Method of manufacturing thermoelectric power generation unit

• US 5,897,330 A
• Filed: 11/14/1996
• Issued: 04/27/1999
• Est. Priority Date: 05/16/1994
• Status: Expired due to Fees

• Current Assignee: Citizen Watch Co Limited (Citizen Electronics Company Limited)
• Original Assignee: Citizen Watch Co Limited (Citizen Electronics Company Limited)
• Inventors: Watanabe, Shigeru, Nagata, Yoichi
• Primary Examiner(s): GRAYBILL, DAVID E
• Application Number:
  US08/737,333
• Time in Patent Office: 894 Days
• Field of Search: 436/55, 436/68, 436/109, 436/126, 436/129, 436/458, 436/460, 436/973, 436/FOR 371, 436/FOR 379, 436/FOR 386, 436/FOR 485
• US Class Current: 438/55
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10N 10/01 Manufacture or treatment
• CPC Class Codes: H10N 10/17 characterised by the structure or configuration of the cell or thermocouple forming the device

Abstract

A thermoelectric power generation unit comprises a plurality of dissimilar thermoelectric structures (20, 21) laid in alternating layers. Adjacent thermoelectric bodies incorporated in each of the thermoelectric structures are connected together in series. Respective thermoelectric structures are fabricated by the steps of forming a stripe-shaped pattern on a substrate (10) using a photosensitive resin (12), forming a polymer film on the underside of the substrate, forming first thermoelectric bodies (15) and second thermoelectric bodies (17) by plating on an electrode film (11) inside openings of the photosensitive resin, coating the first thermoelectric bodies (15) and second thermoelectric bodies (17) with a thermosetting resin (16), dissolving the substrate (10) and electrode film (11) thereafter.

Claims

1. A method of manufacturing a thermoelectric power generation unit, the methods comprising:

a first thermoelectric structure forming process comprising steps of;

forming an electrode film made of a metallic material on a substrate,

providing a pattern in the shape of stripes on the electrode film using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by means of plating within openings provided in the photosensitive resin using the electrode film,

coating the photosensitive resin and the first thermoelectric bodies with a thermosetting resin, and

dissolving and removing the substrate and the electrode film;

a second thermoelectric structure forming process comprising the steps of;

forming an electrode film consisting of a metallic material on a substrate other than the aforesaid substrate,

providing a pattern in the shape of stripes on the electrode film using a photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by means of plating within openings provided in the photosensitive resin using the electrode film,

coating the photosensitive resin and the second thermoelectric body with a thermosetting resin, and

dissolving and removing the substrate and the electrode film; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising steps of;

bonding together a plurality of the first thermoelectric structures and the second thermoelectric structures laid in alternating layers,

cutting the first and second thermoelectric structures in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes.

2. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a first thermoelectric structure forming process comprising steps of;

forming an electrode film consisting of a metallic material on a substrate, providing a pattern in the shape of stripes on the electrode film using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by means of plating within openings provided in the photosensitive resin using the electrode film,

bonding a heat insulating sheet onto the photosensitive resin and the first thermoelectric bodies, and

dissolving and removing the substrate and the electrode film;

a second thermoelectric structure forming process comprising steps of;

forming an electrode film consisting of a metallic material on a substrate other than aforesaid substrate,

providing a pattern in the shape of stripes on the electrode film using a photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by means of plating within openings provided in the photosensitive resin using the electrode film,

bonding a heat insulating sheet onto the photosensitive resin and the second thermoelectric bodies, and

dissolving and removing the substrate and the electrode film; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising steps of;

bonding together a plurality of the first thermoelectric structures and the second thermoelectric structures laid in alternating layers,

cutting the first and second thermoelectric structures in a predetermined length; and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes.

3. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a first thermoelectric bodies forming process comprising steps of;

forming an electrode film consisting of a metallic material on a substrate, providing a pattern in the shape of stripes on the electrode film using a photosensitive resin, and

forming first thermoelectric bodies consisting of a first thermoelectric material by means of plating within openings provided in the photosensitive resin using the electrode film;

a second thermoelectric bodies forming process comprising steps of;

forming an electrode film consisting of a metallic material on a substrate other than aforesaid substrate,

providing a pattern in the shape of stripes on the electrode film using a photosensitive resin, and

forming second thermoelectric bodies consisting of a second thermoelectric material by means of plating within openings provided in the photosensitive resin using the electrode film;

a composite thermoelectric structure forming process comprising steps of;

bonding the surface of the first thermoelectric bodies formed on one of the substrates to the surface of the second thermoelectric bodies formed on the other of the substrates with a heat insulating sheet interposed in-between,

dissolving and removing both of the substrates and respective electrode films; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising steps of;

bonding together a plurality of the composite thermoelectric structures laid in alternating layers,

cutting the plurality of composite thermoelectric structures in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes.

4. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a first thermoelectric structure forming process comprising steps of;

providing a pattern in the shape of stripes on an electrically conductive substrate using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by means of plating within openings provided in the photosensitive resin using the substrate as an electrode,

coating the photosensitive resin and the first thermoelectric bodies with a thermosetting resin, and

dissolving and removing the substrate;

a second thermoelectric structure forming process comprising the steps of;

providing a pattern in the shape of stripes on an electrically conductive substrate other than the aforesaid substrate using a photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by means of plating within openings provided in the photosensitive using the substrate as an electrode,

coating the photosensitive resin and the second thermoelectric bodies with a thermosetting resin, and

dissolving and removing the substrate; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising steps of;

bonding a plurality of the first thermoelectric structures to a plurality of the second thermoelectric structures laid in alternating layers,

cutting the plurality of the first and second thermoelectric structures bonded together in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes.

5. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a first thermoelectric structure forming process comprising steps of;

providing a pattern in the shape of stripes on an electrically conductive substrate using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by means of plating within openings provided in the photosensitive resin using the substrate as an electrode,

bonding a heat insulating sheet onto the photosensitive resin and the first thermoelectric bodies, and

dissolving and removing the substrate;

a second thermoelectric structure forming process comprising steps of;

providing a pattern in the shape of stripes on an electrically conductive substrate other than the aforesaid substrate using a photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by means of plating within openings provided in the photosensitive using the substrate as an electrode,

bonding a heat insulating sheet onto the photosensitive resin and the second thermoelectric bodies dissolving, and

removing the substrate; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising the steps of;

bonding a plurality of the first thermoelectric structures to a plurality of the second thermoelectric structures laid in alternating layers,

cutting the plurality of the first and second thermoelectric structures bonded together in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes.

6. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a first thermoelectric bodies forming process comprising steps of;

providing a pattern in the shape of stripes on an electrically conductive substrate using a photosensitive resin, and

forming first thermoelectric bodies consisting of a first thermoelectric material by means of plating within openings provided in the photosensitive resin using the substrate as an electrode;

a second thermoelectric bodies forming process comprising steps of;

providing a pattern in the shape of stripes on an electrically conductive substrate other than the aforesaid substrate using a photosensitive resin, and

forming second thermoelectric bodies consisting of a second thermoelectric material by means of plating within openings provided in the photosensitive resin using the substrate as an electrode;

a composite thermoelectric structure forming process comprising steps of;

bonding the surface of the first thermoelectric bodies formed on the substrate to the surface of the second thermoelectric bodies formed on the other substrate with a heat insulating sheet interposed in-between, and

forming a composite thermoelectric structure by a step of dissolving and removing both of aforesaid substrates; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising steps of;

bonding together a plurality of the composite thermoelectric structures laid in layers,

cutting the composite thermoelectric structures bonded together in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes.

7. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a thermoelectric structure forming process comprising steps of;

forming a metallic film on a substrate whose surface or whole body has insulation properties,

forming the metallic film by etching into a first electrode film and a second electrode film, formed in the shape of teeth of two combs facing each other, each tooth being alternately interposed between adjacent teeth,

forming a pattern in the shape of stripes on a photosensitive resin in the gap area between the first electrode film and the second electrode film, each in the shape of teeth of a comb,

forming first thermoelectric bodies consisting of a first thermoelectric material by plating on the first electrode film inside openings of the photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by plating on the second electrode film inside openings of the photosensitive resin,

coating the photosensitive resin, the first thermoelectric bodies, and the second thermoelectric bodies with a thermosetting resin, and

dissolving and removing the substrate, first electrode film, and second electrode film; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising the steps of;

stacking and bonding together a plurality of the thermoelectric structures,

cutting the plurality of the thermoelectric structures bonded together in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately by wiring electrodes.

8. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a thermoelectric structure forming process comprising steps of;

forming a metallic film on a substrate whose surface or whole body has insulation property,

forming the metallic film by etching into a first electrode film and a second electrode film, formed in the shape of teeth of two combs facing each other, each tooth being alternately interposed between adjacent teeth;

forming a pattern in the shape of stripes on a photosensitive resin in the gap area between the first electrode film and the second electrode film, each in the shape of teeth of a comb,

forming first thermoelectric bodies consisting of a first thermoelectric material by plating on the first electrode film inside openings of the photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by plating on the second electrode film inside openings of the photosensitive resin,

bonding a heat insulating sheet onto the photosensitive resin, the first thermoelectric bodies, and the second thermoelectric bodies, and

dissolving and removing the substrate, first electrode film, and second electrode film; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising the steps of;

stacking and bonding together a plurality of the thermoelectric structures,

cutting the plurality of the thermoelectric structures bonded together in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately by wiring electrodes.

9. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a composite thermoelectric structure forming process comprising steps of;

forming a metallic film on a substrate whose surface or whole body has insulation properties,

forming the metallic film by etching into a first electrode film and a second electrode film, formed in the shape of teeth of two combs facing each other, each tooth being alternately interposed between adjacent teeth,

forming a pattern in the shape of stripes in the gap area between the first electrode film and the second electrode film, each in the shape of teeth of a comb, using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by plating on the first electrode film inside openings of the photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by plating on the second electrode film inside openings of the photosensitive resin,

bonding together two substrates on which respectively the first thermoelectric bodies and the second thermoelectric bodies are formed in the foregoing steps of processing, via a heat insulating sheet interposed therebetween, and

dissolving and removing each of the substrates, the first electrode film, and the second electrode film; and

connecting a plurality of thermocouples in series as a thermoelectric power generation element by a process comprising the steps of;

bonding together a plurality of the composite thermoelectric structures laid in layers,

cutting the composite thermoelectric structures bonded together in a predetermined length, and

connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes.

10. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a thermoelectric structure forming process comprising steps of;

forming a metallic film on a substrate whose surface or whole body has insulation properties,

forming the metallic film by etching into a first electrode film and a second electrode film, formed in the shape of teeth of two combs facing each other, each tooth being alternately interposed between adjacent teeth,

forming a pattern in the shape of stripes in the gap area between the first electrode film and the second electrode film, each in the shape of teeth of a comb, using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by plating on the first electrode film inside openings of the photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by plating on the second electrode film inside openings of the photosensitive resin,

coating the photosensitive resin, the first thermoelectric bodies, and the second thermoelectric bodies with a thermosetting resin,

forming another metallic film on an entire plating initiation surface after dissolving and removing the substrates, first electrode films, and second electrode films, and

forming thermocouples in a row as a thermoelectric power generation element after connecting each of the first thermoelectric bodies to one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes formed by patterning the metallic film by the etching method; and

connecting all of the thermocouples in series by a process comprising the steps of;

stacking and bonding together a plurality of the thermoelectric structures, and

connecting together adjacent thermocouples in respective rows, end to end.

11. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a thermoelectric structure forming process comprising steps of;

forming a metallic film on a substrate whose surface or whole body has insulation properties,

forming the metallic film by etching into a first electrode film and a second electrode film, formed in the shape of teeth of two combs facing each other, each tooth being alternately interposed between adjacent teeth,

forming a pattern in the shape of stripes in the gap area between the first electrode film and the second electrode film, each in the shape of teeth of a comb, using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by plating on the first electrode film inside openings of the photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by plating on the second electrode film inside openings of the photosensitive resin,

bonding a heat insulating sheet onto the photosensitive resin, the first thermoelectric bodies, and the second thermoelectric bodies,

forming another metallic film on an entire plating initiation surface after dissolving and removing the substrates, first electrode films, and second electrode films, and

forming thermocouples in a row as a thermoelectric power generation element after connecting each of the first thermoelectric bodies to one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes formed by patterning the metallic film by the etching method; and

connecting all of the thermocouples in series by a process comprising the steps of;

stacking and bonding together a plurality of the thermoelectric structures, and

connecting together adjacent thermocouples in respective rows, end to end.

12. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a thermoelectric structure forming process comprising steps of;

forming a metallic film on a substrate whose surface or whole body has insulation properties,

forming the metallic film by etching into a first electrode film and a second electrode film, formed in the shape of teeth of two combs facing each other, each tooth being alternately interposed between adjacent teeth,

forming a pattern in the shape of stripes in the gap area between the first electrode film and the second electrode film, each in the shape of teeth of a comb, using a photosensitive resin,

forming first thermoelectric bodies consisting of a first thermoelectric material by plating on the first electrode film inside openings of the photosensitive resin,

forming second thermoelectric bodies consisting of a second thermoelectric material by plating on the second electrode film inside openings of the photosensitive resin,

bonding together two substrates on which respectively the first thermoelectric bodies and the second thermoelectric bodies are formed in the foregoing steps of processing, via a heat insulating sheet interposed therebetween,

forming another metallic film on an entire plating initiation surface after dissolving and removing the substrates, first electrode films, and second electrode films, and

forming thermocouples in a row as a thermoelectric power generation element after connecting each of the first thermoelectric bodies to one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes formed by patterning the metallic film by the etching method; and

connecting all of the thermocouples in series by a process comprising the steps of;

stacking and bonding together a plurality of the thermoelectric structures, and

connecting together adjacent thermocouples in respective rows, end to end.

13. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a first thermoelectric structure forming process comprising steps of;

forming an electrode film consisting of a metallic material on a substrate,

forming a photosensitive resin having a first pattern in the shape of stripes on the electrode film, and

forming first thermoelectric bodies consisting of a first thermoelectric material by plating within openings of the photosensitive resin using the electrode film such that the thickness of the first thermoelectric bodies is less than that of the photosensitive resin;

a second thermoelectric structure forming process comprising steps of;

forming an electrode film consisting of a metallic material on a substrate other than aforesaid substrate,

forming on the electrode film a photosensitive resin having a second pattern in the shape of stripes, formed at the same pitch as that of the first pattern in the shape of stripes, and provided with unopened surface areas, each narrower than the width of each of the openings in the first pattern in the shape of stripes, and openings, each wider than the width of each of the unopened surface areas un the first pattern in the shape of stripes, and

forming second thermoelectric bodies consisting of a second thermoelectric material by plating within openings of the photosensitive resin using the electrode film such that the thickness of the second thermoelectric bodies is less than that of the photosensitive resin;

a composite thermoelectric structure forming process comprising steps of;

bonding together the first thermoelectric structure and the second thermoelectric structure formed by the aforesaid steps of processes after fitting the openings in the photosensitive resin of one of the thermoelectric structures into the unopened surface areas in the photosensitive resin of the other,

cutting the first thermoelectric structure and second thermoelectric structure bonded together as above, in a predetermined size,

dissolving and removing each of the substrates and the electrode films, and

forming thermocouples in a row as a thermoelectric element by connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes; and

connecting all of the thermocouples in series by a process comprising the steps of;

stacking and bonding together a plurality of the composite thermoelectric structures with insulators interposed therebetween, and

connecting together adjacent thermoelectric bodies on the edge of respective composite thermoelectric structures with element terminal wirings.

14. A method of manufacturing a thermoelectric power generation unit, the method comprising:

a first thermoelectric structure forming process comprising steps of;

forming a photosensitive resin having a first pattern in the shape of stripes on an electrode film formed on an electrically conductive substrate, and

forming first thermoelectric bodies consisting of a first thermoelectric material by plating inside openings of the photosensitive resin, using the electrode film, such that the thickness of the first thermoelectric bodies is less than the thickness of the photosensitive resin;

a second thermoelectric structure forming process comprising steps of;

forming an electrode film consisting of a metallic material on a substrate other than aforesaid substrate,

forming on the electrode film a photosensitive resin having a second pattern in the shape of stripes, formed at the same pitch as that of the first pattern in the shape of stripes and provided with unopened surface areas, each narrower than the width of each of the openings in the first pattern in the shape of stripes, and openings, each wider than the width of each of the unopened surface areas in the first pattern in the shape of stripes, and

forming second thermoelectric bodies consisting of a second thermoelectric material by plating inside openings of the photosensitive resin, using the electrode film, such that the thickness of the second thermoelectric bodies is less than the thickness of the photosensitive resin;

a composite thermoelectric structure forming process comprising steps of;

bonding together the first thermoelectric structure and second thermoelectric structure formed by the aforesaid steps of processing after fitting the openings in the photosensitive resin of one of the thermoelectric structures into the unopened surface areas in the photosensitive resin of the other,

cutting the first thermoelectric structure and second thermoelectric structure bonded together in a predetermined size,

dissolving and removing each of the substrates and the electrode films, and

forming thermocouples in a row as a thermoelectric element by connecting the surface at the cut end of each of the first thermoelectric bodies to the surface at the cut end of one of the second thermoelectric bodies, adjacent to the former, alternately with wiring electrodes; and

connecting all of the thermocouples in series by a process comprising steps of;

stacking and bonding together a plurality of the composite thermoelectric structures with insulators interposed therebetween, and

connecting together adjacent thermoelectric bodies on the edge of respective composite thermoelectric structures with element terminal wirings.