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Tunneling rotation sensor

  • US 5,905,202 A
  • Filed: 11/25/1997
  • Issued: 05/18/1999
  • Est. Priority Date: 09/01/1995
  • Status: Expired due to Term
First Claim
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1. A tunneling rotation sensor, comprising:

  • a substrate;

    a cantilever having a first portion, a second portion, and a third portion extending from said substrate and a cantilever arm positioned away from said substrate;

    said cantilever arm comprising a first section and a second section;

    a tunneling electrode on said substrate;

    a tunneling gap through which a current flows, said tunneling gap formed between said tunneling electrode and said first section of said cantilever arm;

    said cantilever arm further comprising flexible material and being construed such that;

    (a) said first section of said cantilever arm joins with said first portion, said second portion, and said third portion of said cantilever such that said first portion and said third portion make up a cantilever strap;

    (b) said cantilever arm deflects toward and away from said substrate; and

    (c) said first section is more restricted than said second section from making movements other than said deflection toward and away from said substrate.

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