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Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same

  • US 5,903,428 A
  • Filed: 09/25/1997
  • Issued: 05/11/1999
  • Est. Priority Date: 09/25/1997
  • Status: Expired due to Term
First Claim
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1. Apparatus for supporting a workpiece in a spaced-apart relation to a support surface of a workpiece support chuck, comprising:

  • a chuck body fabricated of a relatively low resistivity material having a support surface; and

    a plurality of individual mesas located upon the support surface of the chuck body wherein each mesa in said plurality of mesas comprises a raised portion of said chuck body that rises above said support surface and a cap, fabricated from a high resistivity dielectric, deposited upon a top surface of the raised portion, said cap having an arcuate profile that minimizes the area of contact between the workpiece and the cap.

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