Capacitive pressure transducer with improved electrode support

• US 5,911,162 A
• Filed: 06/20/1997
• Issued: 06/08/1999
• Est. Priority Date: 06/20/1997
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Denner, John A.
• Primary Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/880,035
• Time in Patent Office: 718 Days
• Field of Search: 73/724, 73/718, 361/283.4
• US Class Current: 73/718
• CPC Class Codes: G01L 19/0618 Overload protection
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

The disclosed pressure transducer assembly includes metallic body, a diaphragm, a metallic plate, an insulator, and a conductor. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavity into a first chamber and a second chamber. A portion of the diaphragm flexes in a first direction in response to a pressure in the first chamber being greater than a pressure in the second chamber, and that portion of the diaphragm flexes in a second direction opposite the first direction in response to the pressure in the second chamber being greater than the pressure in the first chamber. The metallic plate is fixed to the metallic body in one of the first and second chambers. The insulator is also disposed in that chamber and is fixed to the metallic plate. The conductor is disposed on the insulator. The diaphragm and the conductor are characterized by a capacitance. The capacitance is representative of a difference between the pressures in the first and second chambers.

Claims

1. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a plate, said plate being fixed to said body in said first chamber;

(D) an insulator disposed in said first chamber, said insulator being fixed to said plate, a first portion of said plate overlying a first portion of said insulator, said first portion of said plate being spaced apart from said first portion of said insulator;

(E) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.

2. An assembly according to claim 1, wherein said plate and said body are metallic.

3. An assembly according to claim 2, wherein said plate is welded to said body.

4. An assembly according to claim 1, wherein said insulator comprises a ceramic material.

5. An assembly according to claim 1, wherein only a central portion of said insulator is fixed to said plate and a gap is provided between an outer perimeter of said insulator and said body.

6. An assembly according to claim 1, further comprising a spacer disposed between said insulator and said plate.

7. An assembly according to claim 1, wherein said plate comprises a spacer, said spacer being disposed proximal said insulator.

8. An assembly according to claim 1, further including an electrically conductive feedthrough, one end of said feedthrough being disposed in said first chamber and another end of said feedthrough being external to said body, said feedthrough extending through apertures in said plate and said body, said feedthrough being electrically connected to said conductor and being electrically insulated from said plate and from said body.

9. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a plate fixed to said body in said first chamber, said plate comprising a first material;

(D) an insulator disposed in said first chamber, said insulator comprising a second material different from said first material;

(E) a fastener fixing a central portion of said insulator to said plate;

(F) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.

10. An assembly according to claim 9, wherein said fastener comprises a screw.

11. An assembly according to claim 9, wherein said fastener comprises a rivet.

12. An assembly according to claim 9, wherein said fastener comprises an adhesive.

13. An assembly according to claim 9, wherein said plate rigidly supports said insulator.

14. An assembly according to claim 9, wherein said body and said plate are metallic.

15. An assembly according to claim 14, wherein said plate is welded to said body.

16. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a plate fixed to said body in said first chamber;

(D) an insulator disposed in said first chamber;

(E) a spacer disposed between said plate and said insulator;

(F) a fastener fixing a central portion of said insulator and said spacer to said plate;

(G) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.

17. An assembly according to claim 16, wherein said fastener comprises a screw.

18. An assembly according to claim 16, wherein said fastener comprises a rivet.

19. An assembly according to claim 16, wherein said fastener comprises an adhesive.

20. An assembly according to claim 16, wherein said body and said plate are metallic.

21. An assembly according to claim 20, wherein said plate is welded to said body.

22. A pressure transducer assembly comprising:

(A) a metallic body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a metallic member fixed to at least a portion of said metallic body in said first chamber;

(D) an insulator disposed in said first chamber, said insulator being fixed to said metallic member;

(E) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.

23. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a conductor disposed in one of said first and second chambers, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers;

(D) a resilient element disposed in said one chamber, said resilient element providing a force that biases said conductor away from said diaphragm.

24. An assembly according to claim 23, further including an insulator, said conductor being disposed on said insulator.

25. An assembly according to claim 24, said resilient element contacting a portion of said body and a portion of said insulator.

26. An assembly according to claim 23, said body comprising a sidewall and a cover, a lower portion of said sidewall being fixed to a portion of said diaphragm, a portion of said cover being fixed to an upper portion of said sidewall, said sidewall, said cover, and said diaphragm defining said first chamber.

27. An assembly according to claim 26, further including an insulator, said conductor being disposed on said insulator.

28. An assembly according to claim 27, said resilient element biasing said insulator away from said diaphragm towards said cover.

29. An assembly according to claim 28, a portion of said resilient element contacting said sidewall.

30. An assembly according to claim 28, further including a fastener, said fastener holding a portion of said resilient element in contact with said cover.

31. An assembly according to claim 28, said cover rigidly preventing said insulator from moving in a direction away from said diaphragm.

32. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a metallic plate fixed to said body in said first chamber;

(D) an insulator disposed in said first chamber, said insulator being fixed to said plate;

(E) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.

33. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a plate welded to said body in said first chamber;

(D) an insulator disposed in said first chamber, said insulator being fixed to said plate;

(E) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.

34. A pressure transducer assembly comprising:

(A) a body defining an interior cavity;

(B) a diaphragm mounted in said body and dividing said interior cavity into a first chamber and a second chamber, a portion of said diaphragm flexing in a first direction in response to a pressure in said first chamber being higher than a pressure in said second chamber, said portion of said diaphragm flexing in a second direction opposite said first direction in response to said pressure in said second chamber being higher than said pressure in said first chamber;

(C) a plate fixed to said body in said first chamber, said plate comprising a first material;

(D) an insulator disposed in said first chamber, said insulator being fixed to said plate, said insulator comprising a second material different from said first material;

(E) a conductor disposed on said insulator, said conductor and said diaphragm being characterized by a capacitance, said capacitance being representative of a difference between said pressures in said first and second chambers.