Ultrasonic cleaning apparatus and method

• US 5,906,687 A
• Filed: 08/20/1997
• Issued: 05/25/1999
• Est. Priority Date: 08/23/1996
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Kosaka, Akio, Watanabe, Hidehiro, Masui, Kenji
• Primary Examiner(s): JASTRZAB, KRISANNE MARIE
• Application Number:
  US08/914,774
• Time in Patent Office: 643 Days
• Field of Search: 15/102, 15/97.1, 15/94, 134/1.3, 134/6, 134/1, 422/20
• US Class Current: 134/1.3
• CPC Class Codes: B08B 1/00 Cleaning by methods involving the use of tools cleaning hollow articles by methods or apparatus specially adapted thereto B08B9/00
• CPC Class Codes: B08B 1/14 Wipes; Absorbent members, e.g. swabs or sponges with integrated means for dispensing fluids B08B1/40
• CPC Class Codes: B08B 1/30 by movement of cleaning members over a surface
• CPC Class Codes: B08B 1/40 Cleaning tools with integrated means for dispensing fluids, e.g. water, steam or detergents cleaning by the force of jets or sprays B08B3/02
• CPC Class Codes: B08B 3/12 by sonic or ultrasonic vibrations washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves A47L15/13; of natural teeth, of prostheses using ultrasonic techniques similar to those used for natural teeth A61C17/20; application of ultrasonic vibrations to chemical, physical or physico-chemical processes in general B01J19/10
• CPC Class Codes: B08B 3/123 Cleaning travelling work, e.g. webs, articles on a conveyor conveyors B65G; handling webs B65H
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67057 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: H01L 21/67092 Apparatus for mechanical treatment or grinding or cutting, see the relevant groups in subclasses B24B or B28D

Abstract

This specification discloses an invention directed to an ultrasonic cleaning apparatus for cleaning a cleaning target. The ultrasonic cleaning apparatus includes a liquid discharge nozzle having a discharge port to discharge a liquid therethrough, an ultrasonic vibrator for applying ultrasonic vibrations to the liquid which is to be supplied to the nozzle, and a cleaning member which is mounted on the discharge port of the nozzle, vibrates while holding therein the liquid discharged through the discharge port, and comes into contact with the cleaning target with a predetermined area, thereby scrub-cleaning the surface of the cleaning target.

Claims

1. An ultrasonic cleaning apparatus for cleaning a cleaning target, comprising:

a nozzle having a discharge port to discharge a liquid therethrough;

ultrasonic wave applying means for applying ultrasonic vibrations to said liquid which is to be supplied to said nozzle; and

a cleaning member which is mounted on said discharge port of said nozzle, vibrates while holding therein said liquid discharged through said discharge port, and comes into contact with the cleaning target with a predetermined area, thereby scrub-cleaning a surface of the cleaning target.

2. An apparatus according to claim 1, wherein

said cleaning member has small pores at least in a contact portion with the cleaning target to pass said liquid held in said cleaning member to an outside, and

during cleaning, said liquid which has passed through the pores is caused to be present at said contact portion of said cleaning member and cleaning target.

3. An apparatus according to claim 1, further having heating means for heating said liquid to a predetermined temperature.

4. An apparatus according to claim 1, further having

a cleaning tank filled with said liquid, and

cleaning target holding means for allowing cleaning while positioning a contact portion of said cleaning member and the cleaning target in said liquid filled in said cleaning tank.

5. An apparatus according to claim 4, further having a heater for heating said liquid in said cleaning tank to a predetermined temperature.

6. An apparatus according to claim 4, further having driving means for driving the cleaning target and said cleaning member relative to each other in said cleaning tank.

7. An ultrasonic cleaning method of cleaning a cleaning target, comprising:

filling a cleaning member with a liquid applied with ultrasonic vibrations, and

driving said cleaning member with vibration of said liquid, and causing said cleaning member to come into contact with the cleaning target with a predetermined area, thereby scrub-cleaning a surface of the cleaning target.

8. A method according to claim 7, wherein

said cleaning member is formed with small pores at least in a contact portion with the cleaning target to pass said liquid held in said cleaning member to an outside, and

cleaning is performed while causing said liquid which has passed through the pores to be present at said contact portion of said cleaning member and the cleaning target.

9. A method according to claim 7, wherein

said liquid is heated to a predetermined temperature, and

after cleaning, a surface of the cleaning target is dried.

10. A method according to claim 7, wherein

cleaning is performed while a contact portion of said cleaning member and the cleaning target is positioned in said liquid filled in said cleaning tank.

11. A method according to claim 10, wherein said liquid in said cleaning tank is heated to a predetermined temperature.

12. A method according to claim 10, wherein

after cleaning in said liquid filled in said cleaning tank is complete, said liquid in said cleaning tank is quickly discharged, and

the cleaning target is pulled up relatively while being in contact with said cleaning member, thereby drying the cleaning target.