Field effect Trench transistor having lightly doped epitaxial region on the surface portion thereof

• US 5,910,669 A
• Filed: 07/24/1992
• Issued: 06/08/1999
• Est. Priority Date: 07/24/1992
• Status: Expired due to Term

• Current Assignee: Siliconix Incorporated (Vishay Intertechnology Incorporated)
• Original Assignee: Siliconix Incorporated (Vishay Intertechnology Incorporated)
• Inventors: Hshieh, Fwu-Iuan, Kwan, Sze-Hon, Owyang, King, Chang, Mike F.
• Primary Examiner(s): LOKE, STEVEN HO YIN
• Application Number:
  US07/918,954
• Time in Patent Office: 2,510 Days
• Field of Search: 257/327, 257/329, 257/330, 257/331, 257/335, 257/339, 257/341, 257/342, 257/409, 257/344
• US Class Current: 257/339
• CPC Class Codes: H01L 29/0878 Impurity concentration or distribution
• CPC Class Codes: H01L 29/4236 within a trench, e.g. trench gate electrode, groove gate electrode
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236

Abstract

A DMOS field effect transistor having its gate electrode located in a trench includes a lightly doped epitaxial layer overlying the usual epitaxial layer. The trench penetrates only part way through the upper epitaxial layer which is more lightly doped than is the underlying lower epitaxial layer. The lightly doped upper epitaxial layer reduces the electric field at the bottom of the trench, thus protecting the gate oxide from breakdown during high voltage operation. Advantageously the upper portion of the lightly doped upper epitaxial layer has little adverse effect on the transistor'"'"'s on resistance.

Claims

1. A field effect transistor comprising:

a substrate of a first conductivity type being a drain region;

a lower layer of the first conductivity type fortmed on the substrate and having a doping level less than that of the substrate;

an upper layer of the first conductivity type formed on the lower layer and having a doping level less than that of the lower layer;

a trench defined in only the upper layer and extending to within a predetermined distance of the lower layer, the trench being at least partially filled with a conductive gate electrode;

a source region of the first conductivity type formed in the upper layer and extending to a principal surface of the upper layer and lying adjacent to the sidewalls of the trench; and

a body region of a second conductivity type extending from the principal surface of the upper layer down to and into at least an upper portion of the lower layer and being spaced apart from the lower portion of the trench, wherein two spaced apart portions of the body region lying respectively on two sides of the trench define a lateral extent of the upper layer.

2. The device of claim 1, wherein the trench is U-shaped in cross-section.

3. The device of claim 1, wherein the upper layer extends about 0.5 microns below the lowest portion of the trench.

4. The device of claim 1, wherein the upper layer has a doping level about 50% that of the lower layer.

5. The device of claim 1, wherein the upper and lower layers are each less than about 8 μ

m thick.

6. The device of claim 1, wherein the upper and lower layers are epitaxial layers.

7. A field effect transistor comprising:

a substrate of a first conductivity type being a drain region;

a first layer of the first conductivity type formed on the substrate and having a doping level less than that of the substrate;

a second layer of the first conductivity type formed on the first layer and having a doping level about 50% of that of the first layer;

a trench defined in only the second layer and extending to within about 0.5 μ

m of the first layer, the trench being at least partially filled with a conductive gate electrode;

a source region of the first conductivity type formed in the second layer and extending to a principal surface of the second layer and lying adjacent to the sidewalls of the trench; and

a body region of a second conductivity type extending from the principal surface of the second layer down to and into at least an upper portion of the first layer and being spaced apart from the lower portion of the trench, wherein two portions of the body region lying respectively on two sides of the trench define a lateral extent of the second layer.