Silicon force and displacement sensor
First Claim
1. A force sensor assembly comprising:
- a diaphragm;
a silicon sensing element operatively associated with the diaphragm to sense deflection of the diaphragm;
a base supporting the diaphragm so that the base and the diaphragm define a recess;
a pliable force-distributing member within the recess and contacting the diaphragm, the force-distributing member having a portion projecting from the recess;
a flexible member contacting the force-distributing member; and
a fluid contacting the flexible member, whereby changes in pressure of the fluid cause the flexible member to flex and thereby transmit a force to the diaphragm through the force-distributing member.
6 Assignments
0 Petitions
Accused Products
Abstract
A silicon sensing cell (12) capable of sensing force and/or displacement, and particular embodiments of the sensing cell (12) for particular force and/or displacement-sensing applications. The sensing cell (12) generally includes a diaphragm (18), a silicon sensing element (28) operatively associated with the diaphragm (18) to sense strain or deflection of the diaphragm (18), a base (14) supporting the diaphragm (18) so that the base (14) and the diaphragm (18) define a recess (22), and a force-distributing member (20) within the recess (22) and contacting the diaphragm (18). The diaphragm (18) is preferably single-crystal silicon, and the sensing element (28) can be a piezoresistive, piezoelectric or capacitive element preferably formed in the diaphragm (18) using semiconductor fabrication processes. With appropriate adaptations, the sensing cell (12) can be made suitable for automotive applications such as seat occupancy sensing, brake-by-wire and acceleration-by-wire pedal systems, and media-compatible high-pressure sensing in brake, oil and transmission fluid applications.
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Citations
29 Claims
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1. A force sensor assembly comprising:
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a diaphragm; a silicon sensing element operatively associated with the diaphragm to sense deflection of the diaphragm; a base supporting the diaphragm so that the base and the diaphragm define a recess; a pliable force-distributing member within the recess and contacting the diaphragm, the force-distributing member having a portion projecting from the recess; a flexible member contacting the force-distributing member; and a fluid contacting the flexible member, whereby changes in pressure of the fluid cause the flexible member to flex and thereby transmit a force to the diaphragm through the force-distributing member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A force sensor assembly comprising:
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a diaphragm; a silicon sensing element operatively associated with the diaphragm to sense deflection of the diaphragm; a base supporting the diaphragm so that the base and the diaphragm define a recess; a pliable force-distributing member within the recess and contacting the diaphragm; and a member attached to the force-distributing member, whereby movement of the member toward and away from the force-distributing member transmits a force to the diaphragm through the force-distributing member, such that force sensing with the silicon sensing element is bidirectional. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A force sensor assembly comprising:
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a diaphragm; a silicon sensing element operatively associated with the diaphragm to sense deflection of the diaphragm; a base supporting the diaphragm so that the base and the diaphragm define a recess; a rigid force-distributing member within the recess and contacting the diaphragm; a flexible member contacting the force-distributing member and the base, whereby a force applied to the flexible member is transmitted to the diaphragm through the force-distributing member. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification