Semiconductor yaw rate sensor with a vibrating movable section with vertical and horizontal displacement detection
First Claim
1. A semiconductor yaw rate sensor comprising:
- a semiconductor substrate;
a bridge structure movable section movably supported on said semiconductor substrate such that a specified interval is interposed between said movable section and said semiconductor substrate;
a fixed electrode for excitation use disposed on said semiconductor substrate in order to forcibly vibrate said movable section in a horizontal direction utilizing electrostatic force;
a vertical displacement detection means for detecting a vertical displacement of said movable section;
a horizontal displacement detection means for detecting a horizontal displacement of said movable section;
a signal processing means obtaining a yaw rate detection output utilizing at least a detection output of said vertical displacement detection means; and
a correction means for keeping, based on an output of said horizontal displacement detection means, said movable section forcibly vibrated in said horizontal direction at a resonance frequency.
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Abstract
A yaw rate sensor, which can be structured easily and at low cost and which can also detect exerted acceleration with high accuracy, is obtained. A movable electrode section is provided spaced at a specified gap with respect to a semiconductor substrate; fixed electrodes for excitation use forcibly vibrate the movable electrode section using an electrostatic force; a vertical displacement detection portion detects a vertical displacement of the movable electrode section; a horizontal displacement detection portion detects a horizontal displacement of the movable electrode section; and using at least the detection output of the vertical displacement detection portion, a signal processing circuit obtains a yaw rate detection output. Then, an aging compensation circuit detects an amplitude condition of the movable electrode section using the output of the horizontal displacement detection means; and the forced vibration of the movable electrode section is maintained a vibration at a resonance frequency.
42 Citations
17 Claims
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1. A semiconductor yaw rate sensor comprising:
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a semiconductor substrate; a bridge structure movable section movably supported on said semiconductor substrate such that a specified interval is interposed between said movable section and said semiconductor substrate; a fixed electrode for excitation use disposed on said semiconductor substrate in order to forcibly vibrate said movable section in a horizontal direction utilizing electrostatic force; a vertical displacement detection means for detecting a vertical displacement of said movable section; a horizontal displacement detection means for detecting a horizontal displacement of said movable section; a signal processing means obtaining a yaw rate detection output utilizing at least a detection output of said vertical displacement detection means; and a correction means for keeping, based on an output of said horizontal displacement detection means, said movable section forcibly vibrated in said horizontal direction at a resonance frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification