Method and apparatus for low temperature, low pressure chemical vapor deposition of epitaxial silicon layers

• US 5,906,680 A
• Filed: 12/24/1996
• Issued: 05/25/1999
• Est. Priority Date: 09/12/1986
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Meyerson, Bernard Steele
• Primary Examiner(s): KUNEMUND, ROBERT M
• Application Number:
  US08/772,799
• Time in Patent Office: 882 Days
• Field of Search: 117/88, 117/935, 117/89, 117/102, 117/104
• US Class Current: 117/88
• CPC Class Codes: C23C 16/24 Deposition of silicon only
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: H01L 21/02381 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD

Abstract

A method and apparatus for depositing single crystal, epitaxial films of silicon on a plurality of substrates in a hot wall, isothermal deposition system is described. The deposition temperatures are less than about 800° C., and the operating pressures during deposition are such that non-equilibrium growth kinetics determine the deposition of the silicon films. An isothermal bath gas of silicon is produced allowing uniform deposition of epitaxial silicon films simultaneously on multiple substrates. This is a flow system in which means are provided for establishing an ultrahigh vacuum in the range of about 10^-9 Torr prior to epitaxial deposition. The epitaxial silicon layers can be doped in-situ to provide very abruptly defined regions of either n- or p-type conductivity.

Claims

1. A method for depositing a silicon containing layer onto a substrate, including the following steps:

providing said substrate in a CVD apparatus,

establishing a total base pressure less than about 10^-8 Torr. in said CVD apparatus,

establishing a deposition temperature less than about 800°

C. in said apparatus,

introducing a gas containing silicon into said apparatus which gas interacts heterogeneously with said substrate to deposit a layer containing silicon thereon, the total operating pressure of said gas containing silicon being sufficiently low to substantially prevent gas phase pyrolysis, and

continuing said deposition until a desired thickness of a silicon containing layer is obtained.

2. The method of claim 1, where said total operating pressure is less than about 200 mTorr.

3. The method of claim 2, where said deposition temperature is less than 700°

C.

4. The method of claim 1, where said gas containing silicon is silane.

5. The method of claim 1, where the partial pressures of all contaminants in said apparatus are maintained at pressures less than 10^-8 Torr.

6. The method of claim 1, where said silicon containing layer is a single crystal.

7. The method of claim 1, where said substrate is comprised of silicon.

8. The method of claim 1, where said deposition temperature is in the range of about 550-800°

C.

9. The method of claim 1, including the further step of doping said silicon containing layer in-situ to produce a n- or p-type conductivity region therein.

30. The method of claim 1 further including the step of introducing a gas containing Ge into said CVD apparatus, said silicon containing layer further including Ge.

31. The method of claim 1 wherein said CVD apparatus is a hot wall, thermally driven CVD apparatus.

32. The method of claim 1 wherein said layer containing silicon is formed epitaxially on said substrate.

33. The method of claim 1 wherein said layer containing silicon is polycrystalline.

34. The method of claim 6 wherein said layer containing silicon has less than 10³ defects/cm².

10. A method for depositing a silicon containing layer on a plurality of substrates, comprising the steps of:

placing said substrates into a CVD reactor,

evacuating said reactor to a total base pressure less than about 10^-8 Torr.,

heating said reactor to a temperature not in excess of about 800°

C.,

introducing a silicon-containing gas into said reactor for deposition of a silicon containing layer onto said substrates,

establishing a total operating pressure of said silicon-containing gas during said deposition at a total operating pressure sufficiently low to substantially prevent gas phase pyrolysis, and

reacting said gas on said substrates to deposit Si containing layers thereon.

11. The method of claim 10, including the step of introducing a first dopant-containing gas into said reactor during said deposition to in-situ dope said silicon containing layers in a first conductivity type.

12. The method of claim 11, including the additional step of introducing a second dopant containing gas, said second dopant being capable of producing opposite conductivity-type Si than said first dopant, to produce a p-n junction in said silicon containing layers.

13. The method of claim 10, where said silicon-containing gas is silane.

14. The method of claim 10, where said total base pressure and said total operating pressure established in said reactor are sufficiently low that the partial pressure of water vapor in said reactor is less than about 10^-8 Torr. and the partial pressure of oxygen in said reactor is less than about 10^-7 Torr.

15. The method of claim 10, where said total operating pressure of said silicon-containing gas is less than several hundred mTorr.

35. The method of claim 10 further including the step of introducing a gas containing Ge into said CVD reactor, said silicon containing layer further including Ge.

36. The method of claim 10 wherein said CVD apparatus is an isothermal, hot wall CVD reactor.

37. The method of claim 10 wherein said silicon containing layer is formed epitaxially on said substrate.

38. The method of claim 10 wherein said silicon containing layer is a single crystal layer.

39. The method of claim 38 wherein said silicon containing layer has less than 10³ defects/cm².

16. A method for deposition of a silicon containing layer onto a substrate, comprising the following steps:

placing said substrate into a CVD reactor,

evacuating said reactor to a base vacuum less than the partial pressures of any contaminants in said reactor,

heating said reactor to a deposition temperature less than about 800°

C.,

introducing a gas containing silicon into said reaction chamber for deposition of a silicon containing layer onto said substrate,

establishing a total operating pressure of said gas containing silicon during deposition which is sufficiently low at said deposition temperature that homogeneous reactions of said silicon-containing gas in the gas phase are substantially eliminated, and

continuing said deposition until a desired thickness of said silicon containing layer is obtained.

17. The method of claim 16, including the further step of introducing a dopant-containing gas into said reactor for in-situ doping of said silicon containing layers.

18. The method of claim 17, including the further step of forming a p-n junction in said silicon containing layers.

19. The method of claim 16, where said silicon-containing gas is silane.

20. The method of claim 16, where said vacuum is a total base pressure less than about 10^-8 Torr.

21. The method of claim 16, where said substrates is comprised of silicon.

22. The method of claim 16, where said deposition temperature is in the range 550-775°

C.

23. The method of claim 16, where said total operating pressure during deposition is less than several hundred mTorr.

24. The method of claim 16, where said silicon-containing gas is silane, said deposition temperature is in the range 500-775°

C., said vacuum is a pressure in said reactor less than about 10^-8 Torr, and said total operating pressure during deposition is less than several hundred mTorr.

25. The method of claim 16 further including the step of introducing a gas containing Ge into said CVD reactor, said silicon containing layer further including Ge.

26. The method of claim 16 wherein said CVD reactor is a hot wall, thermally driven CVD reactor.

27. The method of claim 16 wherein said silicon containing layer is formed epitaxially on said substrate.

28. The method of claim 16 wherein said silicon containing layer is a single crystal layer.

29. The method of claim 28 wherein said silicon containing layer has less than 10³ defects/cm².

40. A method for depositing a silicon-containing layer onto a substrate, including the following steps:

providing said substrate in a hot wall, thermally driven CVD apparatus,

establishing a total base pressure less than about 10^-8 Torr. in said apparatus,

establishing a deposition temperature less than about 800°

C. in said apparatus,

introducing a gas containing silicon into said apparatus which gas interacts heterogeneously with said substrate to deposit a silicon-containing layer thereon, the total operating pressure of said gas containing silicon being less than several hundred mTorr, and

continuing said deposition until a desired thickness of said silicon-containing layer is obtained.

41. The method of claim 40, where said total operating pressure is less than about 200 mTorr.

42. The method of claim 40, where said deposition temperature is in the range of about 550-800°

C. and said total operating pressure of said gas containing silicon is less than 50 mTorr.

43. A method for epitaxial deposition of a layer containing silicon onto a plurality of substrates, comprising the following steps:

placing said plurality of substrates into a hot wall CVD reactor,

evacuating said reactor to a base ultra high vacuum less than the partial pressures of any contaminants in said reactor,

heating said reactor to a deposition temperature less than about 800°

C.,

introducing a gas containing silicon into said reaction chamber for epitaxial deposition of said layers onto said substrates,

establishing a total operating pressure of said gas containing silicon during deposition which is sufficiently low at said deposition temperature that homogeneous reactions of said silicon-containing gas in the gas phase are substantially eliminated, and

continuing said deposition until a desired thickness of said epitaxial layers is obtained.

44. The method of claim 43, where said ultra high vacuum is a total base pressure less than about 10^-8 Torr.

45. The method of claim 44, where said substrates are comprised of silicon.

46. The method of claim 43, where said total operating pressure during deposition is less than several hundred mTorr.

47. The method of claim 43, where said silicon-containing gas is silane, said deposition temperature is in the range 500-775°

C., said ultra high vacuum is a pressure in said reactor less than about 10^-8 Torr, and said total operating pressure during deposition is less than about 200 mTorr.

48. A method for depositing a layer containing silicon onto a substrate, including the following steps:

loading a substrate into a chamber which can be pumped to a vacuum level,

heating said substrate in said chamber to a temperature less than about 200°

C. and establishing a vacuum level in said chamber,

transferring said substrate into a CVD apparatus in which a base pressure less than about 10^-8 Torr. has been established,

establishing a deposition temperature less than about 800°

C. in said CVD apparatus,

introducing a gas containing silicon into said apparatus which gas interacts heterogeneously with said substrate to deposit a silicon containing layer thereon, the total operating pressure of said gas containing silicon being sufficiently low at said deposition temperature that homogeneous reactions of said silicon-containing gas in the gas phase are substantially eliminated, and

continuing said deposition until a desired thickness of said silicon containing layer is obtained.

49. A method for depositing silicon on a plurality of substrates, comprising the steps of:

placing said substrates into a load chamber,

heating said substrates while establishing a vacuum level in said load chamber,

transferring said substrates into a CVD reactor evacuated to a total base pressure less than about 10^-8 Torr.,

heating said reactor to a temperature not in excess of 800°

C.,

introducing a silicon containing gas into said reactor for deposition of silicon onto said substrates,

establishing a total operating pressure of said silicon containing gas during said deposition being sufficiently low at said deposition temperature that homogeneous reactions of said silicon-containing gas in the gas phase are substantially eliminated, and

reacting said gas on said substrates to deposit single crystal silicon containing layers thereon.

50. The method of claim 49 further including the step of introducing a gas containing Ge into said CVD reactor, at least one of said silicon containing layers further including Ge.

51. The method of claim 49 wherein said CVD reactor is an isothermal, hot wall CVD reactor.

52. The method of claim 49 wherein at least one of said silicon containing layers has less than 10³ defects/cm².

53. The method of claim 49, further including the step of introducing a dopant containing gas into said reactor for in-situ doping of at least one of said silicon layers.

54. A method for epitaxial deposition of silicon layers onto a plurality of substrates, comprising the following steps:

placing said substrates into a load chamber,

heating said substrates while pumping said load chamber to a pressure less than 10^-6 Torr.,

transferring said plurality of substrates into a CVD reactor evacuated to a base vacuum less than the partial pressures of any contaminants in said reactor,

heating said reactor to a deposition temperature less than about 800°

C.,

introducing a gas containing silicon into said reaction chamber for epitaxial deposition of silicon onto said substrates,

establishing a total operating pressure of said gas containing silicon during deposition which is sufficiently low at said deposition temperature that homogeneous reactions of said silicon containing gas in the gas phase are substantially eliminated, and

continuing said deposition until a desired thickness of said epitaxial silicon layers is obtained.

55. A method for deposition of an epitaxial silicon containing layer onto a plurality of substrates, comprising the following steps:

placing said substrates in a load chamber,

pumping said load chamber to a pressure less than 10^-6 Torr.,

transferring said plurality of substrates into a CVD reactor evacuated to a base vacuum less than the partial pressures of any contaminants in said reactor,

heating said reactor to a deposition temperature less than about 800°

C.,

introducing a gas containing silicon into said reaction chamber for epitaxial deposition of silicon onto said substrates,

establishing a total operating pressure of said gas containing silicon during deposition which is sufficiently low at said deposition temperature that homogeneous reactions of said silicon containing gas in the gas phase are substantially eliminated, and

continuing said deposition until a desired thickness of said epitaxial silicon containing layer is obtained.

56. The method of claim 55 further including the step of introducing a gas containing Ge into said CVD reactor, said silicon containing layer further including Ge.

57. The method of claim 55 wherein said CVD reactor is a hot wall CVD reactor.

58. The method of claim 55 wherein said epitaxial silicon containing layer has less than 10³ defects/cm².

59. The method of claim 55, further including the step of introducing a dopant containing gas into said reactor for in-situ doping of said silicon containing layer.