Thermocouple array and method of fabrication
First Claim
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1. A thermocouple array comprising:
- a dielectric layer having via openings therethrough;
a first patterned conductive layer facing one surface of the dielectric layer and comprising a first series of electrical runs;
a second patterned conductive layer comprising a different material than the first patterned conductive layer, facing another surface of the dielectric layer, and comprising a second series of electrical runs, the second series of electrical runs of the second patterned conductive layer being coupled at thermocouple joints through the via openings to the first series of electrical runs of the first patterned conductive layer, the second patterned conductive layer having a different thermal emf than the first patterned conductive layer,the dielectric layer, the first patterned conductive layer, and the second patterned conductive layer being conformable to a surface to be measured,the first and second patterned conductive layers of the thermocouple array including patterns suitable for providing measurement signals indicative of temperatures at each thermocouple joint and temperature gradients in the surface to be measured.
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Abstract
A thermocouple array includes a dielectric layer having via openings therethrough, a first patterned conductive layer facing one surface of the dielectric layer, and a second patterned conductive layer facing another surface of the dielectric layer. Portions of the second patterned conductive layer can extend through the via openings to couple respective portions of the first patterned conductive layer. The second patterned conductive layer has a different thermal emf than the first patterned conductive layer. The dielectric layer, the first patterned conductive layer, and the second patterned conductive layer can be surface-conformable.
48 Citations
19 Claims
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1. A thermocouple array comprising:
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a dielectric layer having via openings therethrough; a first patterned conductive layer facing one surface of the dielectric layer and comprising a first series of electrical runs; a second patterned conductive layer comprising a different material than the first patterned conductive layer, facing another surface of the dielectric layer, and comprising a second series of electrical runs, the second series of electrical runs of the second patterned conductive layer being coupled at thermocouple joints through the via openings to the first series of electrical runs of the first patterned conductive layer, the second patterned conductive layer having a different thermal emf than the first patterned conductive layer, the dielectric layer, the first patterned conductive layer, and the second patterned conductive layer being conformable to a surface to be measured, the first and second patterned conductive layers of the thermocouple array including patterns suitable for providing measurement signals indicative of temperatures at each thermocouple joint and temperature gradients in the surface to be measured. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for fabricating a thermocouple array comprising the steps of:
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providing a first patterned conductive layer facing one surface of a dielectric layer; forming via openings through the dielectric layer; providing a second patterned conductive layer comprising a different material than the first patterned conductive layer and facing another surface of the dielectric layer, portions of the second patterned conductive layer being coupled through the via openings to respective portions of the first patterned conductive layer, the second patterned conductive layer having a different thermal emf than the first patterned conductive layer, the dielectric layer, the first patterned conductive layer, and the second patterned conductive layer being conformable to a surface to be measured, wherein providing the first and second patterned conductive layer includes forming patterns in each of the first and second patterned conductive layers suitable for providing measurement signals indicative of temperatures and temperature gradients in the surface to be measured. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A thermocouple array comprising:
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a dielectric layer having via openings therethrough; a first patterned conductive layer facing one surface of the dielectric layer; a second patterned conductive layer comprising a different material than the first patterned conductive layer and facing another surface of the dielectric layer, portions of the second patterned conductive layer being coupled through the via openings to respective portions of the first patterned conductive layer, the second patterned conductive layer having a different thermal emf than the first patterned conductive layer, the first and second patterned conductive layers of the thermocouple array including patterns suitable for collectively providing measurement signals indicative of temperatures and spatial temperature gradients in the surface to be measured; a first additional dielectric layer facing the first patterned conductive layer and the one surface of the dielectric layer, the first additional dielectric layer having a thinness sufficient to prevent its thermal mass from interfering with the measurement signals; and a second additional dielectric layer facing the second patterned conductive layer and the another surface of the dielectric layer, the second additional dielectric layer having a thickness sufficient to provide a thermal barrier from air flow, the dielectric layer, the first patterned conductive layer, the second patterned conductive layer, the first additional dielectric layer, and the second additional dielectric layer being conformable to a surface to be measured.
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Specification