Suspension fabricated from silicon

• US 5,896,246 A
• Filed: 04/21/1997
• Issued: 04/20/1999
• Est. Priority Date: 06/11/1996
• Status: Expired due to Fees

• Current Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Original Assignee: Seagate Technology plc (Seagate Technology Holdings Plc)
• Inventors: Hardie, Cal E., Schultz, Kevin Jon, Ryan, Patrick J., Budde, Richard August, Glumac, Daniel E.
• Primary Examiner(s): EVANS, JEFFERSON A
• Application Number:
  US08/837,604
• Time in Patent Office: 729 Days
• Field of Search: 360/104, 360/103, 360/126
• US Class Current: 360/244.4
• CPC Class Codes: G11B 5/484 Integrated arm assemblies, e.g. formed by material deposition or by etching from single piece of metal or by lamination of materials forming a single arm/suspension/head unit
• CPC Class Codes: Y10T 29/49021 Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
• CPC Class Codes: Y10T 29/4903 with bonding

Abstract

An apparatus comprising a magnetic head suspension assembly (10) comprised of a rectangular portion (12), load beam (14) and flexure (16) fabricated from a silicon structure using the etching techniques of the integrated circuit fabrication industry. The magnetic head suspension assembly (10) has electrical leads (23) to a slider, a pre-amp circuit (25) and a microactuator (27) fabricated directly thereon. A system of providing a loading force passing to slider (50) comprises either a tapered base plate (40) adapted to be held by a horizontally oriented actuator arm or an actuator arm (60) having at least one angled receiving surface (62,64) for attachment to said suspension assembly. The method of forming a magnetic head suspension assembly (10) from an etched silicon structure comprising a cutting step comprising cutting the silicon structure into the silhouette shape of a magnetic head suspension assembly, having a rectangular portion (12), a load beam (14) and a flexure (16), the flexure is cut in a shape such that finger members (18), slider bond tongue (19) and dimple tongue (20) appear thereon. Subsequent to the cutting step, photo-etching regions of the silicon structure reduces thickness of the silicon structure in certain regions. The photo-etching leaves a remaining non-etched small plateau area which is adapted to act as a point or dimple for an attached slider to gimbal about.

Claims

1. A monolithic magnetic head suspension assembly fabricated from an etched silicon structure comprising an actuator arm including a base plate, a load beam, and a flexure, said flexure supporting a slider and said head to fly over a surface of said disc, said actuator arm being tapered along an axis extending toward said magnetic head, wherein said suspension assembly is fabricated with at least one electrical lead etched thereon;

and

said electrical leads are adapted to be in electrical communication with a slider supported on said flexure.

2. The suspension assembly of claim 1 wherein,

said suspension assembly is fabricated with a pre-amp circuit etched thereon.

3. The suspension assembly of claim 1 wherein,

said suspension assembly is fabricated with a microactuator etched thereon.

4. The suspension assembly of claim 3 wherein,

said microactuator is magnetically driven.

5. The suspension assembly of claim 3 wherein,

said microactuator is electro-statically driven.

6. The suspension assembly of claim 1 wherein,

said suspension assembly is provided with a non-etched away plateau, said plateau functioning as a point for a slider to gimbal about.

7. The suspension assembly of claim 6 wherein,

a) said flexure is comprised of mutually parallel elements comprising two finger members comprising one slider bond tongue and one dimple tongue.

8. The suspension assembly of claim 1 wherein,

said suspension assembly has a first natural bending resonance frequency of approximately 5900 Hertz.

9. The suspension assembly of claim 1 wherein,

said suspension assembly has a first natural torsional resonance frequency of approximately 7900 Hertz.

10. A monolithic magnetic head suspension assembly fabricated from an etched silicon structure comprising an actuator arm including a base plate, a load beam and a flexure, said flexure supporting a slider and said head to fly over a surface of said disc, and means for imparting a vertical load to said load beam along an axis extending toward said magnetic head, wherein said suspension assembly is fabricated with at least one electrical lead etched thereon, and said electrical leads are adapted to be in electrical communication with said head on a slider.

11. A suspension assembly as in claim 10 further including a means for imparting a vertical load to said load beam comprising a base plate connected to said load beam and an actuator arm and tapered along an axis extending toward said magnetic head.

12. A suspension assembly as claimed in claim 11 wherein said actuator arm is tapered to force said slider toward said disc.