Three dimensional inspection system

• US 5,909,285 A
• Filed: 10/21/1997
• Issued: 06/01/1999
• Est. Priority Date: 05/05/1997
• Status: Expired due to Term

• Current Assignee: Scanner Technologies Corporation
• Original Assignee: Elwin M. Beaty
• Inventors: Mork, David P., Beaty, Elwin M.
• Primary Examiner(s): Pham, Hoa Q.
• Application Number:
  US08/955,198
• Time in Patent Office: 588 Days
• Field of Search: 356/237, 356/394, 356/395, 356/396, 348/87, 348/126, 382/153, 382/291, 382/145, 382/146, 382/149, 382/150, 29/721, 29/759
• US Class Current: 356/394
• CPC Class Codes: G01N 21/88 Investigating the presence of flaws or contamination
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0006 using a design-rule based approach
• CPC Class Codes: G06T 7/60 Analysis of geometric attributes
• CPC Class Codes: H05K 13/0813 Controlling of single components prior to mounting, e.g. orientation, component geometry H05K13/0812 takes precedence
• CPC Class Codes: H05K 13/0818 Setup of monitoring devices prior to starting mounting operations; Teaching of monitoring devices for specific products; Compensation of drifts during operation, e.g. due to temperature shifts

Abstract

A part inspection and calibration method for the inspection of integrated circuits includes a camera to image a precision pattern mask deposited on a transparent reticle. Small parts are placed on or above the transparent reticle to be inspected. A light source and overhead light reflective diffuser provide illumination. An overhead mirror or prism reflects a side view of the part under inspection to the camera. The scene of the part is triangulated and the dimensions of the system can thus be calibrated. A reference line is located on the transparent reticle to allow an image through the prism to the camera of the reference line between the side view and the bottom view. A precise reticle mask with dot patterns gives an additional set of information needed for calibration. By imaging more than one dot pattern the missing state values can be resolved using an iterative trigonometric solution. The system optics are designed to focus images for all perspectives without the need for an additional focusing element.

Claims

1. An apparatus for three dimensional inspection of electronic leads, the apparatus comprising:

a) a transparent reticle having a top surface, wherein the transparent reticle receives a part having electronic leads for inspection on a central portion of the top surface;

b) a fixed optical element attached to the top surface of the transparent reticle, wherein the fixed optical element is positioned to reflect a side view of the part through the transparent reticle;

c) a camera located below the transparent reticle positioned to receive an image, including a bottom view of the part through the transparent reticle and a side view of the part from the fixed optical element, wherein the camera has an image data output representative of the bottom view and the side view;

d) a reference line located on the transparent reticle, wherein the reference line is positioned to provide a view to the camera of the reference line between the bottom view and the side view; and

e) a processor connected to receive the image data output, wherein the processor performs a three dimensional analysis on the image data output to inspect the electronic leads, wherein the processor has an electronic lead inspection result.

2. The apparatus of claim 1 wherein the apparatus employs a reticle mask for calibration, wherein the reticle mask further comprises a calibration dot pattern.

3. The apparatus of claim 1 further comprising four fixed optical elements attached around the central portion of the transparent reticle to provide four side views of the part to the camera.

4. The apparatus of claim 1 wherein the fixed optical element further comprises a prism.

5. The apparatus of claim 1 wherein the fixed optical element further comprises a mirror.

6. The apparatus of claim 1 wherein the image data from the camera is stored in a memory.

7. The apparatus of claim 1 wherein the processor determines a height above the transparent reticle of an object according to the following equation:

space="preserve" listing-type="equation">Z=D.sub.S tan (45°

-θ

/2)-(D.sub.B -D.sub.S) tan θ

where;

D_S =distance from a reference edge to the side view image of the object;

D_B =distance from a reference edge to the bottom view image of the object;

θ

=angle formed by a ray emanating from the object reflected by the fixed optical element and received by the camera and a plane intersecting the object parallel to the transparent reticle plane; and

Z=distance along the Z axis from the transparent reticle plane to the object.

8. The apparatus of claim 7 wherein an intersection of a reflective face of the fixed optical element and the transparent reticle is the reference edge.

9. The apparatus of claim 1 wherein the processor determines a height above the transparent reticle of an object according to the following equation:

space="preserve" listing-type="equation">Z=(d.sub.S +R) tan (45°

-θ

/2)-(d.sub.B -d.sub.S) tan θ

where;

d_S =distance from a reference edge to the side view image of the object;

d_B =distance from a reference edge to the bottom view image of the object;

θ

=angle formed by a ray emanating from the object reflected by the fixed optical element and received by the camera and a plane intersecting the object parallel to the transparent reticle plane;

R=offset of reference line and the intersection between a reflective face of the fixed optical element and the transparent reticle; and

Z=distance along the Z axis from the transparent reticle plane to the object.

10. The apparatus of claim 9 wherein the processor determines θ

and an offset R according to the following equations;

##EQU8## where

Δ

x=distance between two objects on the bottom view; and

Δ

z=corresponding distance between the two objects on the side view.

11. The apparatus of claim 1 wherein the camera is adjusted to provide a depth of focus encompassing an optical path from the part to the camera and an optical path from the part to the fixed optical element to the camera.

12. The apparatus of claim 1 wherein a vacuum holder suspends the part above the transparent reticle holder.

13. The apparatus of claim 12 wherein the central portion of the transparent reticle is cut out.

14. The apparatus of claim 1 further comprising a pedestal mounted on the central portion of the transparent reticle to receive the part.

15. The apparatus of claim 1 wherein the camera is positioned so that the axis of the camera is substantially perpendicular to a surface of the transparent reticle.

16. The apparatus of claim 1 wherein the processor determines a height above the transparent reticle of an object according to the following equation:

##EQU9## where;

d_S =distance from a reference edge to the side view image of the object;

d_B =distance from a reference edge to the bottom view image of the object;

θ

=angle formed by a ray emanating from the object reflected by the fixed optical element and received by the camera and a plane intersecting the object parallel to the transparent reticle plane; and

C=distance along the Z axis from the transparent reticle plane to the object.

17. The apparatus of claim 16 wherein the reference edge is located on the transparent reticle plane.

18. A method for three dimensional inspection of electronic leads from a single image, the method comprising the steps of:

a) providing a transparent reticle having a top surface;

b) placing a part having electronic leads for inspection on a central portion of the top surface of the transparent reticle;

c) providing fixed optical elements for providing a side perspective of the part;

d) providing a camera located beneath the transparent reticle to receive an image of the part and the side perspective provided by the fixed optical elements wherein the camera provides image data;

e) providing a reference line located on the transparent reticle, wherein the reference line is positioned to provide a view to the camera of the reference line between the bottom view and the side view; and

f) processing the image data with a computer to provide a three dimensional analysis of the part.

19. The method of claim 18 further comprising the step of calibrating the computer using a reticle mask.

20. The method of claim 19 wherein calibrating the computer further comprises calibration of a bottom view by:

a) locating calibration dots on the reticle mask visible directly from the bottom view;

b) determining a location and size of each dot;

c) storing a location and size of each dot in memory;

d) determining state values for calibration of the bottom view by comparing the location and size of each dot with known values; and

e) storing the state values in memory.

21. The method of claim 20 wherein calibrating the computer further comprises calibration of a side view by:

a) locating the calibration dots visible in each of the fixed optical elements;

b) locating a reference edge;

c) calculating a distance from the reference edge to each dot in the side view image and the bottom view image;

d) determining state values for the fixed optical elements from known values; and

e) storing the state values in memory.

22. A method for providing three dimensional inspection of an object having electronic leads from a single image, the method comprising the steps of:

a) waiting for an inspection signal;

b) acquiring an image of the object including a bottom view and a side view;

c) processing the image to find a reference line located on the transparent reticle, wherein the reference line is positioned to provide a view to the camera of the reference line between the bottom view and the side view, a rotation, x placement and y placement of the object;

d) locating the electronic leads of the object in the bottom view;

e) locating the electronic leads of the object in the side view;

f) determining a reference point for each lead;

g) converting pixel values to world values;

h) converting world values to part values;

i) converting part values to measurement values, wherein the measurement values are determined by comparing the part values to predetermined part values; and

j) providing a part result based on the measurement values and predetermined tolerance values.

23. The method of claim 22 wherein the part result comprises a result selected from the group of:

a pass result, a fail result and a rework result.

24. The method of claim 22 wherein the predetermined tolerance values further comprise pass tolerance values and fail tolerance values.

25. The method of claim 24 wherein the part result comprises a pass result if the measurement values are less than or equal to the pass tolerance values, a fail result if the measurement values exceed the fail tolerance values and a rework result otherwise.

26. The method of claim 22 wherein the image is stored in memory.

27. The method of claim 22 wherein the object is removed after the image is acquired and a next object placed while the part result is calculated.

28. The method of claim 22 wherein the steps of locating the electronic leads of the object in the bottom view and locating the electronic leads of the object in the side view further comprises the steps of:

a) processing an image of a lead wherein the image comprises an image of a lead tip to generally locate a region of the image that contains the lead tip;

b) defining a region of interest that contains the lead tip including a lead tip edge and lead tip sides;

c) performing a subpixel edge detection over the region of interest to find a location of a center of the lead tip.

29. The method of claim 28 wherein the region of interest is sized to include only an image of one full lead.

30. An apparatus for three dimensional inspection of electronic leads, the apparatus comprising:

a) a light source;

b) a transparent reticle having a top surface, wherein the transparent reticle receives a part having electronic leads for inspection on a central portion of the top surface;

c) a light diffuser positioned above the transparent reticle, wherein the light diffuser receives illumination from the light source and provides diffused illumination;

d) a fixed optical element attached to the top surface of the transparent reticle, wherein the fixed optical element is positioned to reflect a side view of the part through the transparent reticle;

e) a camera located below the transparent reticle positioned to receive an image, including a bottom view of the part through the transparent reticle and a side view of the part from the fixed optical element, wherein the camera has an image data output representative of the bottom view and the side view; and

f) a processor connected to receive the image data output, wherein the processor performs a three dimensional analysis on the image data output to inspect the electronic leads, wherein the processor has an electronic lead inspection result.

31. The apparatus of claim 30 wherein the light diffuser is fixed above the reticle.

32. The apparatus of claim 30 wherein the light diffuser is attached to a part holder.

33. The apparatus of claim 30 wherein the light source comprises a plurality of light arrays positioned around the transparent reticle.