Multiple wavelength image plane interferometry

• US 5,907,404 A
• Filed: 09/08/1997
• Issued: 05/25/1999
• Est. Priority Date: 09/08/1997
• Status: Expired due to Term

• Current Assignee: Coherix Incorporated
• Original Assignee: ERIM International, Inc. (Altarum Institute)
• Inventors: Marron, Joseph C., Gleichman, Kurt W.
• Primary Examiner(s): Turner, Samuel A.
• Application Number:
  US08/925,381
• Time in Patent Office: 624 Days
• Field of Search: 356/359, 356/360, 356/357
• US Class Current: 356/489
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01J 9/02 by interferometric methods using interferometers for measuring optically the linear dimensions of objects G01B9/02

Abstract

A system for interferometric inspection of an object includes a number of improvements to reduce spurious reflections and provide precision measurement of large objects. A neutral density filter of absorptive glass is used as an attenuator to reduce undesirable reflections which may otherwise result in detector saturation. A wedge-shaped beam splitter having at least one anti-reflective surface is also utilized to reduce unwanted reflections. The system uses multiple wavelength interferometry to provide range information for an object. Additional improvements in precision may be provided by using a wavelength calibration device such as an etalon, a wavemeter, or a reference cell having relatively narrow transmission peaks, to improve the accuracy in determining the laser wavelengths. The wavelength information may be used to more precisely determine range values for the object. The various improvements in precision and accuracy facilitate use of differing optical path lengths for the reference beam and object beam so that overall system size and complexity is reduced.

Claims

1. A system for interferometric inspection of an object, the system comprising:

a tunable laser source for providing a coherent energy beam having a selectable variable wavelength;

a beam splitter for separating the energy beam into a reference beam and an object beam, directing the object beam toward the object for illumination thereof, combining energy reflected from the object and a reflected reference beam to form an image beam, and directing the image beam toward a detector;

a reference mirror for reflecting the reference beam back toward the beam splitter to generate the reflected reference beam, the mirror being positioned generally perpendicular to wavefronts of the reference beam and having an adjustable position in response to a command signal to vary phase of the reflected reference beam, the mirror being positioned such that optical path length of the reference beam differs from optical path length of the object beam;

an attenuator positioned between the reference mirror and the beam splitter at a nonperpendicular angle relative to the reference beam to reduce spurious reflections while attenuating the reference beam;

an aperture stop element having an aperture for controlling speckle size;

an optical element for focussing energy reflected from the object to a point within the aperture;

an imaging lens for focussing the image beam on the detector; and

a computer in communication with the tunable laser source, the reference mirror, and the detector, the computer determining range values for a plurality of points on the object.

2. The system of claim 1 wherein the tunable laser source comprises a tunable diode laser.

3. The system of claim 1 wherein the tunable laser source comprises a plurality of monochromatic lasers.

4. The system of claim 1 further comprising:

a wavelength calibration device for determining wavelength of the tunable laser source for each selected wavelength.

5. The system of claim 4 wherein the wavelength calibration device comprises an etalon having transmission peaks corresponding to selected wavelengths for the tunable laser source.

6. The system of claim 4 wherein the wavelength calibration device comprises a wavemeter in communication with the computer, the computer using information from the wavemeter to determine the range values.

7. The system of claim 4 wherein the wavelength calibration device comprises at least one cell having predetermined transmission peaks.

8. The system of claim 1 wherein the optical element comprises a reflective collimator to facilitate inspection of large objects while reducing spurious reflections.

9. The system of claim 1 wherein the optical element comprises a concave mirror.

10. The system of claim 9 wherein the optical element comprises an off-axis parabolic mirror.

11. The system of claim 1 wherein the reference mirror comprises a spherical mirror having a radius of curvature which matches radius of curvature of reference beam wavefronts.

12. The system of claim 1 wherein the optical element comprises a second lens.

13. The system of claim 12 wherein the aperture is positioned between the imaging lens and the second lens.

14. The system of claim 13 wherein the beam splitter is positioned between the object and the second lens to reduce spurious reflections.

15. The system of claim 12 wherein the reference mirror comprises a planar mirror.

16. The system of claim 1 wherein the beam splitter comprises a wedge-shaped beam splitter having a first surface for separating the energy beam into the object beam and the reference beam and a second surface oriented at an angle relative to the first surface wherein the angle is selected such that spurious reflections are blocked by the aperture stop element.

17. The system of claim 16 wherein the second surface of the beam splitter is coated with an anti-reflective material.

18. The system of claim 16 wherein the beam splitter is positioned at a first angle and the attenuator is positioned at a second angle relative to the reference beam wherein the first and second angles have opposite directions relative to a plane perpendicular to propagation direction of the reference beam to reduce spherical aberration.

19. The system of claim 1 wherein the attenuator comprises a neutral density absorptive glass filter.

20. The system of claim 1 further comprising:

an off-axis parabolic mirror positioned between the tunable laser source and the beam splitter for directing and focussing the energy beam to a point between the parabolic mirror and the beam splitter.

21. The system of claim 1 wherein the optical element comprises an off-axis parabolic mirror positioned above a reference plane defined by axes of the energy beam, the reference beam, and the combined reference and object beam, the system further comprising:

a plane mirror interposed the beam splitter and the parabolic mirror for redirecting the object beam toward the parabolic mirror to illuminate the object.

22. The system of claim 1 wherein the optical path length of the object beam exceeds the optical path length of the reference beam.

23. The system of claim 1 wherein the optical path length of the object beam is at least twice the optical path length of the reference beam.

24. The system of claim 1 further comprising:

a reflector for obtaining measurements from cylindraceous objects, the reflector having an inverted frustoconical reflective interior surface for circumferentially illuminating the object.

25. The system of claim 1 further comprising:

a reflector having a conical reflective exterior surface for imaging a cylindrical interior portion of the object.

26. The system of claim 25 wherein the reflector comprises a 45°

cone.

27. The system of claim 1 further comprising:

at least one planar mirror positioned to illuminate otherwise occluded portions of the object.

28. The system of claim 1 further comprising:

a focussing lens interposed the tunable laser source and the beam splitter for focussing the energy beam to a point between the focussing lens and the beam splitter; and

a planar mirror interposed the tunable laser source and the focussing lens for redirecting the energy beam toward the focussing lens and the beam splitter.

29. A multiple wavelength image plane interferometric inspection system for inspecting objects placed in an object space, the system comprising:

a tunable diode laser for providing a coherent energy beam at multiple selectable wavelengths;

a first lens for focussing the energy beam to form a first point source;

a beam splitter for separating the energy beam into an object beam and a reference beam, the beam splitter including at least one surface having an anti-reflective coating thereon;

an attenuator positioned at an angle relative to a propagation axis of the reference beam to reduce spurious reflections;

a spherical reference mirror for reflecting the reference beam from the attenuator back toward the beam splitter, the reference mirror having a radius of curvature which matches a radius of curvature of the reference beam, the reference mirror being translatable along the propagation axis of the reference beam to provide a selectable phase shift in the reference beam;

a collimator interposed the beam splitter and the object space for collimating the object beam such that the object beam has substantially planar wavefronts, the collimator focussing energy reflected from the object space to a second point source on an opposite side of the beam splitter;

an aperture stop having an aperture positioned at the second point source for reducing aberration;

a detector array for detecting an interference pattern produced by a combination of the reference beam with the object beam;

an imaging lens interposed the aperture stop and the detector array for forming an image of the interference pattern on the detector array; and

control logic in communication with the tunable laser source, the reference mirror, and the detector array, the control logic operative to control selection of a series of wavelengths for the tunable laser source and generate, commands to position the reference mirror to induce a plurality of phase shifts in the reference beam with each phase shift based on a corresponding selected wavelength, the control logic further operative to process signals generated by the detector array to generate range information for points on an object.

30. The system of claim 29 wherein the collimator comprises an off-axis parabolic mirror.

31. The system of claim 29 wherein the system further comprises:

a housing surrounding the laser source, the first lens, the beam splitter, the attenuator, the reference mirror, the collimator, the imaging lens, the detector array, and the aperture stop for reducing optical noise during inspection, the housing including an access panel for providing access to the object space.

32. The system of claim 29 wherein the attenuator comprises a neutral density absorptive glass filter, the attenuator being positioned at an angle relative to a propagation axis of the reference beam to reduce spurious reflections, the angle being opposite an angle formed by the wedge-shaped beam splitter to reduce spherical aberration.

33. The system of claim 29 further comprising:

a beam conditioner interposed the diode laser and the first lens for providing anamorphic correction of the energy beam to reduce asymmetry thereof.

34. The system of claim 29 further comprising:

a wavelength calibration device interposed the diode laser and the first lens, the calibration device having significantly greater transmissivity for selected wavelengths of the diode laser relative to all other wavelengths to reduce uncertainty in determining the selected wavelengths.

35. The system of claim 34 wherein the wavelength calibration device comprises an etalon having transmission peaks corresponding to the selected wavelengths for the diode laser.

36. The system of claim 29 further comprising

a wavelength calibration device including at least one cell containing a substance having a significantly higher transmissivity for at least one narrow band of wavelengths relative to other wavelengths.

37. The system of claim 29 further comprising:

at least one mirror disposed within the object space for imaging lateral portions of an object.

38. The system of claim 37 wherein the mirror comprises:

an inverted frustoconical reflective surface for circumferentially imaging an object within the object space.

39. The system of claim 29 further comprising:

a flat diffusely reflective calibration plate for positioning within the object space to determine compensating range values for subtracting from subsequently collected data sets to compensate for system errors.

40. The system of claim 29 wherein the control logic determines compensating range values based for a diffusely reflective calibration plate and subtracts the compensating range values from subsequently collected data sets to compensate for system errors.