Integrated multi-layer test pads
First Claim
1. On a semiconductor wafer, a multi-layer test pad configured for electrically coupling with an integrated semiconductor device formed out of said semiconductor wafer, comprising:
- an underlying matrix of interconnected first pads, said first pads being configured for electrically coupling with said integrated semiconductor device;
an oxide layer disposed above said underlying matrix;
an overlying matrix of interconnected second pads disposed above said oxide layer, one of said first pads having a first surface area smaller than a second surface area of one of said second pads, said one of said first pads being disposed below and being completely overlapped by said one of said second pads; and
at least one conductive via electrically coupling said underlying matrix with said overlying matrix through said oxide layer.
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Accused Products
Abstract
A multi-layer test pad on a semiconductor wafer, which includes an underlying matrix of interconnected first pads, which are arranged in rows and columns. The multi-layer test pad includes an oxide layer disposed above the underlying matrix and in between the rows and columns. The multi-layer test pad further includes an overlying matrix of interconnected second pads disposed above the oxide layer. Each of the second pads completely overlaps at least nine of the first pads, including four oxide regions surrounding a center first pad of the nine of the first pads. The nine of the first pads are arranged as 3×3 block of the first pads.
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Citations
14 Claims
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1. On a semiconductor wafer, a multi-layer test pad configured for electrically coupling with an integrated semiconductor device formed out of said semiconductor wafer, comprising:
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an underlying matrix of interconnected first pads, said first pads being configured for electrically coupling with said integrated semiconductor device; an oxide layer disposed above said underlying matrix; an overlying matrix of interconnected second pads disposed above said oxide layer, one of said first pads having a first surface area smaller than a second surface area of one of said second pads, said one of said first pads being disposed below and being completely overlapped by said one of said second pads; and at least one conductive via electrically coupling said underlying matrix with said overlying matrix through said oxide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. On a semiconductor wafer, a multi-layer test pad, comprising:
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an underlying matrix of interconnected first pads, said first pads being arranged in rows and columns; an oxide layer disposed above said underlying matrix and in between said rows and columns; and an overlying matrix of interconnected second pads disposed above said oxide layer, each of said second pads completely overlaps at least nine of said first pads, including four oxide regions surrounding a center first pad of said nine of said first pads, said nine of said first pads being arranged as 3×
3 block of said first pads. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification