Profile measuring apparatus

• US 5,917,181 A
• Filed: 04/01/1997
• Issued: 06/29/1999
• Est. Priority Date: 04/05/1996
• Status: Expired due to Fees

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Marsushita Electric Works Limited
• Inventors: Uchimura, Kiyokazu, Kusumoto, Shoji, Yoshizumi, Keiichi, Kubo, Keishi, Kanashima, Keinosuke
• Primary Examiner(s): Westin, Edward P.
• Assistant Examiner(s): Luu, Thanh X.
• Application Number:
  US08/831,080
• Time in Patent Office: 819 Days
• Field of Search: 250/230, 250/559.22, 250/559.19, 356/376, 33/561, 33/556
• US Class Current: 250/230
• CPC Class Codes: G01B 11/007 feeler heads therefor
• CPC Class Codes: G01B 5/012 Contact-making feeler heads therefor

Abstract

A profile measuring apparatus provided with an improved probe for measuring profiles throughout a wide area of the surface of an object with a high level of response and high accuracy. The probe 10 comprises an arm 3 having a stylus 1 fixedly mounted to the distal end thereof, which is coupled to a stationary part 11 of the apparatus by an arm holding member 5 made of a V-shaped leaf spring in such a way that the arm 3 is tilted in one axial direction by a contact pressure exerted thereto during measurement. Displacement of the arm 3 is thereby detected through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus 1 being pressed against the surface to be measured.

Claims

1. A profile measuring apparatus having a probe comprising:

an arm having a stylus fixedly mounted to a distal end thereof;

an arm holding member made of a leaf spring which extends vertically such as to allow itself to deform elastically in a direction orthogonal to the vertical direction for coupling a portion close to a proximal end of the arm to a stationary part of the apparatus such as to permit the arm to be tilted in only one direction orthogonal to the vertical direction by a contact pressure during measurement; and

a detector for detecting displacement of the arm through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus being pressed against the surface of an object to be measured.

2. A profile measuring apparatus according to claim 1, wherein the detector comprises a mirror fixedly mounted to the proximal end of the arm, a light projector located stationarily on a side of a reflecting surface of the mirror, and a light position detector for detecting a position of a reflected light by receiving a light emitted from the light projector and reflected on the mirror.

3. A profile measuring apparatus according to claim 2, wherein the arm holding member has substantially a V shape and is linked at two upper ends of the V shape to the stationary part of the apparatus and fixedly mounted at a lower end of the V shape to the portion close to the proximal end of the arm.

4. A profile measuring apparatus according to claim 3, wherein the leaf spring is fixed to a rod which is supported by resilient retaining strips at the stationary part of the apparatus in such a way that the rod is retained by a frictional force and remains stationary under a normal rate of the contact pressure, while the rod rotates when an excessive rate of the contact pressure is exerted to the arm.

5. A profile measuring apparatus according to claim 4, wherein the retaining strips let the rod slip out of engagement with the retaining strips to release the arm when the stylus receives an excessive rate of force.

6. A profile measuring apparatus according to claim 5, further comprising a moving table for moving either the probe or a surface of the object being measured in a direction to vary the distance between the probe and the surface of the object, and a scale for measuring a range of movement of the moving table, in which coordinates of a target point on the surface of the object are calculated by summing measurement results of the scale and an amount of displacement of the stylus caused by the contact pressure during the measurement.

7. A profile measuring apparatus according to claim 6, further comprising a controller for feeding back a signal output of the light position detector to a driving means of the moving table in order to keep the displacement of the stylus caused by the pressure during measurement constant, and a moving table for moving either the probe or a surface of the object being measured in a direction which is substantially vertical to the direction for varying the distance between the probe and the surface of the object, so that the stylus scans the surface of the object for measurement under a constant rate of the contact pressure.

8. A profile measuring apparatus according to claim 7, wherein the moving table is arranged to move the probe in three directions X, Y, and Z, and includes a θ

stage for rotating the object being measured.

9. A profile measuring apparatus according to claim 8, wherein a plurality of the styluses are mounted to the distal end of the arm to face to various directions.

10. A profile measuring apparatus according to claim 6, wherein the moving table includes an X stage and a Y stage, in which:

a moving range of the X stage is scaled by reading an X coordinate from phase change in a reflected waveform of a laser beam with the use of a laser beam emitting means and a laser beam receiving means which are arranged to move relative to a mirror having reflecting surfaces in the Y and Z directions; and

a moving range of the Y stage is scaled by reading a Y coordinate from phase change in a reflected waveform of a laser beam with the use of a laser beam emitting means and a laser beam receiving means which are arranged to move relative to a mirror having reflecting surfaces in the X and Z directions.

11. A profile measuring apparatus according to claim 10, having at least two probes for detecting displacements in the X direction and in the Y or Z direction.

12. A profile measuring apparatus according to claim 1, wherein the detector for detecting displacement of the arm comprises:

a mirror fixed to a side face of the arm;

a light projector disposed above the mirror on a side of a reflecting surface of the mirror;

a light position detector for detecting a position of a reflected light by receiving a light emitted from the light projector and reflected by the mirror; and

a light path altering mirror for directing a light emitted from the light projector onto the mirror, as well as directing a reflected light thrown back by the mirror to the light position detector.

16. A profile measuring apparatus according to claim 1, wherein the detector comprises a mirror fixedly mounted to the proximal end of the arm, a light projector located stationarily on a side of a reflecting surface of the mirror, and a light position detector for detecting a position of a beam of light that is emitted from the light projector and reflected by the mirror, by which an inclination angle of the stylus is determined.

17. A profile measuring apparatus according to claim 1, wherein the arm holding member has substantially a bifurcated shape and is linked at two upper ends of the bifurcated shape to the stationary part of the apparatus and fixedly mounted at a lower end of the bifurcated shape to the portion close to the proximal end of the arm.

18. A profile measuring apparatus according to claim 1, wherein the detector for detecting displacement of the arm comprises a mirror fixed to a side face of the arm, a light projector disposed above the mirror on a side of a reflecting surface of the mirror, a light position detector for detecting a position of a beam of light that is emitted from the light projector and reflected by the mirror, by which an inclination angle of the stylus is determined, and a light path altering mirror for directing a light emitted from the light projector onto the mirror, as well as directing a reflected light reflected back by the mirror to the light position detector.

13. A profile measuring apparatus having a probe comprising:

an arm having a stylus fixedly mounted to a distal end thereof,

an arm holding member made of a leaf spring which couples a portion close to a proximal end of the arm to a stationary part of the apparatus in such a way that the arm is tilted in only one direction by a contact pressure during measurement; and

a detector for detecting displacement of the arm through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus while being pressed against the surface of an object to be measured, wherein the detector comprises a mirror fixedly mounted to the proximal end of the arm, a light projector located stationarily on a side of a reflecting surface of the mirror, and a light position detector for detecting a position of a beam of light that is emitted from the light projector and reflected by the mirror, by which an inclination angle of the stylus is determined.

14. A profile measuring apparatus according to claim 13, wherein the arm holding member has substantially a V-shape and is linked at two upper ends of the V shape to the stationary part of the apparatus and fixedly mounted at a lower end of the V-shape to the portion close to the proximal end of the arm.

15. A profile measuring apparatus according to claim 13, wherein the detector for detecting displacement of the arm comprises a mirror fixed to a side face of the arm, a light projector disposed above the mirror on a side of a reflecting surface of the mirror, a light position detector for detecting a position of a reflected light by receiving a light emitted from the light projector and reflected by the mirror, and a light path altering mirror for directing a light emitted from the light projector onto the mirror, as well as directing a reflected light reflected back by the mirror to the light position detector.

19. A profile measuring apparatus having a probe comprising:

a stylus;

an arm having the stylus fixedly mounted to a distal end thereof;

an arm holding member made of a leaf spring which couples a portion close to a proximal end of the arm to a stationary part of the apparatus in such a way that the arm is tilted in only one axial direction by a contact pressure during measurement, the arm holding member has substantially a V-shape and is linked at two upper ends of the V-shape to the stationary part of the apparatus and is fixedly mounted at a lower end of the V-shape to the portion close to the proximal end of the arm, wherein the leaf spring is fixed to a rod which is supported by resilient retaining strips at the stationary part of the apparatus so that the rod is retained by a frictional force and remains stationary under a normal rate of contact pressure, while the rod rotates when an excessive rate of contact pressure is exerted on the arm; and

a detector assembly for detecting displacement of the arm through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus being pressed against the surface of an object to be measured including a mirror fixedly mounted to the proximal end of the arm, a light projector located stationarily on a side of a reflecting surface of the mirror, and a light position detector for detecting a position of a reflected light by receiving a light emitted from the light projector and reflected on the mirror.

20. In a profile measuring apparatus, the improvement comprising:

a stylus for contacting an object to be measured;

an arm mounting the stylus at a distal end thereof;

a detector input member mounted on the arm; and

a leaf spring mounting the arm at a distal end thereof and fixedly attached at a proximal end to a support structure to define a pivot axis for the arm and stylus to rotate about during measurement, whereby excess pressure between the stylus and the measured object can be relieved by additional pivotal movement of the arm when the leaf spring deforms.

21. The invention of claim 20, wherein the detector input member is a mirror.

22. The invention of claim 20, wherein the support structure includes a second spring member to provide a release of excess pressure that would damage the leaf spring.