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Silicon force and displacement sensor

  • US 5,915,281 A
  • Filed: 10/03/1997
  • Issued: 06/22/1999
  • Est. Priority Date: 10/03/1997
  • Status: Expired due to Term
First Claim
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1. A force sensor assembly comprising:

  • a diaphragm;

    a silicon sensing element operatively associated with the diaphragm to sense deflection of the diaphragm;

    a base supporting the diaphragm so that the base and the diaphragm define a recess;

    a pliable force-distributing member within the recess and contacting the diaphragm, the force-distributing member having a portion projecting from the recess;

    a flexible member contacting the force-distributing member; and

    a fluid contacting the flexible member, whereby changes in pressure of the fluid cause the flexible member to flex and thereby transmit a force to the diaphragm through the force-distributing member.

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