Planar waveguide and a process for its fabrication

• US 5,900,057 A
• Filed: 06/05/1996
• Issued: 05/04/1999
• Est. Priority Date: 01/17/1995
• Status: Expired due to Term

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Buchal, Christoph J., Siegrist, Theo
• Primary Examiner(s): KUNEMUND, ROBERT M
• Application Number:
  US08/658,419
• Time in Patent Office: 1,063 Days
• Field of Search: 117/84, 117/105, 117/108, 117/109, 117/918, 117/940
• US Class Current: 117/109
• CPC Class Codes: H01S 2302/00 Amplification / lasing wavelength
• CPC Class Codes: H01S 3/0632 Thin film lasers in which light propagates in the plane of the thin film
• CPC Class Codes: H01S 3/1608 erbium
• CPC Class Codes: H01S 3/1645 halide
• CPC Class Codes: Y10S 117/918 Single-crystal waveguide

Abstract

A planar waveguide and a process for making a planar waveguide is disclosed. The waveguide has a layer of dope host material formed on a substrate. The host material is a trivalent material such as a metal fluoride, wherein the metal is selected from the Group III B metals and the lanthanide series rare earth metals of the Mendeleevian Periodic Table. The dopant is a rare earth metal such as erbium. The waveguide has an emission spectrum with a bandwidth of about 60 nm for amplification of an optical signal at a wavelength of about 1.51 μm to about 1.57 μm. The waveguide is made by forming the layer of doped host material on a substrate. The film is formed by evaporating materials from two separate sources, one source for the dopant material and a separate source for the host material and forming a film of the evaporated materials on a substrate.

Claims

1. A process for fabricating a planar waveguide comprising:

forming a layer of a doped, waveguiding host material and a dopant material on a substrate by evaporating the host material from a first source and the dopant material from the second source, wherein the first source material is a metal fluoride wherein the metal is selected from the group consisting of the Group IIIB metals and the lanthanide series rare earth metal of the Mendeleevian Periodic Table of the Elements and the second source material is ErF₃.

2. The process of claim 1 wherein the concentration of the dopant in the host material is about 0.05 atomic percent to about 5 atomic percent.

3. The process of claim 1 wherein the dopant is erbium and the doped, waveguiding host material has an emission spectrum with a bandwidth of about 60 nm at a signal wavelength of about 1.51 μ

m to about 1.57 μ

m.

4. The process of claim 1 further comprising controlling the dopant concentration in the doped, waveguiding material such that the dopant profile conforms to the intensity profile of the light transmitted through the doped, waveguiding material.

5. The process of claim 3 wherein the first source material is selected from the group consisting of LaF₃,YF₃, and LuF₃.

6. The process of claim 5 wherein the doped, waveguiding material is formed on the substrate by heating a source of LaF₃ to a first temperature and heating a source of ErF₃ to a second temperature wherein the first and second temperatures are selected to control the rates of evaporation of LaF₃ and ErF₃ from their respective sources such that for every 5 units of ErF₃ that are evaporated, 95 units of LaF₃ are evaporated thereby forming a doped waveguiding material that is about 95 atomic percent LaF₃ and about 5 percent ErF₃ on the substrate.

7. The process of claim 6 wherein the substrate is selected from the group consisting of silicon, crystalline quartz, fused quartz, calcium fluoride, and aluminum oxide.

8. The process of claim 7 wherein the silicon substrate has a buffer layer of silicon dioxide formed thereover before the layer of doped, waveguiding material is formed on the substrate.