High-sensitivity instrument to measure NVR in fluids
First Claim
1. An apparatus for detecting contamination in a fluid comprising:
- a SAW sensor having a sensor surface;
a fluid inlet which receives a mixture of contaminants and an otherwise pure fluid from an external source;
a fluid dispenser which receives the mixture received by said inlet and dispenses said mixture with said contaminants in said fluid onto the sensor surface; and
a vessel which contains the fluid under pressure, said vessel being connected to supply said fluid under pressure to said inlet.
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Accused Products
Abstract
A real time nonvolatile residue (NVR) monitor operates to efficiently detect molecular contamination in a given environment. The present NVR monitor utilizes surface acoustic wave (SAW) resonators in a controlled environment which efficiently promotes deposition of NVR on the sensor surface. The SAW resonators preferably operate at a resonant frequency of approximately 200 MHz-2,000 MHz which enables the NVR monitor to detect molecular contamination on the order of 10-11 g-cm-2 to 10-13 g-cm-2. The NVR monitor utilizes active temperature control of (SAW) resonators to achieve a stable resonant frequency and to thermally separate NVR from a sample fluid contacting the SAW. The temperature control system of the NVR monitor is able to directly heat and cool the SAW resonators utilizing a thermoelectric element to maintain the resonators at a preset temperature in accordance with optimal environmental conditions for separating NVR from the sample fluid. The sample fluid, comprising a carrier fluid and NVR, is furthermore processed to provide conditions, such as pre-cooling and/or pressurization, which enhance condensation of NVR on the sensor surface. Increasing the collection efficiency allows the NVR monitor to operate faster at a desired level of accuracy and provides more quantitative information for trace contaminant analysis.
40 Citations
31 Claims
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1. An apparatus for detecting contamination in a fluid comprising:
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a SAW sensor having a sensor surface; a fluid inlet which receives a mixture of contaminants and an otherwise pure fluid from an external source; a fluid dispenser which receives the mixture received by said inlet and dispenses said mixture with said contaminants in said fluid onto the sensor surface; and a vessel which contains the fluid under pressure, said vessel being connected to supply said fluid under pressure to said inlet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of detecting contaminants in a fluid, comprising:
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inputting a mixture of said fluid and contaminants into a fluid inlet of a detection apparatus; transporting said mixture of said fluid and said contaminants from said fluid inlet along a flow path to a SAW sensor of said apparatus without separating said fluid and said contaminants; directing said mixture of said fluid and said contaminants from said flow path onto a surface of the SAW sensor; thermally separating the contaminants from the fluid such that said contaminants are distributed on the surface of the SAW sensor; and detecting changes in response of the SAW sensor due to the contaminants on the surface of the SAW sensor; wherein the step of inputting comprises the step of connecting the fluid inlet to a vessel containing said mixture of said fluid and contaminants under pressure. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification