×

Angular velocity sensor

  • US 5,895,852 A
  • Filed: 01/21/1997
  • Issued: 04/20/1999
  • Est. Priority Date: 01/22/1996
  • Status: Expired due to Term
First Claim
Patent Images

1. An angular velocity sensor, comprising a substrate, an oscillator structured and arranged with respect to a surface of said substrate so as to displace in three-axes directions composed of an X-axis direction, a Y-axis direction and a Z-axis direction with respect to said substrate, means for oscillating said oscillator in the Z-axis direction and displacement sensing means for sensing the amount of displacement of said oscillator when said oscillator is displaced in the Y-axis direction or the X-axis direction by an angular velocity about the X-axis or the Y-axis.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×