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Micromechanical resonator of a vibration gyrometer

  • US 5,895,850 A
  • Filed: 09/24/1996
  • Issued: 04/20/1999
  • Est. Priority Date: 04/23/1994
  • Status: Expired due to Term
First Claim
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1. A micromechanical resonator of a vibration gyrometer for detecting a rate of rotation utilizing a Coriolis force, comprising:

  • a substrate;

    first and second resonating masses vibrating in phase opposition in a preselected direction in a preselected plane;

    first and second suspension springs coupled, on one end, to the substrate and, on the other end, to the first and second resonating masses, respectively, the first and second suspension springs being softer in the direction of vibration of the first and second resonating masses than in any other direction;

    detecting elements measuring the Coriolis force which is induced on the first and second resonating masses in a further direction, the further direction being perpendicular to the direction of vibration; and

    a coupling region mechanically coupling the first resonating mass to the second resonating mass, the coupling region including a coupling mass and at least one resonating spring.

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