Method and apparatus for local temperature sensing for use in performing high resolution in-situ parameter measurements
First Claim
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1. An apparatus for determining an aging parameter of a sample or component, said apparatus comprising:
- an oven in which the sample or component is placed, the oven being provided with a heater;
a temperature sensor inside the oven for sensing the temperature near the sample or component;
a measuring device for measuring a value of said temperature using said temperature sensor and for measuring a value of said parameter; and
a trigger for triggering said measuring device so as to measure both said value of said temperature and said value of said parameter, thereby obtaining said value of said temperature and said value of said parameter at substantially the same time.
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Abstract
An apparatus and method for measuring a parameter of a sample or component at a measurement temperature, wherein the parameter and the measurement temperature are measured at substantially the same time. A temperature coefficient of the sample or component is also established by using temperature fluctuations measured at or near the sample at the time at which the parameter is measured. The temperature coefficient is used to correct the measured parameter data and enhance its stability.
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8 Claims
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1. An apparatus for determining an aging parameter of a sample or component, said apparatus comprising:
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an oven in which the sample or component is placed, the oven being provided with a heater; a temperature sensor inside the oven for sensing the temperature near the sample or component; a measuring device for measuring a value of said temperature using said temperature sensor and for measuring a value of said parameter; and a trigger for triggering said measuring device so as to measure both said value of said temperature and said value of said parameter, thereby obtaining said value of said temperature and said value of said parameter at substantially the same time. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification