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Array of optical integrated devices with micro-lenses

  • US 5,898,191 A
  • Filed: 01/02/1996
  • Issued: 04/27/1999
  • Est. Priority Date: 01/25/1995
  • Status: Expired due to Fees
First Claim
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1. An optical integrated device for arraying with at least one other optical integrated apparatus having a first height, said device comprising:

  • (i) a semiconductor substrate including first and second sides;

    (ii) a substrate-side electrode which is formed on the first side of the semiconductor substrate;

    (iii) a micro-lens layer which is epitaxially grown on a whole area of the second side of the substrate, the second side having a substantially smooth, hemispherically etched surface formed by a melt-back etching technique, said substantially smooth surface allowing a proper focusing of light;

    (iv) epitaxial layers which are epitaxially grown on a whole area of the micro-lens layer, said epitaxial layers defining a predetermined ridge height substantially even with said first height;

    (v) a dielectric film which is formed on the epitaxial layers; and

    (vi) an epilayer-side electrode which is formed on a whole area of the dielectric film, whereby said predetermined ridge height is substantially even with said first height of said other apparatus enables arraying of said device and said apparatus.

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