forming components of a static light pattern representative of the scribe mark and having different optical properties that correspond to a light pattern intensity contrast, and the substantially uniform spatial intensity distribution of the light beam not materially contributing to and thereby substantially maintaining the light pattern intensity contrast corresponding to the different optical properties of the first and second sets of light rays in the presence of specimen processing-caused differences between the nominal and actual physical characteristics of the multiple depressions;

collecting one of the first and second sets of light rays to form a machine-readable light pattern representative of the scribe mark; and

detecting the light pattern and interpreting it to identify the specimen.

2. The method of claim 1 in which the beam-shaping diffuser comprises multiple micro-lenses.

3. The method of claim 1, further comprising passing through a field stop the light propagating from a light source to block light not useful for forming the light pattern.

4. The method of claim 3 in which the beam-shaping diffuser includes a holographic optical element.

5. The method of claim 1, further comprising directing the first and second sets of light rays to strike a polarizer to preferentially attenuate the second set of light rays.

6. The method of claim 5 in which the polarizer is of a circularly polarizing type, and further comprising passing the light beam through the polarizer before the light beam illuminates the region of the major surface of the specimen.

7. The method of claim 5 in which the polarizer includes an elliptical polarizer, and further comprising passing through the elliptical polarizer the light propagating from the light source, thereby preferentially attenuating the second set of light rays that are not propagating from the scribe mark.

8. The method of claim 5 in which the polarizer includes multiple regions, a first region polarizing unpolarized light propagating from the light source and a second region filtering the second set of light rays propagating from the specimen.

9. The method of claim 5 in which the polarizer preferentially attenuates light propagating from the specimen around the scribe mark by using the different polarization characteristics of the light propagating from the scribe mark and the light propagating from the specimen around the scribe mark.

10. The method of claim 9 in which the polarizer is of an elliptically light polarizing type and is positioned along the optical path to polarize light propagating from the light source to the specimen and to filter light propagating from the specimen to a detector, the second set of light rays specularly reflected from the areas of the specimen around the scribe mark being reversed in handedness to be attenuated by the polarizer, the polarizer eliminating polarization axes misalignments that reduce the intensity of light entering the detector, thereby allowing the detector to form the machine-readable light pattern representing the scribe mark.

11. The method of claim 1 in which the light source comprises multiple light emitters.

12. The method of claim 1 in which the beam-shaping diffuser reflects light propagating from the light emitter toward the specimen.

13. The method of claim 1 in which the beam-shaping diffuser refracts light propagating from the light emitter toward the specimen.

14. The method of claim 1 in which light propagating from the light source has an angle of reflection from the specimen and in which detecting the light pattern is accomplished by a detector oriented at an angle other than the angle of reflection to reduce the number of specularly reflected light rays in the second set of light rays entering the detector.

15. The method of claim 1 in which the specimen is a semiconductor wafer.