Micromachined rate and acceleration sensor and method
First Claim
Patent Images
1. A monolithic substrate for acceleration and angular rate sensing, the substrate comprising:
- a support frame;
an accelerometer formed in the substrate and having a proof mass with first and second opposite edges;
a flexure connecting the first edge of the proof mass to the support frame;
a first torsion stabilizing strut joined with and extending along a first strut length between the proof mass and the support frame and being positioned closer to the flexure than to the second edge, the first strut having a first thickness dimension generally transverse the first strut length; and
a second torsion stabilizing strut joined with and extending along a second strut length between the proof mass and the support frame and being positioned closer to the flexure than to the second edge, the second strut having a second thickness dimension generally transverse the second strut length which is different in magnitude than the first thickness dimension.
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Abstract
A monolithic substrate for acceleration and angular rate sensing. The substrate comprises a support frame, and a first accelerometer formed in the substrate. The first accelerometer has a proof mass including first and second opposite edges. A flexure connects the first edge of the proof mass to the support frame. The flexure defines a hinge axis for the proof mass. The first accelerometer further includes a pair of torsion stabilizing struts coupling a portion of the proof mass to the frame.
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Citations
42 Claims
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1. A monolithic substrate for acceleration and angular rate sensing, the substrate comprising:
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a support frame; an accelerometer formed in the substrate and having a proof mass with first and second opposite edges; a flexure connecting the first edge of the proof mass to the support frame; a first torsion stabilizing strut joined with and extending along a first strut length between the proof mass and the support frame and being positioned closer to the flexure than to the second edge, the first strut having a first thickness dimension generally transverse the first strut length; and a second torsion stabilizing strut joined with and extending along a second strut length between the proof mass and the support frame and being positioned closer to the flexure than to the second edge, the second strut having a second thickness dimension generally transverse the second strut length which is different in magnitude than the first thickness dimension. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A monolithic substrate for acceleration and angular rate sensing, the substrate comprising:
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a support frame including a post; an accelerometer formed in the substrate and having a proof mass including first and second legs and a main body portion connecting the legs and accommodating common movement of the legs; a flexure including first and second spaced apart flexure portions respectively connecting the first and second legs to the support frame, the flexure defining a hinge axis for the proof mass, the post being disposed between the flexure portions and extending toward the main body portion and between the legs; a first torsion stabilizing strut joined with and extending along a first strut length between the proof mass and the post, the first strut having a first thickness dimension generally transverse the first strut length; and a second torsion stabilizing strut joined with and extending along a second strut length between the proof mass and the post, the second strut having a second thickness dimension generally transverse the second strut length which is different in magnitude than the first thickness dimension. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A monolithic substrate for acceleration and angular rate sensing, the substrate comprising:
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a support frame; a first accelerometer formed in the substrate, the first accelerometer having a proof mass including first and second opposite edges, and third and fourth opposite edges, a flexure connecting the first edge of the proof mass to the support frame, the flexure defining a hinge axis for the proof mass, a first force-sensing member coupled between the proof mass and the support frame, and a first pair of torsion stabilizing struts joined with and extending between the proof mass and the support frame along respective strut lengths, individual struts of the pair being positioned closer to the flexure than to the second edge and having respective thickness dimensions generally transverse the respective strut lengths; and a second accelerometer formed in the substrate, the second accelerometer having a second proof mass including fifth and sixth opposite edges, and seventh and eighth opposite edges, a flexure connecting the fifth edge to the support frame, the flexure of the second accelerometer defining a hinge axis for the second proof mass, a second force-sensing member coupled between the second proof mass and the support frame, and a second pair of torsion stabilizing struts joined with and extending between the second proof mass and the support frame along respective strut lengths, individual struts of the second pair of struts being positioned closer to the flexure of the second accelerometer than to the sixth edge and having respective thickness dimensions generally transverse the respective strut lengths of the second pair of struts; at least one of the first and second pairs of struts comprises a first strut having a thickness dimension which is different in magnitude from a second strut of at least one of the first and second pairs of struts. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A method of forming a monolithic substrate for acceleration and angular rate sensing comprising:
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providing a substrate; forming a support frame within the substrate; forming an accelerometer within the substrate, the accelerometer having a proof mass with first and second opposite edges; forming a flexure connecting the first edge of the proof mass to the support frame; forming a first torsion stabilizing strut joined with and extending along a first strut length between the proof mass and the support frame and being positioned closer to the flexure than to the second edge, the first strut having a first thickness dimension generally transverse the first strut length; and forming a second torsion stabilizing strut joined with and extending along a second strut length between the proof mass and the support frame and being positioned closer to the flexure than to the second edge, the second strut having a second thickness dimension generally transverse the second strut length which is different in magnitude than the first thickness dimension. - View Dependent Claims (34, 35, 36, 37)
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38. A method of forming a monolithic substrate for acceleration and angular rate sensing comprising:
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providing a substrate; forming a support frame within the substrate; forming a first accelerometer within the substrate, the first accelerometer having a proof mass including first and second opposite edges, and third and fourth opposite edges; forming a flexure connecting the first edge of the proof mass to the support frame, the flexure defining a hinge axis for the proof mass; forming a first force-sensing member coupled between the proof mass and the support frame; forming a first pair of torsion stabilizing struts joined with and extending between the proof mass and the support frame along respective strut lengths, individual struts of the pair being positioned closer to the flexure than to the second edge and having respective thickness dimensions generally transverse the respective strut lengths; forming a second accelerometer within the substrate, the second accelerometer having a second proof mass including fifth and sixth opposite edges, and seventh and eighth opposite edges; forming a flexure connecting the fifth edge to the support frame, the flexure of the second accelerometer defining a hinge axis for the second proof mass; forming a second force-sensing member coupled between the second proof mass and the support frame; and forming a second pair of torsion stabilizing struts joined with and extending between the second proof mass and the support frame along respective strut lengths, individual struts of the second pair of struts being positioned closer to the flexure of the second accelerometer than to the sixth edge and having respective thickness dimensions generally transverse the respective strut lengths of the second pair of struts, one pair of the first and second pairs of struts comprises a first strut having a thickness dimension which is different in magnitude from a second strut of at least one of the first and second pairs of struts. - View Dependent Claims (39, 40, 41, 42)
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Specification