Electrostatic chuck with ceramic pole protection
First Claim
Patent Images
1. In an electrostatic chuck:
- an electrically conductive pole piece havinga flat top surfacea sidewallthe flat top surface having a perimetera radiused corner connecting the perimeter to the sidewalla ceramic insulative coating applied to the pole piece perimeter and sidewall covering the radiused corner;
a ceramic semiconductor coating applied to the pole piece top surface;
the surface of the pole piece not coated being anodized;
an intersection formed between the anodized surface of the pole piece and the ceramic insulative coating;
the intersection being disposed below the top surface of the pole piece.
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Abstract
Electrostatic chucks are disclosed in which a conductive pole piece is provided with a flat top surface, sidewall and a perimeter with radiused corners connecting the top surface to the sidewall. The perimeter and sidewall are coated with a ceramic insulative material covering the radiused corners. The top surface is coated with a ceramic semiconductive material. Then the surfaces of the pole piece not covered by ceramic material are anodized in such a manner that the intersections between anodized pole surfaces and ceramic material are below the pole piece top surfaces.
24 Citations
6 Claims
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1. In an electrostatic chuck:
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an electrically conductive pole piece having a flat top surface a sidewall the flat top surface having a perimeter a radiused corner connecting the perimeter to the sidewall a ceramic insulative coating applied to the pole piece perimeter and sidewall covering the radiused corner; a ceramic semiconductor coating applied to the pole piece top surface; the surface of the pole piece not coated being anodized; an intersection formed between the anodized surface of the pole piece and the ceramic insulative coating; the intersection being disposed below the top surface of the pole piece. - View Dependent Claims (2)
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3. In an electrostatic chuck:
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at least a pair of electrically conductive pole pieces, each pole piece having a flat top surface a sidewall the flat top surface having a perimeter a radiused corner connecting the perimeter to the sidewall a ceramic insulative coating applied to each pole piece perimeter and sidewall covering the radiused corner; a ceramic semiconductive coating applied to each pole piece top surface; the surface of each pole piece not coated being anodized; an intersection formed between the anodized surface of each pole piece and its ceramic insulative coating; the intersections being disposed below the top surface of the pole pieces; bonding material joining the pole pieces and covering the ceramic/anodized intersection. - View Dependent Claims (4)
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5. In an electrostatic chuck:
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A first annular shaped pole piece and a second disc shaped pole piece surrounded by the first pole piece, each pole piece having a flat top surface a sidewall the flat top surface having a perimeter a radiused corner connecting the perimeter to the sidewall a frame for supporting the pole pieces and having a rim disposed between the first and second pole pieces and having, a top surface sidewalls radiused corners connecting the sidewalls to the top surface; a ceramic insulative coating applied to each pole piece perimeter and each pole piece sidewall and covering the radiused corners of each pole piece and the ceramic insulative coating being applied to the frame rim covering the frame rim top surface, frame rim radiused corners and frame rim sidewalls of the rim; a ceramic semiconductive coating applied to each pole piece top surface; the surfaces of each pole piece and frame not coated being anodized; an intersection formed between the anodized surface of each pole piece and frame and their respective ceramic insulative coating; the intersection being disposed below the top surface of each pole piece and frame.
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6. In the method of forming an electrostatic chuck, the steps comprising;
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providing a conductive pole piece with a flat top surface, sidewalls and a perimeter with radiused corners connecting the top surface to the sidewalls; coating the perimeter and radiused sidewalls with a ceramic insulative material covering the radiused corners; coating the pole piece top surface with a ceramic semiconductive material; and anodizing the surfaces of the pole piece not covered by ceramic insulative material and in such manner that the intersection between the anodized pole surface and insulative ceramic material is below the pole piece top surface.
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Specification