Chemical bath apparatus

• US 5,909,741 A
• Filed: 06/20/1997
• Issued: 06/08/1999
• Est. Priority Date: 06/20/1997
• Status: Expired due to Fees

• Current Assignee: Lam Research AG (Lam Research Corporation)
• Original Assignee: Gary W. Ferrell
• Inventors: Ferrell, Gary W.
• Primary Examiner(s): Alexander, Lyle A.
• Assistant Examiner(s): Markoff, Alexander
• Application Number:
  US08/879,576
• Time in Patent Office: 718 Days
• Field of Search: 134/1, 134/1.3, 134/902, 134/201, 134/184, 134/147, 134/148
• US Class Current: 134/1
• CPC Class Codes: B08B 3/12 by sonic or ultrasonic vibrations washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves A47L15/13; of natural teeth, of prostheses using ultrasonic techniques similar to those used for natural teeth A61C17/20; application of ultrasonic vibrations to chemical, physical or physico-chemical processes in general B01J19/10
• CPC Class Codes: H01L 21/67057 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: H01L 21/67086 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: H05K 3/26 Cleaning or polishing of the conductive pattern
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

Method and apparatus for processing a workpiece in a chemical bath liquid contained in a liquid container. The liquid container is fabricated from a material such as polyetheretherketone (PEEK), poly-amide-imide (PAI) or polyphenylene sulfide (PPS). A vibration generator is positioned on each of one or more container walls to introduce vibrations with a selected frequency (20-750 kHz) through the container wall(s) and into the chemical bath liquid. Two or more vibration generators may introduce vibrations with different frequencies into the chemical bath liquid and at different angles. The chemical bath liquid may be an acid such as HCl, H₂ SO₄, HNO₃, H₂ PO₃ and HF, or may be an oxidizer or base such as NH₄ OH and H₂ O₂. The chemical bath may be used to process semiconductor wafers and circuits, printed circuit boards, optical components and similar workpieces.

Claims

1. A method of introducing controlled vibrations into a liquid, the method comprising the steps of:

providing a liquid container, containing a selected liquid and having at least three container walls, with each of a first container wall and a second container wall being a sheet having at least two exposed and opposing faces, having a selected thickness, and being made of a selected material drawn from the group consisting of polyetheretherketone, poly-amide-imide and polyphenylene sulfide; and

introducing vibrations at a first selected frequency into the selected liquid through the first container wall;

introducing second vibrations at a second selected frequency into the liquid at the second container wall in a time interval that overlaps a time interval during which the first vibrations are introduced, where the second selected frequency differs from the first selected frequency and the second container wall is oriented relative to the first container wall so that the second vibrations are oriented at a selected angle that is substantially greater than zero, relative to the orientation of the first vibrations.

2. The method of claim 1, further comprising the step of selecting at least one of said first vibration generator and said second vibration generator to produce vibrations with at least one of said first selected frequency and said second selected frequency in the range 20 kHz-750 kHz.

3. The method of claim 1, further comprising the steps of selecting said first frequency in the range 20-104 kHz and selecting said second frequency in the range 72-750 kHz.

4. The method of claim 1, further comprising the step of choosing said selected liquid to include a chemical bath component drawn from the group of chemical bath components consisting of HCl, H₂ SO₄, HNO₃, H₂ PO₃, HF, NH₄ OH and H₂ O₂.

9. The method of claim 1, further comprising the step of selecting said angle between said orientations of said first vibrations and said second vibrations to be about 90°

.

5. Chemical bath apparatus for processing a workpiece, the apparatus comprising:

a liquid container, adapted to contain a chemical bath liquid and having at least three container walls, with each of a first container wall and a second container wall being a sheet having at least two exposed and opposing faces, having a selected thickness, and being made of a selected material drawn from the group consisting of polyetheretherketone, poly-amide-imide and polyphenylene sulfide; and

a first vibration generator positioned against the first container wall so that, when the first vibration generator is activated, vibrations including a first selected frequency are produced by the first vibration generator and pass into the chemical bath liquid contained in the container at the first container wall; and

a second vibration generator positioned against the second container wall so that, when the second vibration generator is activated, vibrations including a second selected frequency are produced by the second vibration generator and pass into the chemical bath liquid at the second container wall in a time interval that overlaps a time interval during which the first vibrations are produced, where the second selected frequency differs from said first selected frequency and the second container wall is oriented relative to the first container wall so that the second vibrations are oriented at a selected angle that is substantially greater than zero, relative to the orientation of the first vibrations.

6. The apparatus of claim 5, wherein at least one of said first vibration generator and said second vibration generator produces vibrations with at least one frequency in the range 20 kHz-750 kHz.

7. The apparatus of claim 5, wherein said first frequency is selected in the range 20-104 kHz and said second frequency is selected in the range 72-750 kHz.

8. The apparatus of claim 5, further comprising a chemical bath liquid, contained in said liquid container and including a chemical bath component drawn from the class of chemical bath components consisting of HCl, H₂ SO₄, HNO₃, H₂ PO₃, HF, NH₄ OH and H₂ O₂.

10. The apparatus of claim 5, wherein said angle between said orientations of said first vibrations and said second vibrations is selected to be about 90°

.