Near-field scanning microwave microscope having a transmission line with an open end
First Claim
1. A scanning microscope for imaging a sample, the scanning microscope comprising:
- generator means for generating electromagnetic energy;
applying means, receiving the electromagnetic energy from the generator means, for applying the electromagnetic energy to the sample to form a field of electromagnetic radiation around the sample;
a probe, for placement in proximity with the sample, for receiving the electromagnetic radiation from the sample, comprising a resonant coaxial transmission line with an open end for receiving the electromagnetic radiation from the probe;
detector means for detecting the electromagnetic radiation received by the probe and for outputting an imaging signal; and
means for analyzing the imaging signal.
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Accused Products
Abstract
The microscope includes a microwave generator connected to a mismatched transmission line which terminates in a probe with an exposed end. When a sample is brought into close proximity with the exposed end of the probe, the frequencies and quality factors of the standing wave resonances on the transmission line between the source and the probe are modified. The microwave signal reflected from the end of the probe varies as the capacitance between the probe and the sample changes and as the conductivity of the sample changes. Scanning the sample relative to the probe allows generation of an image from the variation of the reflected signal. Alternatively, to image a device with the microscope, a microwave signal is applied to the device, the probe is scanned over the device, and the signal that is picked up is recorded. In a second embodiment, a first lock-in amplifier is used to lock in the microscope at the resonant frequency, and a second lock-in amplifier is used to detect a curvature of the resonance.
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Citations
17 Claims
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1. A scanning microscope for imaging a sample, the scanning microscope comprising:
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generator means for generating electromagnetic energy; applying means, receiving the electromagnetic energy from the generator means, for applying the electromagnetic energy to the sample to form a field of electromagnetic radiation around the sample; a probe, for placement in proximity with the sample, for receiving the electromagnetic radiation from the sample, comprising a resonant coaxial transmission line with an open end for receiving the electromagnetic radiation from the probe; detector means for detecting the electromagnetic radiation received by the probe and for outputting an imaging signal; and means for analyzing the imaging signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification