Angular velocity sensor
First Claim
1. An angular velocity sensor, comprising a substrate, an oscillator structured and arranged with respect to a surface of said substrate so as to displace in three-axes directions composed of an X-axis direction, a Y-axis direction and a Z-axis direction with respect to said substrate, means for oscillating said oscillator in the Z-axis direction and displacement sensing means for sensing the amount of displacement of said oscillator when said oscillator is displaced in the Y-axis direction or the X-axis direction by an angular velocity about the X-axis or the Y-axis.
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Abstract
In an angular velocity sensor for sensing angular velocities about two axes or an X-axis and a Y-axis which are perpendicular to each other, a frame-shaped oscillator 26 is disposed to the respective support portions 24 fixed on a substrate 22 through support beams 25 and a columnar electrode 33 is disposed in the oscillator 26 by being fixed to the substrate 22 . X-axis displacement sensing units 31, 31 are formed on the right and left sides of the oscillator 26 and Y-axis displacement sensing units 32, 32 are formed to the forward and rearward sides thereof. When an oscillation drive signal is imposed between the oscillator 26 and the columnar electrode 33, an electrostatic attracting force is generated therebetween and the oscillator 26 is oscillated in a Z-axis direction. When an angular velocity ΩY is imposed about the Y-axis at this time, the oscillator 26 is displaced to the X-axis by a Coriolis force and the displacement can be sensed by the X-axis displacement sensing units 31, whereas when an angular velocity ΩX is imposed about the X-axis, the oscillator 26 is displaced to the Y-axis by a Coriolis force and the displacement can be sensed by the Y-axis displacement sensing units 32, so that the angular velocities about the two axes or the X-axis and the Y-axis can be sensed, respectively.
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Citations
23 Claims
- 1. An angular velocity sensor, comprising a substrate, an oscillator structured and arranged with respect to a surface of said substrate so as to displace in three-axes directions composed of an X-axis direction, a Y-axis direction and a Z-axis direction with respect to said substrate, means for oscillating said oscillator in the Z-axis direction and displacement sensing means for sensing the amount of displacement of said oscillator when said oscillator is displaced in the Y-axis direction or the X-axis direction by an angular velocity about the X-axis or the Y-axis.
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21. An angular velocity sensor, comprising a substrate, an oscillator structured and arranged with respect to a surface of said substrate so as to displace in three-axes directions composed of an X-axis direction, a Y-axis direction and a Z-axis direction with respect to said substrate, means for oscillating said oscillator in the Z-axis direction and displacement sensing means for sensing the amount of displacement of said oscillator when said oscillator is displaced in the Y-axis direction or the X-axis direction by an angular velocity about the X-axis or the Y-axis;
- said oscillator being formed in a frame-shape and a columnar electrode being located in said oscillator so as to be fixed to said substrate, said columnar electrode having a height lower than the height of said oscillator.
- View Dependent Claims (22)
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23. An angular velocity sensor, comprising a substrate, an oscillator structured and arranged with respect to a surface of said substrate so as to displace in three-axes directions composed of an X-axis direction, a Y-axis direction and a Z-axis direction with respect to said substrate, a generator for oscillating said oscillator in the Z-axis direction and a displacement sensor for sensing the amount of displacement of said oscillator when said oscillator is displaced in the Y-axis direction or the X-axis direction by an angular velocity about the X-axis or the Y-axis.
Specification