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Method and apparatus for local temperature sensing for use in performing high resolution in-situ parameter measurements

  • US 5,915,838 A
  • Filed: 05/19/1998
  • Issued: 06/29/1999
  • Est. Priority Date: 03/24/1995
  • Status: Expired due to Term
First Claim
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1. An apparatus for determining an aging parameter of a sample or component, said apparatus comprising:

  • an oven in which the sample or component is placed, the oven being provided with a heater;

    a temperature sensor inside the oven for sensing the temperature near the sample or component;

    a measuring device for measuring a value of said temperature using said temperature sensor and for measuring a value of said parameter; and

    a trigger for triggering said measuring device so as to measure both said value of said temperature and said value of said parameter, thereby obtaining said value of said temperature and said value of said parameter at substantially the same time.

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