Semiconductor device and method for its preparation

• US 5,895,933 A
• Filed: 06/03/1997
• Issued: 04/20/1999
• Est. Priority Date: 06/25/1993
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Ohtani, Hisashi, Takayama, Toru, Takemura, Yasuhiko, Zhang, Hongyong, Miyanaga, Akiharu, Takeyama, Junichi
• Primary Examiner(s): Monin, Jr., Donald L.
• Application Number:
  US08/868,050
• Time in Patent Office: 686 Days
• Field of Search: 257/49, 257/64, 257/66, 257/75
• US Class Current: 257/49
• CPC Class Codes: H01L 21/02422 Non-crystalline insulating materials, e.g. glass, polymers
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02609 Crystal orientation
• CPC Class Codes: H01L 21/02672 using crystallisation enhancing elements
• CPC Class Codes: H01L 21/02686 Pulsed laser beam
• CPC Class Codes: H01L 29/78675 with normal-type structure, e.g. with top gate

Abstract

A semiconductor device is disclosed. The semiconductor device has a crystalline silicon film as an active layer region. The crystalline silicon film has needle-like or columnar crystals oriented parallel to the substrate and having a crystal growth direction of (111) axis. A method for preparing the semiconductor device comprises steps of adding a catalytic element to an amorphous silicon film; and heating the amorphous silicon film containing the catalytic element at a low temperature to crystallize the silicon film.

Claims

1. A semiconductor device comprising:

a crystalline semiconductor film formed on an insulating surface and annealed in a hydrogen atmosphere, said semiconductor film having a thickness of 300 to 800 Å

,

wherein one or more elements selected from the group consisting of Group VIII, IIIb. IVb and Vb elements are used in the semiconductor film for the crystallization of the semiconductor film to have an X-ray diffraction pattern of which the orientation ratio at the (111) plane is 0.67 or higher.

2. The semiconductor device of claim 1 wherein the crystallization of said semiconductor film is promoted by a catalyst element selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, Pb, As, and Sb as said one or more elements selected from the group consisting of Group VIII, Ib, IVb and Vb elements.

3. The semiconductor device of claim 2 wherein a concentration of said catalyst element within said semiconductor film is not larger than 1×

10¹⁹ atoms/cm³.

4. The semiconductor device of claim 2 wherein said semiconductor film comprises silicon.

5. A semiconductor device comprising:

a crystalline semiconductor film formed on an insulating surface and annealed in a hydrogen atmosphere, said semiconductor film having a thickness of 300 to 800 Å

,

wherein one or more elements selected from the group consisting of Group VIII, IIIb, IVb and Vb elements are used in the semiconductor film for the crystallization of the semiconductor film to have an X-ray diffraction pattern of which the orientation ratio at the (111) plane is approximately 1.0.

6. The semiconductor device of claim 5 wherein the crystallization of said semiconductor film is promoted by a catalyst element selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, Pb, As and Sb as said one or more elements selected from the group consisting of Group VIII, IIIb, IVb and Vb elements.

7. The semiconductor device of claim 6 wherein a concentration of said catalyst element within said semiconductor film is not larger than 1×

10¹⁹ atoms/cm³.

8. The semiconductor device of claim 6 wherein said semiconductor film comprises silicon.

9. The semiconductor device of claim 6 wherein said semiconductor film is intrinsic.

10. A semiconductor device comprising:

a channel region comprising a crystalline semiconductor film formed on an insulating surface and annealed in a hydrogen atmosphere, said semiconductor film having a thickness of 300 to 800 Å

;

source and drain regions between which said channel region is disposed; and

a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween,

wherein one or more elements selected from the group consisting of Group VIII, IlIb, IVb, Vb elements are used in the semiconductor film for the crystallization of the semiconductor film to have an X-ray diffraction pattern of which the orientation ratio at the (111) plane is not lower than 0.33.

11. The semiconductor device of claim 10, wherein the crystallization of said semiconductor film is promoted by a catalyst element selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, Pb, As and Sb as said one or more elements selected from the group consisting of Group VIII, IIIb, IVb and Vb elements.

12. The semiconductor device of claim 11 wherein a concentration of said catalyst element within said semiconductor film is not larger than 1×

10¹⁹ atoms/cm³.

13. The semiconductor device of claim 10 wherein said semiconductor film comprises silicon.

14. The semiconductor device of claim 10 wherein the orientation strength at the (111) plane is not lower than 0.67.

15. A semiconductor device comprising:

a crystalline semiconductor film formed on an insulating surface and annealed in a hydrogen atmosphere, said semiconductor film having a thickness of 300 to 800 Å

; and

one or more elements selected from the group consisting of Group VIII, IIIb, IVb and Vb elements used in the semiconductor film for the crystallization of the semiconductor film.

16. A semiconductor device comprising:

a channel region comprising a crystalline semiconductor film formed on an insulating surface and annealed in a hydrogen atmosphere, said semiconductor film having a thickness of 300 to 800 Å

;

source and drain regions between which said channel region is disposed; and

a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween,

wherein one or more elements selected from the group consisting of Group VIII, IIIb, IVb and Vb elements are used in the semiconductor film for the crystallization of the semiconductor film to have an X-ray diffraction pattern of which the orientation ratio at the (111) plane is 0.67 or higher.

17. The semiconductor device of claim 16 wherein the crystallization of said semiconductor film is promoted by a catalyst element selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, Pb, As and Sb as said one or more elements selected from the group consisting of Group VIII, IIIb, IVb and Vb elements.

18. A semiconductor device comprising:

a channel region comprising a crystalline semiconductor film formed on an insulating surface and annealed in a hydrogen atmosphere, said semiconductor film having a thickness of 300 to 800 Å

;

source and drain regions between which said channel region is disposed; and

a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween,

wherein a catalyst element selected from the group consisting of Ni, Pd, Pt, Cu, Ag, Au, In, Sn, Pb, As and Sb is used in the semiconductor film for the crystallization of the semiconductor film.

19. The semiconductor device of claim 18 wherein the orientation ratio of an X-ray diffraction pattern of the crystalline semiconductor film at the (111) plane is approximately 1.0.