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Lapping apparatus and process with raised edge on platen

  • US 5,910,041 A
  • Filed: 03/06/1997
  • Issued: 06/08/1999
  • Est. Priority Date: 03/06/1997
  • Status: Expired due to Term
First Claim
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1. A process for lapping a surface comprising:

  • a) providing a work piece to be lapped, having at least one surface to be lapped which can be adjusted to a position parallel to said at least one surface of a rotating platen,b) providing a rotating platen having i) a back surface and ii) a front surface with a periphery, said front surface of said rotating platen having a raised edge symmetrically disposed about said periphery,c) providing a sheet of abrasive material having an abrasive face and a back side onto said raised edge to provide a symmetrical distribution of abrasive material on said rotating platen, said back side being on said front surface of said platen with the abrasive face of said sheet facing said at least one surface to be lapped,d) securing said sheet of abrasive material to said front surface of said rotating platen, and(1) rotating said rotating platen at a rotational speed of at least 500 revolutions per minute, and(2) contacting said abrasive face and said at least one surface to be lapped on said work piece.

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