Micromechanical resonator of a vibration gyrometer
First Claim
1. A micromechanical resonator of a vibration gyrometer for detecting a rate of rotation utilizing a Coriolis force, comprising:
- a substrate;
first and second resonating masses vibrating in phase opposition in a preselected direction in a preselected plane;
first and second suspension springs coupled, on one end, to the substrate and, on the other end, to the first and second resonating masses, respectively, the first and second suspension springs being softer in the direction of vibration of the first and second resonating masses than in any other direction;
detecting elements measuring the Coriolis force which is induced on the first and second resonating masses in a further direction, the further direction being perpendicular to the direction of vibration; and
a coupling region mechanically coupling the first resonating mass to the second resonating mass, the coupling region including a coupling mass and at least one resonating spring.
1 Assignment
0 Petitions
Accused Products
Abstract
For a micromechanical resonator of a vibration gyrometer, the two resonating masses, which vibrate in phase opposition and are joined across a coupling region, are suspended by at least one suspension spring. The suspension springs are thereby designed to be soft in the direction of vibration and substantially harder in all other degrees of freedom. This allows the moment of rotation of the rate of rotation (absolute angular velocity) to be transferred to the resonating masses. Interference signals when measuring Coriolis forces are suppressed by means of subtraction. The resonator is patterned out of a semiconductor material and can be excited to vibrate in the electrostatic or electromagnetic field by means of suitable current supply leads.
-
Citations
8 Claims
-
1. A micromechanical resonator of a vibration gyrometer for detecting a rate of rotation utilizing a Coriolis force, comprising:
-
a substrate; first and second resonating masses vibrating in phase opposition in a preselected direction in a preselected plane; first and second suspension springs coupled, on one end, to the substrate and, on the other end, to the first and second resonating masses, respectively, the first and second suspension springs being softer in the direction of vibration of the first and second resonating masses than in any other direction; detecting elements measuring the Coriolis force which is induced on the first and second resonating masses in a further direction, the further direction being perpendicular to the direction of vibration; and a coupling region mechanically coupling the first resonating mass to the second resonating mass, the coupling region including a coupling mass and at least one resonating spring. - View Dependent Claims (2, 3, 4, 5)
-
-
6. A micromechanical resonator of a vibration gyrometer for detecting a rate of rotation utilizing Coriolis forces, comprising:
-
a substrate; first and second resonating masses vibrating in phase opposition in a preselected direction in a preselected plane; first and second suspension springs coupled, on one end, to the substrate and, on the other end, to the first and second resonating masses, respectively, the first and second suspension springs being softer in the direction of vibration of the first and second resonating masses than in any other direction; a coupling region mechanically coupling the first resonating mass to the second resonating mass, the coupling region including a coupling mass and at least one resonating spring; and a third suspension spring joined to the coupling region. - View Dependent Claims (7, 8)
-
Specification