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Electrostatic chuck with ceramic pole protection

  • US 5,905,626 A
  • Filed: 04/12/1998
  • Issued: 05/18/1999
  • Est. Priority Date: 04/12/1998
  • Status: Expired due to Term
First Claim
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1. In an electrostatic chuck:

  • an electrically conductive pole piece havinga flat top surfacea sidewallthe flat top surface having a perimetera radiused corner connecting the perimeter to the sidewalla ceramic insulative coating applied to the pole piece perimeter and sidewall covering the radiused corner;

    a ceramic semiconductor coating applied to the pole piece top surface;

    the surface of the pole piece not coated being anodized;

    an intersection formed between the anodized surface of the pole piece and the ceramic insulative coating;

    the intersection being disposed below the top surface of the pole piece.

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  • 3 Assignments
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