Method for manufacturing a combination of a pressure sensor and an electrochemical sensor
First Claim
1. A method for manufacturing a combination of a pressure sensor and an electrochemical sensor by integrating a micromechanical pressure sensor and an electrochemical sensor on a substrate, comprising the steps of:
- (a) forming a plurality of electrically conductive regions in a substrate;
(b) forming a basic structure for an electrochemical sensor on said substrate, said basic structure comprising at least one electrically insulating layer;
(c) covering said basic structure of said electrochemical sensor with a protective layer and leaving a first free region for a pressure sensor;
(d) depositing a sensor layer for said pressure sensor in said first free region and providing said sensor layer with etching openings;
(e) etching out a hollow space between said sensor layer and said substrate, steps (a) through (e) producing an intermediate structure having an outermost surface;
(f) depositing a planarization layer of a dielectric material over an entirety of said outermost surface of said intermediate structure;
(g) providing regions for electrical connection to said intermediate structure and producing electrically conductive connections to said regions for electrical connection;
(h) outwardly exposing said sensor layer of said pressure sensor;
(i) etching a second free region for said electrochemical sensor and depositing and structuring at least one noble metal electrode in said second free region;
(j) depositing an additional protective, layer over said noble metal electrode; and
(k) depositing and structuring a plurality of additional layers for said electrochemical sensor.
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Accused Products
Abstract
In a method for manufacturing a combination of a pressure sensor and an electrochemical sensor, a basic structure for an ISFET is manufactured on a substrate made of silicon. After depositing a nitride layer as a pH-sensitive layer, the region of the ISFET is covered with a protective layer. In a region provided for a pressure sensor, a structured layer of polysilicon, provided as a membrane, is manufactured above a hollow space. Additional method steps for manufacturing electrical terminals of the sensors and, if required, additional integrated components, and for manufacturing printed conductor planes, are carried out in the context of a CMOS process. IMOX layers in the region of the gas sensor are wet-chemically removed down to the nitride layer. A platinum contact and an additional protective layer made of a PECVD oxide and a PECVD nitride are deposited. Additional layer structures for the gas sensor are manufactured. The pressure sensor is etched free either before the gas sensor is etched free, or after the deposition of the additional protective layer.
94 Citations
22 Claims
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1. A method for manufacturing a combination of a pressure sensor and an electrochemical sensor by integrating a micromechanical pressure sensor and an electrochemical sensor on a substrate, comprising the steps of:
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(a) forming a plurality of electrically conductive regions in a substrate; (b) forming a basic structure for an electrochemical sensor on said substrate, said basic structure comprising at least one electrically insulating layer; (c) covering said basic structure of said electrochemical sensor with a protective layer and leaving a first free region for a pressure sensor; (d) depositing a sensor layer for said pressure sensor in said first free region and providing said sensor layer with etching openings; (e) etching out a hollow space between said sensor layer and said substrate, steps (a) through (e) producing an intermediate structure having an outermost surface; (f) depositing a planarization layer of a dielectric material over an entirety of said outermost surface of said intermediate structure; (g) providing regions for electrical connection to said intermediate structure and producing electrically conductive connections to said regions for electrical connection; (h) outwardly exposing said sensor layer of said pressure sensor; (i) etching a second free region for said electrochemical sensor and depositing and structuring at least one noble metal electrode in said second free region; (j) depositing an additional protective, layer over said noble metal electrode; and (k) depositing and structuring a plurality of additional layers for said electrochemical sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for manufacturing a combination of a pressure sensor and an electrochemical sensor by integrating a micromechanical pressure sensor and an electrochemical sensor on a substrate, comprising the steps of:
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(a) forming a plurality of electrically conductive regions in a substrate; (b) forming a basic structure for an electrochemical sensor on said substrate, said basic structure comprising at least one electrically insulating layer; (c) covering said basic structure of said electrochemical sensor with a protective layer and leaving a first free region for a pressure sensor; (d) depositing a sensor layer for said pressure sensor in said first free region and providing said sensor layer with etching openings; (e) etching out a hollow space between said sensor layer and said substrate, steps (a) through (e) producing an intermediate structure having an outermost surface; (f) depositing a planarization layer of a dielectric material over an entirety of said outermost surface of said intermediate structure; (g) providing regions for electrical connection to said intermediate structure and producing electrically conductive connections to said regions for electrical connection; (h) etching a second free region for said electrochemical sensor and depositing and structuring at least one noble metal electrode in said second free region; (i) depositing an additional protective layer over said noble metal electrode; (j) outwardly exposing said sensor layer of said pressure sensor; and (k) depositing and structuring a plurality of additional layers for said electrochemical sensor. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification