Microelectromechanical devices including rotating plates and related methods
First Claim
1. An electromechanical device comprising:
- a first frame having a first aperture therein;
a second frame suspended in said first aperture, said second frame having a second aperture therein;
a plate suspended in said second aperture;
a first pair of beams which support said second frame along a first axis relative to said first frame so that said second frame rotates about said first axis relative to said first frame and a second pair of beams which support said plate along a second axis relative to said second frame so that said plate rotates about said second axis relative to said second frame wherein said first axis and said second axis intersect, wherein at least one end of at least one of said beams comprises a rotational contact that minimizes torsional forces in said beam;
a first actuator which provides mechanical force for rotating said second frame relative to said first frame about said first axis; and
a second actuator which provides mechanical force for rotating said plate relative to said second frame about said second axis so that said plate can be independently rotated relative to said first axis and said second axis.
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Accused Products
Abstract
An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
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Citations
63 Claims
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1. An electromechanical device comprising:
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a first frame having a first aperture therein; a second frame suspended in said first aperture, said second frame having a second aperture therein; a plate suspended in said second aperture; a first pair of beams which support said second frame along a first axis relative to said first frame so that said second frame rotates about said first axis relative to said first frame and a second pair of beams which support said plate along a second axis relative to said second frame so that said plate rotates about said second axis relative to said second frame wherein said first axis and said second axis intersect, wherein at least one end of at least one of said beams comprises a rotational contact that minimizes torsional forces in said beam; a first actuator which provides mechanical force for rotating said second frame relative to said first frame about said first axis; and a second actuator which provides mechanical force for rotating said plate relative to said second frame about said second axis so that said plate can be independently rotated relative to said first axis and said second axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electromechanical device comprising:
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a frame having an aperture therein; a plate suspended in said aperture; a pair of beams on opposite sides of said plate which define an axis of rotation through said plate about which said plate rotates relative to said frame, wherein each of said beams extends from said plate to said frame and wherein a first end of one of said beams is fixedly connected to one of said plate and said frame and a second end of one of said beams is in rotational contact with the other of said plate and said frame and minimizes torsional forces in said beam so that said plate rotates relative to said frame. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. An electromechanical device comprising:
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a frame having an aperture therein; a plate suspended in said aperture; a structure which supports said plate along an axis relative to said frame so that said plate rotates about said axis relative to said frame; and an electrostatic actuator comprising an electrode spaced apart from said frame and an arm extending from said electrode to a portion of said plate off said axis wherein a potential difference between said electrode and said frame results in an electrostatic force which is transmitted via said arm to said plate thus rotating said plate relative to said frame. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A method for fabricating an electromechanical device on a substrate, said method comprising the steps of:
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defining a plate region on a face of said substrate; defining a frame region on said face of said substrate, wherein said frame region surrounds said plate region and wherein said plate region and said frame region are separated by a sacrificial substrate region; forming a structure which supports said plate region and provides rotational connections with minimized torsional forces between said plate region and said frame region, allowing rotation of said plate region along an axis relative to said frame region; forming an actuator on said face of said substrate which provides mechanical force to said plate region; and removing said sacrificial substrate region so that said plate region rotates about said axis relative to said frame region responsive to mechanical force provided by said actuator. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A method for fabricating an electromechanical device, said method comprising the steps of:
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forming a frame having an aperture therein; forming a plate suspended in said aperture; forming a pair of beams on opposite sides of said plate which define an axis of rotation through said plate about which said plate rotates relative to said frame, wherein each of said beams extends from said plate to said frame and wherein a first end of each of said beams is fixedly connected to one of said plate and said frame and a second end of each of said beams is in rotational contact with the other of said plate and said frame so that said plate rotates relative to said frame; and forming an actuator which provides mechanical force for rotating said plate relative to said frame about said axis. - View Dependent Claims (50, 51, 52, 53, 54, 55)
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56. A method for fabricating a microelectromechanical device, said method comprising the steps of:
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forming a frame having an aperture therein; forming a plate suspended in said aperture; forming a structure which supports said plate along an axis relative to said frame so that said plate rotates about said axis relative to said frame; and forming an electrostatic actuator comprising an electrode spaced apart from said frame and an arm extending from said electrode to a portion of said plate off said axis wherein a potential difference between said electrode and said frame results in an electrostatic force which is transmitted via said arm to said plate thus rotating said plate relative to said frame. - View Dependent Claims (57, 58, 59, 60, 61, 62, 63)
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Specification