Method for aligning and forming microelectromechanical systems (MEMS) contour surfaces

• US 5,905,007 A
• Filed: 08/01/1997
• Issued: 05/18/1999
• Est. Priority Date: 08/01/1997
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Ho, Chih-Ming, Li, Wen J.
• Primary Examiner(s): Young, Christopher G.
• Application Number:
  US08/904,729
• Time in Patent Office: 655 Days
• Field of Search: 430/22, 430/5, 430/319
• US Class Current: 430/22
• CPC Class Codes: B81C 1/00214 Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
• CPC Class Codes: G03F 7/24 Curved surfaces G03F7/70 takes precedence

Abstract

An integrated circuit, or microelectromechanical structure is defined onto a contour surface by utilizing a flexible mask upon which photolithographic patterns are first defined using conventional planar photolithographic techniques. The contour surface is provided with a thin film uniformly distributed on the surface and then the flexible mask is aligned with the contour substrate. Alignments are made through multiple stages of yaw alignment, translation alignment and rotational alignment. Once the mask is aligned with contour substrate it is then subjected while rotating to developing field, such as uniform illumination of ultraviolet light shining on the side of the contour substrate as it is rotated in the illumination field. The developed photoresist layer disposed on the surface of the contour substrate is thus developed and the underlying film etched according to the patterned mask in a manner similar to a conventional planar photolithography. Multiple layers are thus disposed masked and etched to result in complex multilayered integrated circuit and/or microelectromechanical devices disposed on the contour surface of a macromechanical component or structure.

Claims

1. A method for fabricating micron or less sized devices onto a contoured surface of a substrate comprising:

fabricating a patterned mask on a surface of a flexible film while said flexible film is in a flat condition to provide a flexible mask;

disposing a photoresist layer onto said contoured surface of said substrate;

aligning said patterned mask conformally on said contoured surface of said substrate; and

exposing said mask and said photoresist on said contoured surface of said substrate to a developing field of energy so that selected portions of said photoresist on said contoured surface of said substrate are developed thereby transferring a pattern from said patterned mask to said photoresist layer on said contoured surface of said substrate.

2. The method of claim 1 wherein fabricating said flexible mask comprises fabricating a patterned non-ultraviolet transparent layer on said flexible substrate.

3. The method of claim 2 wherein said non-ultraviolet transparent layer is a thin film of chromium disposed on said flexible substrate overcoated with a thin film of gold.

4. The method of claim 1 wherein said photoresist layer is disposed on said contoured surface of said substrate by spray coating said photoresist onto said contoured surface of said substrate.

5. The method of claim 1 where disposing said photoresist on said contoured surface of said substrate comprises electrodepositing a photoresist layer onto said contoured surface of said substrate.

6. The method of claim 1 wherein said contoured surface of said substrate is cylindrical and is characterized by a longitudinal axis, and exposing said contoured surface of said substrate to a developing field of energy comprises rotating said cylindrical contoured surface of said substrate about said longitudinal axis while exposing said cylindrical contoured surface of said substrate from a direction generally perpendicular to said longitudinal axis.

7. The method of claim 1 further comprising disposing a thin film on said contoured surface of said substrate prior to disposing said photoresist onto said contoured surface of said substrate, said photoresist thereafter being disposed on said thin film.

8. The method of claim 7 wherein said thin film is spray coated onto said contoured surface of said substrate.

9. The method of claim 7 wherein said thin film is electroplated onto said contoured surface of said substrate.

10. The method of claim 7 wherein said thin film is vapor/plasma deposited onto said contoured surface of said substrate.

11. The method of claim 7 wherein said thin film is disposed on said substrate while rotating said substrate.

12. The method of claim 1 where aligning said flexible mask to said contoured surface of said substrate is comprised of yaw aligning said mask to said contoured surface of said substrate;

temporarily affixing said flexible mask to said substrate after being yaw aligned; and

longitudinally and axially aligning said mask to said substrate.

13. The method of claim 12 wherein yaw aligning said mask to said substrate is performed in a first yaw alignment system and wherein longitudinally and axially aligning said mask to substrate is performed in a second alignment system with two-degrees of freedom, yaw aligning being performed prior to longitudinally and axially aligning said mask to said contoured surface of said substrate in said second alignment system.

14. The method of claim 12 wherein yaw aligning said contoured surface of said surface relative to said flexible mask comprises translationally aligning said contoured surface of said substrate to a predetermined alignment indicia on said flexible mask;

rotationally aligning said contoured surface of said substrate to said indicia position on said flexible mask by rotation of said contoured surface of said substrate about an axis parallel to said plane of said mask; and

rotationally aligning said flexible mask relative to said contoured surface of said substrate by rotating said flexible mask about an axis perpendicular to said first axis.

15. A method for fabricating an integrated circuit/microelectromechanical (IC/MEMS) structure on a surface of a cylindrical substrate comprising:

disposing a thin film on said surface of said cylindrical substrate by rotating said cylindrical substrate while said thin film is disposed thereon;

providing an aligned pattern on said thin film of said cylindrical substrate, which pattern is formed by use of a flexible mask which is fabricated while substantially flat and curved to conform to said cylindrical substrate; and

exposing said aligned pattern on said thin film of said cylindrical substrate while rotating said cylindrical substrate to selectively define said IC/MEMS structure in said thin film on said cylindrical substrate surface.

16. The method of claim 15 where providing said aligned pattern on said thin film comprises disposing an aligned flexible mask on said thin film.

17. The method of claim 16 where aligning said flexible mask to said surface of said cylindrical substrate is comprised of yaw aligning said mask to said contoured surface of said cylindrical substrate;

temporarily affixing said flexible mask to said cylindrical substrate after being yaw aligned; and

longitudinally and axially aligning said mask to said cylindrical substrate.

18. The method of claim 17 wherein yaw aligning said mask to said cylindrical substrate is formed in a first yaw alignment system and longitudinally and axially aligning said mask to cylindrical substrate is performed in a second alignment system having two degrees of freedom, yaw aligning being performed prior to longitudinally and then axially aligning said mask to said surface of said cylindrical substrate.

19. The method of claim 17 wherein yaw aligning said surface of said cylindrical substrate relative to said flexible mask comprises:

translationally aligning said surface of said cylindrical substrate to a predetermined alignment indicia on said flexible mask;

rotationally aligning said surface of said cylindrical substrate to said indicia position on said flexible mask by rotation of said surface of said cylindrical substrate about a first axis parallel to said plane of said mask; and

rotationally aligning said flexible mask relative to said surface of said cylindrical substrate by rotating said flexible mask about an axis perpendicular to said first axis.