Apparatus and method for operating an ISFET at multiple drain currents and gate-source voltages allowing for diagnostics and control of isopotential points

• US 5,911,873 A
• Filed: 05/02/1997
• Issued: 06/15/1999
• Est. Priority Date: 05/02/1997
• Status: Expired due to Fees

• Current Assignee: Rosemount Analytical, Inc. (Emerson Electric Company)
• Original Assignee: Rosemount Analytical, Inc. (Emerson Electric Company)
• Inventors: Gray, James R., McCarron, Robert Tanner
• Primary Examiner(s): TUNG, TA HSUNG
• Application Number:
  US08/850,602
• Time in Patent Office: 774 Days
• Field of Search: 204/401, 204/416, 204/418, 204/419, 204/408, 205/789, 205/789.5, 205/787.5, 257/253
• US Class Current: 205/789
• CPC Class Codes: G01N 27/4148 Integrated circuits therefor, e.g. fabricated by CMOS processing CMOS processing per se H01L21/82

Abstract

An apparatus for measuring ion concentration of a solution includes an ion sensitive field effect transistor (ISFET), a reference device, an ISFET control circuit, a memory, a measurement circuit and a diagnostic circuit. The ISFET has a drain, a source, an ion sensitive gate region and a plurality of device characteristics. The reference device is separated from the gate region by a sample solution. The ISFET control circuit is coupled to the ISFET and operates the ISFET at a drain-source voltage V_DS and at n successive drain currents I_Di and corresponding gate-source voltages V_GSi, wherein i is an integer from 1 to n and n is an integer greater than 1. The memory stores the plurality of device characteristics and the n successive drain currents I_Di and gate-source voltages V_GSi. The measurement circuit measures ion concentration of the solution as a function of at least one of the n successive drain currents I_Di and gate-source voltages V_GSi and the plurality of device characteristics stored in the memory. The diagnostic circuit measures at least one of the device characteristics of the ISFET as a function of the n successive drain currents I_Di and gate-source voltages V_GSi.

Claims

1. An apparatus for measuring ion concentration of a solution, comprising;

an ion sensitive field effect transistor (ISFET) having a drain, a source, an ion sensitive gate region and a plurality of device characteristics;

a reference device separated from the gate region;

an ISFET control circuit coupled to the ISFET which operates the ISFET at a drain-source voltage V_DS and at n successive drain currents I_Di and corresponding gate-source voltages V_GSi such that the ISFET has an isopotential ion concentration point which is different for each of the n successive drain currents I_Di and corresponding gate-source voltages V_GSi, wherein i is an integer variable from 1 to n and n is an integer greater than 1;

a memory which stores the plurality of device characteristics and the n successive drain currents I_Di and gate-source voltages V_GSi ;

measurement means for measuring ion concentration of the solution as a function of at least one of the n successive drain currents I_Di and gate-source voltages V_GSi and the plurality of device characteristics stored in the memory; and

diagnostic means for measuring at least one of the device characteristics of the ISFET as a function of the n successive drain currents I_Di and gate-source voltages V_GSi.

2. The apparatus of claim 1 wherein the diagnostic means calculates a difference between the measured device characteristic and the corresponding device characteristic that is stored in the memory and replaces the corresponding stored device characteristic with the measured device characteristic if the difference exceeds a first threshold value.

3. The apparatus of claim 2 wherein the diagnostic means generates an alarm output if the difference exceeds a second threshold value, which is greater than the first threshold value.

4. The apparatus of claim 1 wherein the diagnostic means stores a history of the measured device characteristic over time within the memory and provides a diagnostic output in response to the stored history.

5. The apparatus of claim 1 wherein the measurement means makes n successive ion concentration measurements of the solution as a function of the stored device characteristics and the n successive drain currents I_Di and gate-source voltages V_Gsi, and provides an ion concentration output based on an average of the n successive ion concentration measurements.

6. The apparatus of claim 1 wherein;

the gate-source voltage V_GSi of the ISFET varies with the drain current I_Di according to the relation;

space="preserve" listing-type="equation">V.sub.GSi =A+ε

I.sub.Di.sup.1/2 -(B-HI.sub.Di)T+CkTpH

where T is the temperature of the solution, C is the efficiency of the ion sensitive gate region, k is the slope of the ISFET, pH is the pH of the solution, and A, ε

, B, H are constants which form the plurality of device characteristics of the ISFET.

7. The apparatus of claim 6 wherein the diagnostic means detects a change in one of ε

and H based on the relation;

space="preserve" listing-type="equation">V.sub.GS2 -V.sub.GS1 =HT(I.sub.D2 -I.sub.D1)+ε

(I.sub.D2 -I.sub.D1.sup.1/2).

8. The apparatus of claim 6 wherein the ISFET control circuit operates the ISFET at at least four successive drain currents I_Di and gate-source voltages V_GSi and wherein the diagnostic means calculates e and H as a function of at least the four successive drain currents I_Di and gate-source voltages V_GSi.

9. The apparatus of claim 1 wherein:

the ISFET has an isopotential pH;

the measurement means measures a pH of the solution and comprises means for calculating a target drain current of the ISFET that sets the isopotential pH at the pH of the solution; and

the ISFET control circuit comprises means for operating the ISFET at the target drain current.

10. The apparatus of claim 9 wherein the means for calculating calculates the target drain current as a function of the stored device characteristics.

11. The apparatus of claim 9 wherein the solution changes from a first temperature to a second temperature over time and wherein the apparatus further comprises:

a temperature sensor thermally coupled to the solution and having an output representative of the temperature of the solution;

wherein the measurement means comprises means coupled to the output of the temperature sensor for measuring the first and second temperatures;

wherein the ISFET control circuit operates the ISFET at a first gate-source voltage V_GS1 and a first drain current I_D1 at the first temperature, and operates the ISFET at a second gate-source voltage V_GS2 and a second drain current I_D2 at the second temperature; and

wherein the means for calculating calculates the target drain current as a function of V_GS1, I_D1, V_GS2, I_D2 and the first and second temperatures.

12. The apparatus of claim 1 wherein:

the ISFET control circuit comprises;

means for applying the drain-source voltage V_DS across the drain and source;

means for applying the n successive drain currents I_Di through the drain sequentially as predetermined, substantially constant currents;

means for applying the n successive gate-source voltages V_GSi across the reference device and the source as a function of the corresponding n successive drain currents I_Di ; and

means for measuring the n successive gate-source voltages V_GSi at the n successive drain currents I_Di.

13. The apparatus of claim 1 wherein:

the ISFET control circuit comprises;

means for applying the drain-source voltage V_DS across the drain and source;

means for applying the n successive gate-source voltages V_GSi across the reference device and the source sequentially as predetermined, substantially constant voltages; and

means for measuring the n successive drain currents I_Di at the n successive gate-source voltages V_GSi.

14. The apparatus of claim 1 and further comprising a temperature sensor electrically coupled to the measurement means, which measures an absolute temperature T of the solution and wherein:

n is at least three;

the ISFET has a minimum gate-source threshold voltage V_T and a current dependence, H, of the change in the gate-source voltage V_GSi with the absolute temperature T of the ISFET; and

the diagnostic means comprises means for calculating H and ε

of the ISFET and the minimum gate-source threshold voltage V_T of the ISFET during operation of the ISFET based on a second order regression of the relation;

##EQU30## where ε

is a constant.

15. An apparatus for measuring ion concentration of a solution, comprising:

an ion sensitive field effect transistor (ISFET) having a drain, a source and an ion sensitive gate region;

a reference device separated from the gate region;

an ISFET control circuit coupled to the ISFET for applying a drain-source voltage V_DS across the drain and source and for operating the ISFET at n successive drain currents I_Di and corresponding gate-source voltages V_GSi, wherein i is an integer variable from 1 to n and n is an integer greater than 1, wherein the drain currents flow through the drain of the ISFET and the gate-source voltages are referenced between the reference device and the source, and wherein the ISFET has an iso potential ion concentration point which is different for each of the n successive drain currents I_Di and corresponding gate-source voltages V_GSi ;

a memory which stores the n successive drain currents I_Di and gate-source voltages V_GSi ; and

measurement means for making n successive ion concentration measurements of the solution as a function the n successive drain currents I_Di and gate-source voltages V_GSi and for providing an ion concentration output based on an average of the n successive ion concentration measurements.

16. A method of measuring ion concentration of a solution with an apparatus comprising a reference device and an ion sensitive field effect transistor (ISFET) having a drain, a source, an ion sensitive gate region and a plurality of device characteristics, wherein the ion sensitive gate region and the reference device are exposed to and separated by the solution, the method comprising:

applying a drain-source voltage V_DS across the drain and source;

operating the ISFET at n successive drain currents I_Di and corresponding gate-source voltages V_GSi such that the ISFET has an isopotential ion concentration point which is different for each of the n successive drain currents I_Di and corresponding gate-source voltages V_GSi, wherein i is an integer variable from 1 to n and n is an integer greater than 1, and wherein the drain currents flow through the drain of the ISFET and the gate-source voltages are referenced between the reference device and the source;

storing the plurality of device characteristics and the n successive drain currents I_Di and gate-source voltages V_GSi ;

measuring ion concentration of the solution as a function of at least one of the n successive drain currents I_Di and gate-source voltages V_GSi and the stored device characteristics; and

measuring at least one of the device characteristics of the ISFET as a function of the n successive drain currents I_Di and gate-source voltages V_GSi.

17. The method of claim 16 and further comprising:

calculating a difference between the measured device characteristic and the corresponding stored device characteristic; and

replacing the corresponding stored device characteristic with the measured device characteristic if the difference exceeds a first threshold value.

18. The method of claim 17 and further comprising generating an alarm output if the difference exceeds a second threshold value, which is greater than the first threshold value.

19. The method of claim 16 and further comprising:

storing a history of the measured device characteristic over time; and

providing a diagnostic output in response to the stored history.

20. The method of claim 16 and further comprising:

making n successive ion concentration measurements as a function of the stored device characteristics and the n successive drain currents I_Di and gate-source voltages V_GSi ; and

providing an ion concentration output based on an average of the n successive ion concentration measurements.