Process flow design at the module effects level through the use of acceptability regions

• US 5,912,678 A
• Filed: 04/14/1997
• Issued: 06/15/1999
• Est. Priority Date: 04/14/1997
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Saxena, Sharad, Unruh, Amy J., Mozumder, Purnendu K., Burch, Richard G.
• Primary Examiner(s): DeCady, Albert
• Assistant Examiner(s): ABRAHAM, ESAW T
• Application Number:
  US08/839,522
• Time in Patent Office: 792 Days
• Field of Search: 364/468.03, 364/468.01, 364/468.02, 364/468.28, 364/140.01
• US Class Current: 700/103
• CPC Class Codes: G05B 19/41885 characterised by modeling, simulation of the manufacturing system
• CPC Class Codes: G05B 2219/31417 Calculate capacity by back propagating capacity, constraint from last to first module
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Methods and processes to reduce the cost and cycle time of designing manufacturing flows are described, particularly for microelectronic integrated circuit processes. One embodiment of the present invention is a method which divides the task of designing process flows into a number of abstraction levels and provides mechanisms to translate between these levels of abstraction. The process is divided into a number of modules each having process constraints. Process constraints are propagated backwards from the final module to the first module, and may also be propagated forward from earlier modules to later modules of needed. This approach results in a top-down design methodology where requirements from higher levels of abstraction are successively reduced to lower abstraction levels, while meeting the constraints imposed by the lower levels.

Claims

1. A method for designing a manufacturing process flow for a manufacturable device comprising the steps of:

a. partitioning of said manufacturing process flow into a number of abstraction levels having at least a device performance level for describing device performance specifications, a device designables level having device state specifications for describing features of a device that can be modified to obtain the desired performance, and a module effects level;

b. translating device performance specifications from the device performance level to device state specifications at the device designables level;

c. translating between the device designables level and the module effects level by a sequence comprising the steps of;

i. identifying sequences of processes that can be grouped together to form at least two modules where each module of processes has outgoing device states and incoming device states, and where at least two modules is a sequence of modules which has at least a first module and a final module;

ii. describing module models for each module as acceptability regions of constraints at the module effects level of abstraction which specify the set of said outgoing device states possible for said incoming device states; and

iii. propagating constraints of said final module backwards toward said first module by intersecigng said final module constraints with successively earlier module constraints in said sequence of modules.

2. The method according to claim 1, further comprising the step of propagating constraints of said first module forward said last module by intersecting said first module constraints with successively later module constraints in said sequence of modules.

3. The method according to claim 1, wherein said acceptability regions are represented by a grid in a multi-dimensional space having a value in a box or intersection for each space in said grid.

4. The method according to claim 1, wherein said acceptability regions are represented hierarchically.

5. The method according to claim 1, wherein said device is a semiconductor microelectronic device.

6. A method for designing a semiconductor manufacturing process flow for a manufacturable device comprising the steps of:

a. partitioning of said semiconductor manufacturing process flow into a number of abstraction levels having at least a device performance level for describing device performance specifications, a device designables level having device state specifications for describing features of a device that can be modified to obtain the desired performance, and a module effects level;

b. translating device performance specifications from the device performance level to device state specifications at the device designables level;

c. translating between said device designables level and said module effects level by a sequence comprising the steps of;

i. identifying sequences of processes that can be grouped together to form at least two modules where each module of processes has outgoing wafer states and incoming wafer states, and where at least two modules is a sequence of modules which has at least a first module and a final module;

ii. describing module models for each module as acceptability regions of constraints at the module effects level of abstraction which specify the set of said outgoing wafer states possible for said incoming wafer states; and

iii. propagating constraints of said final module backwards toward said first module by intersecting said final module constraints with successively earlier module constraints in said sequence of modules.

7. The method according to claim 6, further comprising the step of propagating constraints of said first module forward toward said last module by intersecting said first module constraints with successively later module constraints in said sequence of modules.

8. The method according to claim 6, wherein said acceptability regions are represented by a grid in a multi-dimensional space having a value in a box or intersection for each space in said grid.

9. The method according to claim 6, wherein said acceptability regions are represented hierarchically.

10. A computer system for designing a semiconductor manufacturing process flow for a semiconductor device comprising the steps of:

a. means for partitioning of said semiconductor manufacturing process flow into a number of abstraction levels having at least a device performance level for describing device performance specifications, a device designables level having device state specifications for describing features of a device that can be modified to obtain the desired performance, and a module effects level;

b. means for translating device performance specifications from the device performance level to device state specifications at the device designables level, while allowing the user to select specific device performance constraints in said device performance level;

c. means for translating between said device designables level and said module effects level by a sequence comprising the steps of;

i. identifying sequences of processes that can be grouped together to form at least two modules where each module of processes has outgoing wafer states and incoming wafer states, and where at least two modules is a sequence of modules which has at least a first module and a final module;

ii. describing module models for each module as acceptability regions of constraints at the module effects level of abstraction which specify the set of said outgoing wafer states possible for said incoming wafer states; and

iii. propagating constraints of said final module backwards toward said first module by intersecting said final module constraints with successively earlier module constraints in said sequence of modules.

11. The computer system of claim 10, further comprising means for propagating constraints of said first module forward toward said last module by intersecting said first module constraints with successively later module constraints in said sequence of modules.

12. the computer system of claim 10, wherein said acceptability regions are represented by a grid in a multi-dimensional space having a value in a box or intersection for each space in said grid.

13. The computer system of claim 10, wherein said acceptability regions are represented hierarchically.