Multistable tunable micromechanical resonators

• US 5,914,553 A
• Filed: 08/21/1997
• Issued: 06/22/1999
• Est. Priority Date: 06/16/1997
• Status: Expired due to Term

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Wang, Yongmei Cindy, Macdonald, Noel C., Adams, Scott G., Thorp, James S.
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US08/915,648
• Time in Patent Office: 670 Days
• Field of Search: 310/309, 333/186, 333/191, 333/197, 361/283.1, 361/287, 361/278
• US Class Current: 310/309
• CPC Class Codes: G01P 1/006 used for thermal compensation
• CPC Class Codes: G01P 15/0891 with indication of predetermined acceleration values G01P15/135 takes precedence
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H03H 9/02409 by application of a DC-bias voltage H03H9/02417 takes precedence
• CPC Class Codes: H03H 9/02448 of temperature influence

Abstract

A multistable tunable electromicromechanical resonator structure incorporates electrostatic actuators which permit modification of the resonant frequency of the structure. The actuators consist of sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base or substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure and shifts the structure to a bistable state. Application of an alternating drive signal drives the structure to chaotic oscillation.

Claims

1. A multistable electromicromechanical resonator, comprising:

a substrate;

a micromechanical beam structure having micron-scale dimensions movable with respect to said substrate along an axis;

spring arms connected between said beam and said substrate, said spring arms and movable beam having a rest position and having a natural resonant frequency;

first and second electrostatic actuators, each actuator having a first set of finger electrodes mounted on said beam for motion with the beam, and each actuator having a second set of finger electrodes fixedly mounted on said substrate, said first and second sets of finger electrodes of each actuator being opposed and non-overlapping to provide a gap therebetween;

a bias voltage connected across each set of electrodes to shift said movable beam from said rest position to one of two stable positions to produce a bistable resonator; and

a drive signal connected across selected electrodes to produce oscillation of said beam at said one stable position.

2. The resonator of claim 1, wherein said gap is parallel to said axis.

3. The resonator of claim 1, wherein said gap is perpendicular to said axis.

4. The resonator of claim 1, wherein the electrodes of said first set of finger electrodes for each actuator are aligned with corresponding electrodes of the second set of finger electrodes.

5. The resonator of claim 1, wherein the electrodes of said first set of finger electrodes for each actuator are offset from corresponding electrodes of the second set of finger electrodes.

6. The resonator of claim 1, wherein said first and second actuators are coplanar and symmetrical, whereby said actuators provide no net force on said beam in the rest position.

7. The resonator of claim 6, wherein said drive voltage is selected to cause said beam to oscillate at a frequency at or near said natural frequency.

8. The resonator of claim 6, wherein said drive voltage is selected to cause said beam to oscillate at a period which is double the period of said natural frequency.

9. The resonator of claim 6, wherein said drive signal is selected to cause said beam to oscillate chaotically over a broad band of frequencies.

10. The resonator of claim 9, further including a sensor responsive to motion of said beam to produce a chaotic output signal corresponding to chaotic oscillation of said beam, said output signal encrypting said drive signal in said chaotic output signal.

11. The resonator of claim 10, further including a second micromechanical resonator substantially identical said first-named resonator and adapted to receive as its drive signal the first-named resonator output signal for decryption of the first-named drive signal.

12. A microelectromechanical resonator system for secure communication, comprising:

a first and a second microelectromechanical spring mass, each mounted for motion with respect to a corresponding fixed support and having a rest position and a natural resonant frequency;

a plurality of electrostatic actuators connected between each fixed support and its corresponding spring mass;

bias voltages connected to said actuators to shift each spring mass to a bistable state;

a drive signal containing information to be communicated connected to drive said first spring mass to chaotic oscillation;

a sensor responsive to the oscillation of said first spring mass to produce a chaotic output signal incorporating said drive signal;

means for transmitting said chaotic output signal to drive said second spring mass to chaotic oscillation; and

means for deriving from said chaotic oscillation of said second spring mass an output corresponding to said drive signal.

13. The system of claim 12, wherein said first and second microelectromechanical spring masses and said corresponding actuators for each are substantially identical.

14. The system of claim 13, wherein said drive signal contains binary information.

15. The system of claim 13, wherein said drive signal contains analog information.