Multilayer dielectric diffraction gratings

• US 5,907,436 A
• Filed: 09/29/1995
• Issued: 05/25/1999
• Est. Priority Date: 09/29/1995
• Status: Expired due to Term

• Current Assignee: Lawrence Livermore National Security LLC (Government of the United States of America)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Boyd, Robert, Shore, Bruce W., Perry, Michael D., Britten, Jerald A., Nguyen, Hoang T.
• Primary Examiner(s): Spyrou, Cassandra
• Assistant Examiner(s): CHANG, AUDREY Y
• Application Number:
  US08/536,874
• Time in Patent Office: 1,334 Days
• Field of Search: 359/566, 359/568, 359/571, 359/572, 359/573, 359/574, 359/575, 359/576, 359/584, 359/587, 437/187, 430/5, 156/345
• US Class Current: 359/576
• CPC Class Codes: G02B 27/1086 operating by diffraction only
• CPC Class Codes: G02B 5/1814 structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings G02B5/189 takes precedence
• CPC Class Codes: G02B 5/1857 using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
• CPC Class Codes: G02B 5/1861 Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence
• CPC Class Codes: G02B 5/1866 Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence
• CPC Class Codes: G03F 7/001 Phase modulating patterns, e.g. refractive index patterns
• CPC Class Codes: G03H 1/0244 Surface relief holograms replicating hologram without interference recording G03H1/0276
• CPC Class Codes: G03H 1/0252 Laminate comprising a hologram layer

Abstract

The design and fabrication of dielectric grating structures with high diffraction efficiency used in reflection or transmission is described. By forming a multilayer structure of alternating index dielectric materials and placing a grating structure on top of the multilayer, a diffraction grating of adjustable efficiency, and variable optical bandwidth can be obtained. Diffraction efficiency into the first order in reflection varying between 1 and 98 percent has been achieved by controlling the design of the multilayer and the depth, shape, and material comprising the grooves of the grating structure. Methods for fabricating these gratings without the use of ion etching techniques are described.

Claims

1. A nonmetallic apparatus for producing specular reflection and diffracted orders in reflection and transmission, comprising:

a substrate comprising dielectric material;

a dielectric stack comprising a plurality of layers, wherein each layer of said plurality of layers comprises either a high refractive index dielectric material or a low refractive index dielectric material, wherein said high refractive index dielectric material and said low refractive index dielectric material comprise a difference in refractive index greater than 0.1, wherein said plurality of layers comprises a top layer and a bottom layer, wherein said bottom layer is affixed to said substrate, wherein each layer of said plurality of layers comprises a continuous film; and

a nonmetallic diffraction grating comprising grooves, wherein each groove of said grooves comprises a depth and a shape, wherein said diffraction grating is formed within said top layer of said plurality of layers, wherein the fraction of light incident on the apparatus which undergoes specular reflection, diffraction and transmission is determined by adjusting (i) the number of layers of said plurality of layers, (ii) the thickness of at least one layer of said plurality of layers and (iii) said depth and shape of said grooves.

2. The apparatus of claim 1, wherein said dielectric stack comprises dielectric material transparent to a wavelength of interest.

3. The apparatus of claim 2, wherein said dielectric stack comprises alternating layers of oxide material.

4. The apparatus of claim 2, wherein said material is selected from a group consisting of HfO₂, SiO₂, Al₂ O₃, Nb₂ O₃, Ta₂ O_4-5, Sc₂ O₃, ZrO₂, and TiO₂.

5. The apparatus of claim 1, wherein said substrate comprises transparent material.

6. The apparatus of claim 1, wherein said substrate comprises opaque material.

7. The apparatus of claim 1, wherein said substrate comprises reflective material.

8. The apparatus of claim 1, wherein said substrate is flat.

9. The apparatus of claim 1, wherein said substrate comprises a curved surface, wherein said curved surface has been prepared prior to affixing said plurality of layers to said dielectric stack.

10. The apparatus of claim 1, wherein said dielectric stack comprises alternating layers of material transparent to a wavelength of interest, wherein said material is selected from a group consisting of oxide material, fluoride material, sulfide material and or selenide material.

11. The apparatus of claim 1, wherein said dielectric stack comprises alternating layers of oxide materials that are designed to serve as a coating of any reflectance for a wavelength of interest.

12. The apparatus of claim 1, wherein said substrate comprises dielectric material.

13. The apparatus of claim 12, wherein said substrate comprises dielectric material selected from a group consisting of glass, silica and sapphire.

14. The apparatus of claim 12, wherein said substrate comprises organic material.

15. The apparatus of claim 12, wherein said substrate comprises polymeric material.

16. The apparatus of claim 1, wherein said substrate comprises material selected from a group consisting of plastics, nylon and resin.

17. The apparatus of claim 1, wherein said substrate comprises semiconductor material.

18. The apparatus of claim 17, wherein said substrate comprises semiconductor material selected from a group consisting of silicon and gallium arsenide.

19. A method for fabricating a nonmetallic diffraction grating for producing specular reflection and diffracted orders in reflection and transmission, comprising:

placing a multilayer dielectric stack upon a substrate;

placing an antireflective or absorbing layer upon the top of said multilayer stack, wherein said layer minimizes the reflectance of light from said multilayer dielectric stack during the step of exposing photosensitive material, wherein said antireflective or absorbing layer comprises a material which is transparent to the wavelength of light at which the grating will eventually be used;

coating photosensitive (commonly positive or negative photoresist) material on said absorbing layer;

exposing said photosensitive layer to a periodic pattern of light and dark radiation (the grating pattern);

developing said photosensitive material to produce a surface relief pattern;

depositing a plurality of layers of dielectric material upon said surface relief pattern, wherein each layer of said plurality of layers comprise a precise thickness as determined by the required functionality of said nonmetallic diffraction grating, wherein each layer of said plurality of layers comprises either a high refractive index dielectric material or a low refractive index dielectric material, wherein said high refractive index dielectric material and said low refractive index dielectric material comprise a difference in refractive index greater than 0.1, wherein said plurality of layers comprises a top layer and a bottom layer, wherein said bottom layer is affixed to said substrate; and

removing (lift-off) any remaining photosensitive material to produce a completed multilayer dielectric diffraction grating comprising grooves, wherein each groove of said grooves comprises a depth and a shape, wherein said diffraction grating is formed within said top layer of said plurality of layers, wherein the fraction of light incident on the apparatus which undergoes specular reflection, diffraction and transmission is determined by adjusting (i) the number of layers of said plurality of layers, (ii) the thickness of at least one layer of said plurality of layers and (iii) said depth and shape of said grooves wherein each layer of said multilayer dielectric diffraction grating comprises a continuous film, wherein said multilayer dielectric diffraction grating comprises a top layer comprising a diffraction grating.